JPS58105474U - 高周波イオンプレ−テイング用反応管 - Google Patents

高周波イオンプレ−テイング用反応管

Info

Publication number
JPS58105474U
JPS58105474U JP70382U JP70382U JPS58105474U JP S58105474 U JPS58105474 U JP S58105474U JP 70382 U JP70382 U JP 70382U JP 70382 U JP70382 U JP 70382U JP S58105474 U JPS58105474 U JP S58105474U
Authority
JP
Japan
Prior art keywords
reaction tube
high frequency
frequency ion
ion plating
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP70382U
Other languages
English (en)
Japanese (ja)
Other versions
JPS621227Y2 (enrdf_load_stackoverflow
Inventor
野口　今朝男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP70382U priority Critical patent/JPS58105474U/ja
Publication of JPS58105474U publication Critical patent/JPS58105474U/ja
Application granted granted Critical
Publication of JPS621227Y2 publication Critical patent/JPS621227Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP70382U 1982-01-07 1982-01-07 高周波イオンプレ−テイング用反応管 Granted JPS58105474U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP70382U JPS58105474U (ja) 1982-01-07 1982-01-07 高周波イオンプレ−テイング用反応管

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP70382U JPS58105474U (ja) 1982-01-07 1982-01-07 高周波イオンプレ−テイング用反応管

Publications (2)

Publication Number Publication Date
JPS58105474U true JPS58105474U (ja) 1983-07-18
JPS621227Y2 JPS621227Y2 (enrdf_load_stackoverflow) 1987-01-13

Family

ID=30013761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP70382U Granted JPS58105474U (ja) 1982-01-07 1982-01-07 高周波イオンプレ−テイング用反応管

Country Status (1)

Country Link
JP (1) JPS58105474U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS621227Y2 (enrdf_load_stackoverflow) 1987-01-13

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