JPS58158981A - トンネル形ジヨセフソン接合素子の作製方法 - Google Patents

トンネル形ジヨセフソン接合素子の作製方法

Info

Publication number
JPS58158981A
JPS58158981A JP57041293A JP4129382A JPS58158981A JP S58158981 A JPS58158981 A JP S58158981A JP 57041293 A JP57041293 A JP 57041293A JP 4129382 A JP4129382 A JP 4129382A JP S58158981 A JPS58158981 A JP S58158981A
Authority
JP
Japan
Prior art keywords
gas
tunnel
barrier layer
thin film
oxidation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57041293A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6258677B2 (OSRAM
Inventor
Yujiro Kato
加藤　雄二郎
Osamu Michigami
修 道上
Keiichi Tanabe
圭一 田辺
Hisataka Takenaka
久貴 竹中
Shizuka Yoshii
吉井　静
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP57041293A priority Critical patent/JPS58158981A/ja
Publication of JPS58158981A publication Critical patent/JPS58158981A/ja
Publication of JPS6258677B2 publication Critical patent/JPS6258677B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP57041293A 1982-03-16 1982-03-16 トンネル形ジヨセフソン接合素子の作製方法 Granted JPS58158981A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57041293A JPS58158981A (ja) 1982-03-16 1982-03-16 トンネル形ジヨセフソン接合素子の作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57041293A JPS58158981A (ja) 1982-03-16 1982-03-16 トンネル形ジヨセフソン接合素子の作製方法

Publications (2)

Publication Number Publication Date
JPS58158981A true JPS58158981A (ja) 1983-09-21
JPS6258677B2 JPS6258677B2 (OSRAM) 1987-12-07

Family

ID=12604399

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57041293A Granted JPS58158981A (ja) 1982-03-16 1982-03-16 トンネル形ジヨセフソン接合素子の作製方法

Country Status (1)

Country Link
JP (1) JPS58158981A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02126889U (OSRAM) * 1989-03-29 1990-10-18
JPH0535364U (ja) * 1991-10-24 1993-05-14 益弘 光山 フアイル

Also Published As

Publication number Publication date
JPS6258677B2 (OSRAM) 1987-12-07

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