JPS5812939U - 半導体気相成長装置 - Google Patents

半導体気相成長装置

Info

Publication number
JPS5812939U
JPS5812939U JP10555181U JP10555181U JPS5812939U JP S5812939 U JPS5812939 U JP S5812939U JP 10555181 U JP10555181 U JP 10555181U JP 10555181 U JP10555181 U JP 10555181U JP S5812939 U JPS5812939 U JP S5812939U
Authority
JP
Japan
Prior art keywords
reaction
vapor phase
phase growth
rings
reaction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10555181U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6339961Y2 (en, 2012
Inventor
岩田　公弟
宮崎　美彦
吉三 小宮山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP10555181U priority Critical patent/JPS5812939U/ja
Publication of JPS5812939U publication Critical patent/JPS5812939U/ja
Application granted granted Critical
Publication of JPS6339961Y2 publication Critical patent/JPS6339961Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP10555181U 1981-07-16 1981-07-16 半導体気相成長装置 Granted JPS5812939U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10555181U JPS5812939U (ja) 1981-07-16 1981-07-16 半導体気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10555181U JPS5812939U (ja) 1981-07-16 1981-07-16 半導体気相成長装置

Publications (2)

Publication Number Publication Date
JPS5812939U true JPS5812939U (ja) 1983-01-27
JPS6339961Y2 JPS6339961Y2 (en, 2012) 1988-10-19

Family

ID=29900083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10555181U Granted JPS5812939U (ja) 1981-07-16 1981-07-16 半導体気相成長装置

Country Status (1)

Country Link
JP (1) JPS5812939U (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008084557A (ja) * 2006-09-26 2008-04-10 Sukegawa Electric Co Ltd 背面電子衝撃加熱装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008084557A (ja) * 2006-09-26 2008-04-10 Sukegawa Electric Co Ltd 背面電子衝撃加熱装置

Also Published As

Publication number Publication date
JPS6339961Y2 (en, 2012) 1988-10-19

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