JPS5796450A - Electron gun - Google Patents

Electron gun

Info

Publication number
JPS5796450A
JPS5796450A JP55173556A JP17355680A JPS5796450A JP S5796450 A JPS5796450 A JP S5796450A JP 55173556 A JP55173556 A JP 55173556A JP 17355680 A JP17355680 A JP 17355680A JP S5796450 A JPS5796450 A JP S5796450A
Authority
JP
Japan
Prior art keywords
anode
cathode
discharge
tip
discharge needle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55173556A
Other languages
Japanese (ja)
Inventor
Isao Sasaki
Tadahiro Takigawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP55173556A priority Critical patent/JPS5796450A/en
Publication of JPS5796450A publication Critical patent/JPS5796450A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To prevent discharge between a cathode and an anode, by providing A sharp-pointed protrusion on at least one of the opposed parts of the anode and a Wehnelt cylinder. CONSTITUTION:A heater 2 is provided on a support electrode 3. A cathode 1 is supported in the heter 2. A Wehnelt cylinder 4 and an anode 5 are provided concentrically the cathode 1. A discharge needle (protrusion) 6 is attached to the Wehnelt culinder 4 near its hole so that the tip of the discharge needle is oriented toward the anode 5. The discharge needle 6 is made of a high-melting- point metal such as turngusten. The radius of curvature of the tip of the discharge needle 6 is made smaller than that of the tip of the cathode 1. According to this constitution, when the fall in the degree of vacuum or the like has happened, discharge is caused between the Wehnelt cylinder 4 and the anode 5 earlier than between the cathode 1 and the anode to prevent discharge between the cathode and the anode.
JP55173556A 1980-12-09 1980-12-09 Electron gun Pending JPS5796450A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55173556A JPS5796450A (en) 1980-12-09 1980-12-09 Electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55173556A JPS5796450A (en) 1980-12-09 1980-12-09 Electron gun

Publications (1)

Publication Number Publication Date
JPS5796450A true JPS5796450A (en) 1982-06-15

Family

ID=15962728

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55173556A Pending JPS5796450A (en) 1980-12-09 1980-12-09 Electron gun

Country Status (1)

Country Link
JP (1) JPS5796450A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6183245U (en) * 1984-11-08 1986-06-02
WO2020213109A1 (en) * 2019-04-18 2020-10-22 株式会社日立ハイテク Electron source and charged particle beam device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6183245U (en) * 1984-11-08 1986-06-02
JPH0238365Y2 (en) * 1984-11-08 1990-10-16
WO2020213109A1 (en) * 2019-04-18 2020-10-22 株式会社日立ハイテク Electron source and charged particle beam device
JPWO2020213109A1 (en) * 2019-04-18 2020-10-22
TWI724803B (en) * 2019-04-18 2021-04-11 日商日立全球先端科技股份有限公司 Electron source and charged particle beam device
KR20210129191A (en) * 2019-04-18 2021-10-27 주식회사 히타치하이테크 Electron source and charged particle beam device
CN113646864A (en) * 2019-04-18 2021-11-12 株式会社日立高新技术 Electron source and charged particle beam device
CN113646864B (en) * 2019-04-18 2024-05-28 株式会社日立高新技术 Electron source and charged particle beam device

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