JPS5812542B2 - リユウシセンブンセキソウチ - Google Patents

リユウシセンブンセキソウチ

Info

Publication number
JPS5812542B2
JPS5812542B2 JP49114483A JP11448374A JPS5812542B2 JP S5812542 B2 JPS5812542 B2 JP S5812542B2 JP 49114483 A JP49114483 A JP 49114483A JP 11448374 A JP11448374 A JP 11448374A JP S5812542 B2 JPS5812542 B2 JP S5812542B2
Authority
JP
Japan
Prior art keywords
sample
particle beam
scanning
analysis
analysis position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP49114483A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5141588A (enrdf_load_stackoverflow
Inventor
岡本孝夫
原行一
山田満彦
渡部忠雄
片桐信二郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP49114483A priority Critical patent/JPS5812542B2/ja
Publication of JPS5141588A publication Critical patent/JPS5141588A/ja
Publication of JPS5812542B2 publication Critical patent/JPS5812542B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP49114483A 1974-10-04 1974-10-04 リユウシセンブンセキソウチ Expired JPS5812542B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49114483A JPS5812542B2 (ja) 1974-10-04 1974-10-04 リユウシセンブンセキソウチ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49114483A JPS5812542B2 (ja) 1974-10-04 1974-10-04 リユウシセンブンセキソウチ

Publications (2)

Publication Number Publication Date
JPS5141588A JPS5141588A (enrdf_load_stackoverflow) 1976-04-07
JPS5812542B2 true JPS5812542B2 (ja) 1983-03-09

Family

ID=14638865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49114483A Expired JPS5812542B2 (ja) 1974-10-04 1974-10-04 リユウシセンブンセキソウチ

Country Status (1)

Country Link
JP (1) JPS5812542B2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4990074A (enrdf_load_stackoverflow) * 1972-12-27 1974-08-28

Also Published As

Publication number Publication date
JPS5141588A (enrdf_load_stackoverflow) 1976-04-07

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