JPS58158981A - トンネル形ジヨセフソン接合素子の作製方法 - Google Patents
トンネル形ジヨセフソン接合素子の作製方法Info
- Publication number
- JPS58158981A JPS58158981A JP57041293A JP4129382A JPS58158981A JP S58158981 A JPS58158981 A JP S58158981A JP 57041293 A JP57041293 A JP 57041293A JP 4129382 A JP4129382 A JP 4129382A JP S58158981 A JPS58158981 A JP S58158981A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- barrier layer
- tunnel
- thin film
- base electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 230000004888 barrier function Effects 0.000 claims abstract description 35
- 238000000034 method Methods 0.000 claims abstract description 24
- 239000010409 thin film Substances 0.000 claims abstract description 13
- 239000000463 material Substances 0.000 claims abstract description 9
- 230000008569 process Effects 0.000 claims description 6
- 239000010437 gem Substances 0.000 claims 1
- 229910001751 gemstone Inorganic materials 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000010408 film Substances 0.000 abstract description 13
- 239000000758 substrate Substances 0.000 abstract description 11
- 230000001590 oxidative effect Effects 0.000 abstract description 6
- 238000004544 sputter deposition Methods 0.000 abstract description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 abstract description 2
- 239000000126 substance Substances 0.000 abstract description 2
- 238000007599 discharging Methods 0.000 abstract 1
- 238000000313 electron-beam-induced deposition Methods 0.000 abstract 1
- 238000001552 radio frequency sputter deposition Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 33
- 239000010410 layer Substances 0.000 description 24
- 238000007254 oxidation reaction Methods 0.000 description 17
- 230000003647 oxidation Effects 0.000 description 16
- 238000005530 etching Methods 0.000 description 13
- 239000002585 base Substances 0.000 description 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 7
- 238000000151 deposition Methods 0.000 description 7
- WMFYOYKPJLRMJI-UHFFFAOYSA-N Lercanidipine hydrochloride Chemical compound Cl.COC(=O)C1=C(C)NC(C)=C(C(=O)OC(C)(C)CN(C)CCC(C=2C=CC=CC=2)C=2C=CC=CC=2)C1C1=CC=CC([N+]([O-])=O)=C1 WMFYOYKPJLRMJI-UHFFFAOYSA-N 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 230000008021 deposition Effects 0.000 description 4
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 3
- 239000002253 acid Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 235000009508 confectionery Nutrition 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000002689 soil Substances 0.000 description 2
- 239000002887 superconductor Substances 0.000 description 2
- 230000005641 tunneling Effects 0.000 description 2
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 1
- 235000017491 Bambusa tulda Nutrition 0.000 description 1
- 241001330002 Bambuseae Species 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 206010021143 Hypoxia Diseases 0.000 description 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000011425 bamboo Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 210000004907 gland Anatomy 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0912—Manufacture or treatment of Josephson-effect devices
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57041293A JPS58158981A (ja) | 1982-03-16 | 1982-03-16 | トンネル形ジヨセフソン接合素子の作製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57041293A JPS58158981A (ja) | 1982-03-16 | 1982-03-16 | トンネル形ジヨセフソン接合素子の作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58158981A true JPS58158981A (ja) | 1983-09-21 |
| JPS6258677B2 JPS6258677B2 (enrdf_load_stackoverflow) | 1987-12-07 |
Family
ID=12604399
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57041293A Granted JPS58158981A (ja) | 1982-03-16 | 1982-03-16 | トンネル形ジヨセフソン接合素子の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58158981A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02126889U (enrdf_load_stackoverflow) * | 1989-03-29 | 1990-10-18 | ||
| JPH0535364U (ja) * | 1991-10-24 | 1993-05-14 | 益弘 光山 | フアイル |
-
1982
- 1982-03-16 JP JP57041293A patent/JPS58158981A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6258677B2 (enrdf_load_stackoverflow) | 1987-12-07 |
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