JPS58151073A - 光電変換素子及びその製造方法 - Google Patents

光電変換素子及びその製造方法

Info

Publication number
JPS58151073A
JPS58151073A JP58018040A JP1804083A JPS58151073A JP S58151073 A JPS58151073 A JP S58151073A JP 58018040 A JP58018040 A JP 58018040A JP 1804083 A JP1804083 A JP 1804083A JP S58151073 A JPS58151073 A JP S58151073A
Authority
JP
Japan
Prior art keywords
layer
evaporation source
tin
evaporation
indium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58018040A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0512870B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Isao Myokan
明官　功
Masanari Shindo
新藤　昌成
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Inc
Original Assignee
Konica Minolta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc
Priority to JP58018040A priority Critical patent/JPS58151073A/ja
Publication of JPS58151073A publication Critical patent/JPS58151073A/ja
Publication of JPH0512870B2 publication Critical patent/JPH0512870B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/138—Manufacture of transparent electrodes, e.g. transparent conductive oxides [TCO] or indium tin oxide [ITO] electrodes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Photovoltaic Devices (AREA)
JP58018040A 1983-02-08 1983-02-08 光電変換素子及びその製造方法 Granted JPS58151073A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58018040A JPS58151073A (ja) 1983-02-08 1983-02-08 光電変換素子及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58018040A JPS58151073A (ja) 1983-02-08 1983-02-08 光電変換素子及びその製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP56178967A Division JPS5880878A (ja) 1981-11-10 1981-11-10 太陽電池の製造方法

Publications (2)

Publication Number Publication Date
JPS58151073A true JPS58151073A (ja) 1983-09-08
JPH0512870B2 JPH0512870B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-02-19

Family

ID=11960562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58018040A Granted JPS58151073A (ja) 1983-02-08 1983-02-08 光電変換素子及びその製造方法

Country Status (1)

Country Link
JP (1) JPS58151073A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107527972A (zh) * 2017-09-29 2017-12-29 理想晶延半导体设备（上海）有限公司 一种晶硅太阳能电池处理设备

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5814582A (ja) * 1981-07-17 1983-01-27 Kanegafuchi Chem Ind Co Ltd 高効率のアモルフアスシリコン系太陽電池

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5814582A (ja) * 1981-07-17 1983-01-27 Kanegafuchi Chem Ind Co Ltd 高効率のアモルフアスシリコン系太陽電池

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107527972A (zh) * 2017-09-29 2017-12-29 理想晶延半导体设备（上海）有限公司 一种晶硅太阳能电池处理设备

Also Published As

Publication number Publication date
JPH0512870B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-02-19

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