JPS58153779A - イオンプレ−テイング装置 - Google Patents
イオンプレ−テイング装置Info
- Publication number
- JPS58153779A JPS58153779A JP3633382A JP3633382A JPS58153779A JP S58153779 A JPS58153779 A JP S58153779A JP 3633382 A JP3633382 A JP 3633382A JP 3633382 A JP3633382 A JP 3633382A JP S58153779 A JPS58153779 A JP S58153779A
- Authority
- JP
- Japan
- Prior art keywords
- ion plating
- workpiece
- heater
- work
- processing chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007733 ion plating Methods 0.000 title abstract 7
- 238000001704 evaporation Methods 0.000 claims abstract description 13
- 230000008020 evaporation Effects 0.000 claims abstract description 13
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 238000001816 cooling Methods 0.000 abstract description 7
- 238000010438 heat treatment Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 2
- 238000007796 conventional method Methods 0.000 abstract 1
- 239000011261 inert gas Substances 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 description 8
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 241000208140 Acer Species 0.000 description 1
- 241000269821 Scombridae Species 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 235000020640 mackerel Nutrition 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3633382A JPS58153779A (ja) | 1982-03-10 | 1982-03-10 | イオンプレ−テイング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3633382A JPS58153779A (ja) | 1982-03-10 | 1982-03-10 | イオンプレ−テイング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58153779A true JPS58153779A (ja) | 1983-09-12 |
| JPS6128028B2 JPS6128028B2 (enExample) | 1986-06-28 |
Family
ID=12466895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3633382A Granted JPS58153779A (ja) | 1982-03-10 | 1982-03-10 | イオンプレ−テイング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58153779A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3279364A1 (en) * | 2016-08-03 | 2018-02-07 | IHI Hauzer Techno Coating B.V. | Apparatus for coating substrates |
-
1982
- 1982-03-10 JP JP3633382A patent/JPS58153779A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3279364A1 (en) * | 2016-08-03 | 2018-02-07 | IHI Hauzer Techno Coating B.V. | Apparatus for coating substrates |
| US20180037986A1 (en) * | 2016-08-03 | 2018-02-08 | Ihi Hauzer Techno Coating B.V. | Apparatus for coating substrates |
| KR20180015590A (ko) * | 2016-08-03 | 2018-02-13 | 아이에이치아이 하우저 테크노 코팅 비브이 | 기판을 코팅하기 위한 장치 |
| CN107686978A (zh) * | 2016-08-03 | 2018-02-13 | 豪泽尔涂层技术有限公司 | 用于涂敷衬底的设备 |
| US11131019B2 (en) | 2016-08-03 | 2021-09-28 | Ihi Hauzer Techno Coating B.V. | Apparatus for coating substrates |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6128028B2 (enExample) | 1986-06-28 |
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