JPS5635342A - Electron gun - Google Patents
Electron gunInfo
- Publication number
- JPS5635342A JPS5635342A JP11139379A JP11139379A JPS5635342A JP S5635342 A JPS5635342 A JP S5635342A JP 11139379 A JP11139379 A JP 11139379A JP 11139379 A JP11139379 A JP 11139379A JP S5635342 A JPS5635342 A JP S5635342A
- Authority
- JP
- Japan
- Prior art keywords
- tip
- electron gun
- lanthanum boride
- hollowed part
- graphite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Solid Thermionic Cathode (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE:To obtain a stable performance in an electron gun and improve its durability, by engaging and fixing a tip made of lanthanum boride to the hollowed part of a graphite tip with the hollowed part on its one side simultaneously with the coating of a material having a high melting point on its all sides. CONSTITUTION:An electron gun used in an electron microscope or electron beam exposure device is constituted by an anode, Wehnelt electrode 5 and a tip 1 made of lanthanum boride used as a cathode. The lanthanum boride tip 1 is engaged and fixed into a hollowed part 2b provided in an graphite tip 2 held between support electrodes 3 having an adjustment screw 4. As the graphite tip 2 a material, coated with those having a high melting point like silicon carbide, boron carbide or the like on its all sides except both end sides (contacted portions to the support electrodes 3), is used.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11139379A JPS5635342A (en) | 1979-08-31 | 1979-08-31 | Electron gun |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11139379A JPS5635342A (en) | 1979-08-31 | 1979-08-31 | Electron gun |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5635342A true JPS5635342A (en) | 1981-04-08 |
Family
ID=14560013
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11139379A Pending JPS5635342A (en) | 1979-08-31 | 1979-08-31 | Electron gun |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5635342A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0363055A2 (en) * | 1988-10-05 | 1990-04-11 | Fujitsu Limited | Electron gun and process of producing same |
EP1308979A1 (en) * | 2000-05-16 | 2003-05-07 | Denki Kagaku Kogyo Kabushiki Kaisha | Electron gun and a method for using the same |
-
1979
- 1979-08-31 JP JP11139379A patent/JPS5635342A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0363055A2 (en) * | 1988-10-05 | 1990-04-11 | Fujitsu Limited | Electron gun and process of producing same |
EP1308979A1 (en) * | 2000-05-16 | 2003-05-07 | Denki Kagaku Kogyo Kabushiki Kaisha | Electron gun and a method for using the same |
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