JPS58135910A - 自動距離合わせ装置 - Google Patents

自動距離合わせ装置

Info

Publication number
JPS58135910A
JPS58135910A JP1933182A JP1933182A JPS58135910A JP S58135910 A JPS58135910 A JP S58135910A JP 1933182 A JP1933182 A JP 1933182A JP 1933182 A JP1933182 A JP 1933182A JP S58135910 A JPS58135910 A JP S58135910A
Authority
JP
Japan
Prior art keywords
subtraction
distance
light
output
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1933182A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6316686B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Hideo Kusakabe
秀雄 日下部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP1933182A priority Critical patent/JPS58135910A/ja
Publication of JPS58135910A publication Critical patent/JPS58135910A/ja
Publication of JPS6316686B2 publication Critical patent/JPS6316686B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Optical Distance (AREA)
  • Automatic Focus Adjustment (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP1933182A 1982-02-09 1982-02-09 自動距離合わせ装置 Granted JPS58135910A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1933182A JPS58135910A (ja) 1982-02-09 1982-02-09 自動距離合わせ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1933182A JPS58135910A (ja) 1982-02-09 1982-02-09 自動距離合わせ装置

Publications (2)

Publication Number Publication Date
JPS58135910A true JPS58135910A (ja) 1983-08-12
JPS6316686B2 JPS6316686B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-04-11

Family

ID=11996419

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1933182A Granted JPS58135910A (ja) 1982-02-09 1982-02-09 自動距離合わせ装置

Country Status (1)

Country Link
JP (1) JPS58135910A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04204811A (ja) * 1990-11-30 1992-07-27 Fuji Photo Film Co Ltd アクティブ式測距方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5842411A (ja) * 1981-09-07 1983-03-11 大塚化学株式会社 木質材料の寸法安定化処理方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5842411A (ja) * 1981-09-07 1983-03-11 大塚化学株式会社 木質材料の寸法安定化処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04204811A (ja) * 1990-11-30 1992-07-27 Fuji Photo Film Co Ltd アクティブ式測距方法

Also Published As

Publication number Publication date
JPS6316686B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-04-11

Similar Documents

Publication Publication Date Title
US4998234A (en) Logarithmic servo error detection for optical disk drive
US5108176A (en) Method of calibrating scanners and arrangement for producing defined scattered light amplitudes
KR860002733A (ko) 카메라의 자동촛점 조정장치
JPS58119642A (ja) 電子線自動焦点装置
JPS6177701A (ja) 光学式測定機器におけるエツジ検出装置
JPS58135910A (ja) 自動距離合わせ装置
JPH04208515A (ja) 電子線描画装置及び方法、及びその試料面高さ測定装置
JP3974670B2 (ja) 光学式変位測定装置
JPH02128185A (ja) 反射型光電スイッチ
JP2003030867A (ja) フォーカス制御方法及び装置とそれを用いた原盤露光装置
JPS6024014A (ja) 自動焦点合わせ装置
JPS61226607A (ja) 測距装置
JP4041260B2 (ja) 荷電粒子ビーム装置及び荷電粒子ビーム装置の制御方法
JP3195656B2 (ja) 光学式変位測定装置
JPH09318322A (ja) 光学式変位測定装置
JPH06160082A (ja) 光学式測距装置
JP2865064B2 (ja) 光ビーム出射角度制御装置及び光ビーム出射位置制御装置
JPH01232212A (ja) 変位測定装置
JPH064890A (ja) オフセット調整回路
JPH03265815A (ja) レーザビームによる描画装置
JPS59202731A (ja) 光電スイツチ
JP2957234B2 (ja) 露光装置
JPH01274010A (ja) 光学式変位測定装置
JPH0642958A (ja) 光学式変位測定装置
SU1296836A1 (ru) Способ измерени смещений светового п тна