JPS58146805A - 平面度測定装置 - Google Patents

平面度測定装置

Info

Publication number
JPS58146805A
JPS58146805A JP2962082A JP2962082A JPS58146805A JP S58146805 A JPS58146805 A JP S58146805A JP 2962082 A JP2962082 A JP 2962082A JP 2962082 A JP2962082 A JP 2962082A JP S58146805 A JPS58146805 A JP S58146805A
Authority
JP
Japan
Prior art keywords
flatness
address
image sensor
data
reference plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2962082A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6342724B2 (enrdf_load_stackoverflow
Inventor
Toshiaki Wada
和田　俊朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Sumitomo Special Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Special Metals Co Ltd filed Critical Sumitomo Special Metals Co Ltd
Priority to JP2962082A priority Critical patent/JPS58146805A/ja
Priority to US06/449,733 priority patent/US4627733A/en
Priority to DE19823247238 priority patent/DE3247238A1/de
Publication of JPS58146805A publication Critical patent/JPS58146805A/ja
Publication of JPS6342724B2 publication Critical patent/JPS6342724B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Supporting Of Heads In Record-Carrier Devices (AREA)
JP2962082A 1981-12-25 1982-02-24 平面度測定装置 Granted JPS58146805A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2962082A JPS58146805A (ja) 1982-02-24 1982-02-24 平面度測定装置
US06/449,733 US4627733A (en) 1981-12-25 1982-12-14 Flatness measuring apparatus
DE19823247238 DE3247238A1 (de) 1981-12-25 1982-12-21 Ebenheitsmessgeraet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2962082A JPS58146805A (ja) 1982-02-24 1982-02-24 平面度測定装置

Publications (2)

Publication Number Publication Date
JPS58146805A true JPS58146805A (ja) 1983-09-01
JPS6342724B2 JPS6342724B2 (enrdf_load_stackoverflow) 1988-08-25

Family

ID=12281122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2962082A Granted JPS58146805A (ja) 1981-12-25 1982-02-24 平面度測定装置

Country Status (1)

Country Link
JP (1) JPS58146805A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6197555A (ja) * 1984-10-19 1986-05-16 Tokyo Optical Co Ltd 表面検査装置
EP3869527B1 (de) * 2020-02-18 2022-07-27 Schaltbau GmbH Schaltgerät mit zumindest zwei miteinander kommunizierenden löschbereichen

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6197555A (ja) * 1984-10-19 1986-05-16 Tokyo Optical Co Ltd 表面検査装置
EP3869527B1 (de) * 2020-02-18 2022-07-27 Schaltbau GmbH Schaltgerät mit zumindest zwei miteinander kommunizierenden löschbereichen

Also Published As

Publication number Publication date
JPS6342724B2 (enrdf_load_stackoverflow) 1988-08-25

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