JPS5799372A - Formation of thin magnetic film - Google Patents
Formation of thin magnetic filmInfo
- Publication number
- JPS5799372A JPS5799372A JP17449780A JP17449780A JPS5799372A JP S5799372 A JPS5799372 A JP S5799372A JP 17449780 A JP17449780 A JP 17449780A JP 17449780 A JP17449780 A JP 17449780A JP S5799372 A JPS5799372 A JP S5799372A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- paint
- magnetic film
- space
- over plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
Abstract
PURPOSE: To form a thin magnetic film having a uniform thickness free from applying unevenness, when magnetic paint is applied to the surface of a substrate being rotated, by locating an over plate having a specified shape above the substrate.
CONSTITUTION: A substrate 3 is attached to a spindle 4 arranged inside a chamber 5, and magnetic paint is applied to the surface of the substrate 3 being slowly rotated at a speed of 50W250rpm. Thereafter, the rotation speed is raised to 1,000rpm or so to shake off the adherent paint by a centrifugal force. Thus, a thin magnetic film is formed. In this case, an over plate 2', having a shape such that a distance from the substrate 3 becomes longer from the peripheral side to the inner side, is located above the rotating substrate 3. The over plate 2' comes near the substrate 3 at a space outside the substrate 3, so that the vapor pressure of a solvent in the paint is likely to be saturated and that evaporation of the solvent is suppressed. Consequently, increase in viscosity of the paint is slower at the outer space than that at the inner space, and the rate of the paint to be shaked off by the centrifugal force is larger at the outer space than that at the inner space. Thus, a difference in thickness between the outer part and the inner part of the paint film is reduced, and the magnetic film having a uniform thickness can be formed.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17449780A JPS5799372A (en) | 1980-12-12 | 1980-12-12 | Formation of thin magnetic film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17449780A JPS5799372A (en) | 1980-12-12 | 1980-12-12 | Formation of thin magnetic film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5799372A true JPS5799372A (en) | 1982-06-21 |
JPS6311941B2 JPS6311941B2 (en) | 1988-03-16 |
Family
ID=15979518
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17449780A Granted JPS5799372A (en) | 1980-12-12 | 1980-12-12 | Formation of thin magnetic film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5799372A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61291072A (en) * | 1985-06-20 | 1986-12-20 | Matsushita Electric Ind Co Ltd | Spin coating method |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4495955B2 (en) * | 2003-12-04 | 2010-07-07 | 株式会社 日立ディスプレイズ | Film forming method, film forming apparatus and element |
-
1980
- 1980-12-12 JP JP17449780A patent/JPS5799372A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61291072A (en) * | 1985-06-20 | 1986-12-20 | Matsushita Electric Ind Co Ltd | Spin coating method |
Also Published As
Publication number | Publication date |
---|---|
JPS6311941B2 (en) | 1988-03-16 |
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