JPS58154280A - トンネル形ジヨセフソン素子の作製方法 - Google Patents
トンネル形ジヨセフソン素子の作製方法Info
- Publication number
- JPS58154280A JPS58154280A JP57037792A JP3779282A JPS58154280A JP S58154280 A JPS58154280 A JP S58154280A JP 57037792 A JP57037792 A JP 57037792A JP 3779282 A JP3779282 A JP 3779282A JP S58154280 A JPS58154280 A JP S58154280A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- thin film
- tunnel
- oxidation
- base electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0912—Manufacture or treatment of Josephson-effect devices
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57037792A JPS58154280A (ja) | 1982-03-10 | 1982-03-10 | トンネル形ジヨセフソン素子の作製方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57037792A JPS58154280A (ja) | 1982-03-10 | 1982-03-10 | トンネル形ジヨセフソン素子の作製方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58154280A true JPS58154280A (ja) | 1983-09-13 |
JPS6258676B2 JPS6258676B2 (nl) | 1987-12-07 |
Family
ID=12507341
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57037792A Granted JPS58154280A (ja) | 1982-03-10 | 1982-03-10 | トンネル形ジヨセフソン素子の作製方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58154280A (nl) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0311675A (ja) * | 1989-06-08 | 1991-01-18 | Agency Of Ind Science & Technol | ジョセフソン接合素子の製造方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04101917U (ja) * | 1991-02-04 | 1992-09-02 | 日本電信電話株式会社 | 磁気カード |
-
1982
- 1982-03-10 JP JP57037792A patent/JPS58154280A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0311675A (ja) * | 1989-06-08 | 1991-01-18 | Agency Of Ind Science & Technol | ジョセフソン接合素子の製造方法 |
JPH0587193B2 (nl) * | 1989-06-08 | 1993-12-15 | Kogyo Gijutsuin |
Also Published As
Publication number | Publication date |
---|---|
JPS6258676B2 (nl) | 1987-12-07 |
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