JPS58140139A - 半導体装置およびその製造方法 - Google Patents

半導体装置およびその製造方法

Info

Publication number
JPS58140139A
JPS58140139A JP57023880A JP2388082A JPS58140139A JP S58140139 A JPS58140139 A JP S58140139A JP 57023880 A JP57023880 A JP 57023880A JP 2388082 A JP2388082 A JP 2388082A JP S58140139 A JPS58140139 A JP S58140139A
Authority
JP
Japan
Prior art keywords
polyimide
silicon nitride
nitride film
semiconductor device
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57023880A
Other languages
English (en)
Japanese (ja)
Other versions
JPH038581B2 (enrdf_load_stackoverflow
Inventor
Hitoshi Kudo
均 工藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP57023880A priority Critical patent/JPS58140139A/ja
Publication of JPS58140139A publication Critical patent/JPS58140139A/ja
Publication of JPH038581B2 publication Critical patent/JPH038581B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
  • Local Oxidation Of Silicon (AREA)
JP57023880A 1982-02-16 1982-02-16 半導体装置およびその製造方法 Granted JPS58140139A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57023880A JPS58140139A (ja) 1982-02-16 1982-02-16 半導体装置およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57023880A JPS58140139A (ja) 1982-02-16 1982-02-16 半導体装置およびその製造方法

Publications (2)

Publication Number Publication Date
JPS58140139A true JPS58140139A (ja) 1983-08-19
JPH038581B2 JPH038581B2 (enrdf_load_stackoverflow) 1991-02-06

Family

ID=12122760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57023880A Granted JPS58140139A (ja) 1982-02-16 1982-02-16 半導体装置およびその製造方法

Country Status (1)

Country Link
JP (1) JPS58140139A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60165739A (ja) * 1984-02-07 1985-08-28 Nec Kansai Ltd 半導体装置の製造方法
JPS63104425A (ja) * 1986-10-09 1988-05-09 インタ−ナショナル・ビジネス・マシ−ンズ・コ−ポレ−ション バイアの形成方法
JPH02235359A (ja) * 1989-03-09 1990-09-18 Oki Electric Ind Co Ltd 多層配線形成方法
JPH02238627A (ja) * 1989-03-10 1990-09-20 Nec Corp 半導体装置
JP2009524217A (ja) * 2006-01-12 2009-06-25 クリー インコーポレイテッド 炭化ケイ素デバイス用のエッジ終端構造およびエッジ終端構造を含む炭化ケイ素デバイスの製造方法
US8124480B2 (en) 2003-01-15 2012-02-28 Cree, Inc. Methods of fabricating silicon carbide devices incorporating multiple floating guard ring edge terminations

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60165739A (ja) * 1984-02-07 1985-08-28 Nec Kansai Ltd 半導体装置の製造方法
JPS63104425A (ja) * 1986-10-09 1988-05-09 インタ−ナショナル・ビジネス・マシ−ンズ・コ−ポレ−ション バイアの形成方法
JPH02235359A (ja) * 1989-03-09 1990-09-18 Oki Electric Ind Co Ltd 多層配線形成方法
JPH02238627A (ja) * 1989-03-10 1990-09-20 Nec Corp 半導体装置
US8124480B2 (en) 2003-01-15 2012-02-28 Cree, Inc. Methods of fabricating silicon carbide devices incorporating multiple floating guard ring edge terminations
US9515135B2 (en) 2003-01-15 2016-12-06 Cree, Inc. Edge termination structures for silicon carbide devices
JP2009524217A (ja) * 2006-01-12 2009-06-25 クリー インコーポレイテッド 炭化ケイ素デバイス用のエッジ終端構造およびエッジ終端構造を含む炭化ケイ素デバイスの製造方法

Also Published As

Publication number Publication date
JPH038581B2 (enrdf_load_stackoverflow) 1991-02-06

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