JPS58110095A - セラミック基板の製造方法 - Google Patents
セラミック基板の製造方法Info
- Publication number
- JPS58110095A JPS58110095A JP20891681A JP20891681A JPS58110095A JP S58110095 A JPS58110095 A JP S58110095A JP 20891681 A JP20891681 A JP 20891681A JP 20891681 A JP20891681 A JP 20891681A JP S58110095 A JPS58110095 A JP S58110095A
- Authority
- JP
- Japan
- Prior art keywords
- slurry
- ceramic
- film
- layer
- reservoir
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims description 33
- 238000000034 method Methods 0.000 title claims description 9
- 239000002002 slurry Substances 0.000 claims description 66
- 239000000758 substrate Substances 0.000 claims description 14
- 238000007606 doctor blade method Methods 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 238000001035 drying Methods 0.000 claims description 3
- 230000007547 defect Effects 0.000 description 5
- 238000005192 partition Methods 0.000 description 5
- 206010011224 Cough Diseases 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010348 incorporation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 244000115658 Dahlia pinnata Species 0.000 description 1
- 235000012040 Dahlia pinnata Nutrition 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229940047284 cefix Drugs 0.000 description 1
- 239000012611 container material Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 229920006215 polyvinyl ketone Polymers 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229940116641 vaginal film Drugs 0.000 description 1
Landscapes
- Producing Shaped Articles From Materials (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Insulating Bodies (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20891681A JPS58110095A (ja) | 1981-12-23 | 1981-12-23 | セラミック基板の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20891681A JPS58110095A (ja) | 1981-12-23 | 1981-12-23 | セラミック基板の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58110095A true JPS58110095A (ja) | 1983-06-30 |
| JPH0213956B2 JPH0213956B2 (enrdf_load_stackoverflow) | 1990-04-05 |
Family
ID=16564235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20891681A Granted JPS58110095A (ja) | 1981-12-23 | 1981-12-23 | セラミック基板の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58110095A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01163104U (enrdf_load_stackoverflow) * | 1988-05-07 | 1989-11-14 |
-
1981
- 1981-12-23 JP JP20891681A patent/JPS58110095A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01163104U (enrdf_load_stackoverflow) * | 1988-05-07 | 1989-11-14 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0213956B2 (enrdf_load_stackoverflow) | 1990-04-05 |