JPS5812730B2 - ウエ−ハジグ - Google Patents

ウエ−ハジグ

Info

Publication number
JPS5812730B2
JPS5812730B2 JP8756173A JP8756173A JPS5812730B2 JP S5812730 B2 JPS5812730 B2 JP S5812730B2 JP 8756173 A JP8756173 A JP 8756173A JP 8756173 A JP8756173 A JP 8756173A JP S5812730 B2 JPS5812730 B2 JP S5812730B2
Authority
JP
Japan
Prior art keywords
wafer
groove
jig
grooves
quartz glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8756173A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5037355A (online.php
Inventor
稲庭桂造
田辺敏雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8756173A priority Critical patent/JPS5812730B2/ja
Publication of JPS5037355A publication Critical patent/JPS5037355A/ja
Publication of JPS5812730B2 publication Critical patent/JPS5812730B2/ja
Expired legal-status Critical Current

Links

JP8756173A 1973-08-06 1973-08-06 ウエ−ハジグ Expired JPS5812730B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8756173A JPS5812730B2 (ja) 1973-08-06 1973-08-06 ウエ−ハジグ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8756173A JPS5812730B2 (ja) 1973-08-06 1973-08-06 ウエ−ハジグ

Publications (2)

Publication Number Publication Date
JPS5037355A JPS5037355A (online.php) 1975-04-08
JPS5812730B2 true JPS5812730B2 (ja) 1983-03-10

Family

ID=13918389

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8756173A Expired JPS5812730B2 (ja) 1973-08-06 1973-08-06 ウエ−ハジグ

Country Status (1)

Country Link
JP (1) JPS5812730B2 (online.php)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5527976U (online.php) * 1978-08-15 1980-02-22
JPS5599719A (en) * 1979-01-26 1980-07-30 Hitachi Ltd Heat treatment jig of wafer
JPS55110035A (en) * 1979-02-16 1980-08-25 Hitachi Ltd Jig for heat treating wafer
US4256229A (en) * 1979-09-17 1981-03-17 Rockwell International Corporation Boat for wafer processing
JPS58138918U (ja) * 1982-03-12 1983-09-19 中興化成工業株式会社 レンズ等の洗浄用支持装置

Also Published As

Publication number Publication date
JPS5037355A (online.php) 1975-04-08

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