JPS5635342A - Electron gun - Google Patents

Electron gun

Info

Publication number
JPS5635342A
JPS5635342A JP11139379A JP11139379A JPS5635342A JP S5635342 A JPS5635342 A JP S5635342A JP 11139379 A JP11139379 A JP 11139379A JP 11139379 A JP11139379 A JP 11139379A JP S5635342 A JPS5635342 A JP S5635342A
Authority
JP
Japan
Prior art keywords
tip
electron gun
lanthanum boride
hollowed part
graphite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11139379A
Other languages
Japanese (ja)
Inventor
Sanji Kawashiro
Shinichi Suzuki
Hisashi Suemitsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pioneer Corp
Original Assignee
Pioneer Electronic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Electronic Corp filed Critical Pioneer Electronic Corp
Priority to JP11139379A priority Critical patent/JPS5635342A/en
Publication of JPS5635342A publication Critical patent/JPS5635342A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Solid Thermionic Cathode (AREA)

Abstract

PURPOSE:To obtain a stable performance in an electron gun and improve its durability, by engaging and fixing a tip made of lanthanum boride to the hollowed part of a graphite tip with the hollowed part on its one side simultaneously with the coating of a material having a high melting point on its all sides. CONSTITUTION:An electron gun used in an electron microscope or electron beam exposure device is constituted by an anode, Wehnelt electrode 5 and a tip 1 made of lanthanum boride used as a cathode. The lanthanum boride tip 1 is engaged and fixed into a hollowed part 2b provided in an graphite tip 2 held between support electrodes 3 having an adjustment screw 4. As the graphite tip 2 a material, coated with those having a high melting point like silicon carbide, boron carbide or the like on its all sides except both end sides (contacted portions to the support electrodes 3), is used.
JP11139379A 1979-08-31 1979-08-31 Electron gun Pending JPS5635342A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11139379A JPS5635342A (en) 1979-08-31 1979-08-31 Electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11139379A JPS5635342A (en) 1979-08-31 1979-08-31 Electron gun

Publications (1)

Publication Number Publication Date
JPS5635342A true JPS5635342A (en) 1981-04-08

Family

ID=14560013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11139379A Pending JPS5635342A (en) 1979-08-31 1979-08-31 Electron gun

Country Status (1)

Country Link
JP (1) JPS5635342A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0363055A2 (en) * 1988-10-05 1990-04-11 Fujitsu Limited Electron gun and process of producing same
EP1308979A1 (en) * 2000-05-16 2003-05-07 Denki Kagaku Kogyo Kabushiki Kaisha Electron gun and a method for using the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0363055A2 (en) * 1988-10-05 1990-04-11 Fujitsu Limited Electron gun and process of producing same
EP1308979A1 (en) * 2000-05-16 2003-05-07 Denki Kagaku Kogyo Kabushiki Kaisha Electron gun and a method for using the same

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