JPH0413837B2 - - Google Patents

Info

Publication number
JPH0413837B2
JPH0413837B2 JP57051999A JP5199982A JPH0413837B2 JP H0413837 B2 JPH0413837 B2 JP H0413837B2 JP 57051999 A JP57051999 A JP 57051999A JP 5199982 A JP5199982 A JP 5199982A JP H0413837 B2 JPH0413837 B2 JP H0413837B2
Authority
JP
Japan
Prior art keywords
vacuum
heating
sample
ceramic plate
aluminum nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57051999A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58169788A (ja
Inventor
Takao Oota
Juichi Mikata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP5199982A priority Critical patent/JPS58169788A/ja
Publication of JPS58169788A publication Critical patent/JPS58169788A/ja
Publication of JPH0413837B2 publication Critical patent/JPH0413837B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Surface Heating Bodies (AREA)
  • Resistance Heating (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP5199982A 1982-03-30 1982-03-30 真空用試料加熱装置 Granted JPS58169788A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5199982A JPS58169788A (ja) 1982-03-30 1982-03-30 真空用試料加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5199982A JPS58169788A (ja) 1982-03-30 1982-03-30 真空用試料加熱装置

Publications (2)

Publication Number Publication Date
JPS58169788A JPS58169788A (ja) 1983-10-06
JPH0413837B2 true JPH0413837B2 (enrdf_load_stackoverflow) 1992-03-10

Family

ID=12902537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5199982A Granted JPS58169788A (ja) 1982-03-30 1982-03-30 真空用試料加熱装置

Country Status (1)

Country Link
JP (1) JPS58169788A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0774451B2 (ja) * 1986-11-29 1995-08-09 京セラ株式会社 成膜装置
JP2527836B2 (ja) * 1990-08-17 1996-08-28 日本碍子株式会社 半導体ウエハ―加熱装置
JP2543638B2 (ja) * 1991-10-09 1996-10-16 日本碍子株式会社 セラミックスヒ―タ―
EP1120817B8 (en) * 1991-03-26 2007-10-10 Ngk Insulators, Ltd. Use of a corrosion-resistant member

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5254940U (enrdf_load_stackoverflow) * 1975-10-20 1977-04-20
JPS57870A (en) * 1980-06-04 1982-01-05 Matsushita Electric Ind Co Ltd Ceramic heater
JPS5737436U (enrdf_load_stackoverflow) * 1980-08-13 1982-02-27

Also Published As

Publication number Publication date
JPS58169788A (ja) 1983-10-06

Similar Documents

Publication Publication Date Title
US3549847A (en) Graphite susceptor
JP3984820B2 (ja) 縦型減圧ｃｖｄ装置
CN111074348B (zh) 一种降低晶体内部应力的退火处理方法及装置
KR900000835B1 (ko) 서스펜션 캔릴레버(Suspension Cantilever) 로딩장치(Loading system)를 갖는 횡형로(橫型爐)
JPH0413837B2 (enrdf_load_stackoverflow)
JP2533679B2 (ja) 盤状セラミックスヒ―タ―及びその製造方法
JPS60200519A (ja) 発熱体
JP2798570B2 (ja) 静電チャック
CN215668287U (zh) 一种碳化硅籽晶的固定结构
JP3474406B2 (ja) シリコン製発熱体及びこれを用いた半導体製造装置
KR20160049432A (ko) 탄화규소 잉곳의 열처리 방법
JP2971818B2 (ja) ウエハー熱処理装置
US20180292133A1 (en) Heat treating furnace
JP4433686B2 (ja) 半導体あるいは液晶製造装置用保持体およびそれを搭載した半導体あるいは液晶製造装置
JPH06168899A (ja) 基板加熱用ヒータユニット
JP2820880B2 (ja) 冷却機能付き保持装置
KR101272977B1 (ko) 서셉터 및 이의 제조 방법
JPS634503Y2 (enrdf_load_stackoverflow)
JPS6224939B2 (enrdf_load_stackoverflow)
JP3651547B2 (ja) 半導体製造用セラミックチューブ
JP3685627B2 (ja) コーティング膜を有するカーボン材料
JPS5919315A (ja) 真空用加熱装置
JPS58170532A (ja) 真空用加熱装置
JPH04334018A (ja) 熱処理装置
JPS6159180B2 (enrdf_load_stackoverflow)