JPS58129240A - 感湿素子の製作方法 - Google Patents

感湿素子の製作方法

Info

Publication number
JPS58129240A
JPS58129240A JP57012223A JP1222382A JPS58129240A JP S58129240 A JPS58129240 A JP S58129240A JP 57012223 A JP57012223 A JP 57012223A JP 1222382 A JP1222382 A JP 1222382A JP S58129240 A JPS58129240 A JP S58129240A
Authority
JP
Japan
Prior art keywords
humidity
silicate
moisture
range
sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57012223A
Other languages
English (en)
Japanese (ja)
Other versions
JPS632464B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Kunihiko Miyao
宮尾　国彦
Hidefusa Uchikawa
英興 内川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP57012223A priority Critical patent/JPS58129240A/ja
Publication of JPS58129240A publication Critical patent/JPS58129240A/ja
Publication of JPS632464B2 publication Critical patent/JPS632464B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Non-Adjustable Resistors (AREA)
JP57012223A 1982-01-28 1982-01-28 感湿素子の製作方法 Granted JPS58129240A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57012223A JPS58129240A (ja) 1982-01-28 1982-01-28 感湿素子の製作方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57012223A JPS58129240A (ja) 1982-01-28 1982-01-28 感湿素子の製作方法

Publications (2)

Publication Number Publication Date
JPS58129240A true JPS58129240A (ja) 1983-08-02
JPS632464B2 JPS632464B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-01-19

Family

ID=11799373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57012223A Granted JPS58129240A (ja) 1982-01-28 1982-01-28 感湿素子の製作方法

Country Status (1)

Country Link
JP (1) JPS58129240A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5001453A (en) * 1988-06-27 1991-03-19 Seiko Epson Corporation Humidity sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5001453A (en) * 1988-06-27 1991-03-19 Seiko Epson Corporation Humidity sensor

Also Published As

Publication number Publication date
JPS632464B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-01-19

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