JPS5796530A - Lasma etching device - Google Patents
Lasma etching deviceInfo
- Publication number
- JPS5796530A JPS5796530A JP17352280A JP17352280A JPS5796530A JP S5796530 A JPS5796530 A JP S5796530A JP 17352280 A JP17352280 A JP 17352280A JP 17352280 A JP17352280 A JP 17352280A JP S5796530 A JPS5796530 A JP S5796530A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- etching
- grounded
- substrate
- parallel flat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17352280A JPS5796530A (en) | 1980-12-09 | 1980-12-09 | Lasma etching device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17352280A JPS5796530A (en) | 1980-12-09 | 1980-12-09 | Lasma etching device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5796530A true JPS5796530A (en) | 1982-06-15 |
Family
ID=15962080
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17352280A Pending JPS5796530A (en) | 1980-12-09 | 1980-12-09 | Lasma etching device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5796530A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2516308A1 (fr) * | 1981-11-12 | 1983-05-13 | Varian Associates | Plateau d'attaque radiofrequence, notamment pour l'attaque par pulverisation cathodique de tranches semi-conductrices |
-
1980
- 1980-12-09 JP JP17352280A patent/JPS5796530A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2516308A1 (fr) * | 1981-11-12 | 1983-05-13 | Varian Associates | Plateau d'attaque radiofrequence, notamment pour l'attaque par pulverisation cathodique de tranches semi-conductrices |
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