JPS6490063A - Spin coating method - Google Patents
Spin coating methodInfo
- Publication number
- JPS6490063A JPS6490063A JP24945387A JP24945387A JPS6490063A JP S6490063 A JPS6490063 A JP S6490063A JP 24945387 A JP24945387 A JP 24945387A JP 24945387 A JP24945387 A JP 24945387A JP S6490063 A JPS6490063 A JP S6490063A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- coating
- periphery
- coating method
- spin coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE:To improve the uniformity of the thickness of a film formed on a substrate by coating by removing part of the surface of a coating soln. on the periphery of the substrate during the rotation of the substrate. CONSTITUTION:Part of the surface of a coating soln. 2 on the periphery of a substrate 1 is removed with a pallet 3 during the rotation of the substrate 1. The surface tension of the coating soln. 2 on the periphery of the substrate 1 is reduced and the unnecessary coating soln. 2 is easily released from the surface of the substrate 1. The amt. of the coating soln. stagnating on the periphery of the substrate is reduced and the uniformity of the thickness of a film formed on the substrate by coating is improved.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24945387A JPS6490063A (en) | 1987-10-01 | 1987-10-01 | Spin coating method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24945387A JPS6490063A (en) | 1987-10-01 | 1987-10-01 | Spin coating method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6490063A true JPS6490063A (en) | 1989-04-05 |
Family
ID=17193186
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24945387A Pending JPS6490063A (en) | 1987-10-01 | 1987-10-01 | Spin coating method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6490063A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5175514A (en) * | 1991-01-29 | 1992-12-29 | Sanyo Electric Co., Ltd. | Digital modulator and baseband signal generator for digital modulator |
JP2013171937A (en) * | 2012-02-20 | 2013-09-02 | Disco Abrasive Syst Ltd | Protective film coating device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6254920A (en) * | 1985-09-04 | 1987-03-10 | Toshiba Corp | Resist coating device |
JPS62237966A (en) * | 1986-04-09 | 1987-10-17 | Pioneer Electronic Corp | Apparatus for forming membrane |
-
1987
- 1987-10-01 JP JP24945387A patent/JPS6490063A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6254920A (en) * | 1985-09-04 | 1987-03-10 | Toshiba Corp | Resist coating device |
JPS62237966A (en) * | 1986-04-09 | 1987-10-17 | Pioneer Electronic Corp | Apparatus for forming membrane |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5175514A (en) * | 1991-01-29 | 1992-12-29 | Sanyo Electric Co., Ltd. | Digital modulator and baseband signal generator for digital modulator |
JP2013171937A (en) * | 2012-02-20 | 2013-09-02 | Disco Abrasive Syst Ltd | Protective film coating device |
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