JPS57205935A - Electron gun - Google Patents

Electron gun

Info

Publication number
JPS57205935A
JPS57205935A JP9040081A JP9040081A JPS57205935A JP S57205935 A JPS57205935 A JP S57205935A JP 9040081 A JP9040081 A JP 9040081A JP 9040081 A JP9040081 A JP 9040081A JP S57205935 A JPS57205935 A JP S57205935A
Authority
JP
Japan
Prior art keywords
cathode
monocrystal
wehnelt
bias
electron discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9040081A
Other languages
Japanese (ja)
Inventor
Isao Sasaki
Tadahiro Takigawa
Kakuki Motoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP9040081A priority Critical patent/JPS57205935A/en
Publication of JPS57205935A publication Critical patent/JPS57205935A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Solid Thermionic Cathode (AREA)

Abstract

PURPOSE:To further increase the luminance of an electron gun, which contains a monocrystal LaB6 cathode, by enabling a single beam to be obtained constantly even when the bias between the monocrystal LaB6 cathode and a Wehnelt electrode is made shallow. CONSTITUTION:A monocrystal LaB6 cathode 1 is set to have its given axial direction corresponding to the direction of electron discharge, and is formed by working the end of a square prism 2 into a circular cylinder having a small diameter. Here, the axial direction[100],[210]or[310]of the cathode 1 is adjusted to correspond to the direction of electron discharge. The extreme end of the cathode 1, that is to say, the end of a circular cylindrical part 3 is worked into a flat to say, the end of a circular cylindrical part 3 is worked into a flat surface, and is made to have an acute angle. In addition, a Wehnelt electrode, an anode and the like, which are not illustrated in the figure, are installed above the extreme end of the cathode 1. By thus constituting the cathode 1, any electron discharge doesn't develop from the other surface of the cathode 1 than the surface of the extreme end even when the Wehnelt bias is made shallow. As the result, a cross over image becomes almost constant irrespective of the Wehnelt bias.
JP9040081A 1981-06-12 1981-06-12 Electron gun Pending JPS57205935A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9040081A JPS57205935A (en) 1981-06-12 1981-06-12 Electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9040081A JPS57205935A (en) 1981-06-12 1981-06-12 Electron gun

Publications (1)

Publication Number Publication Date
JPS57205935A true JPS57205935A (en) 1982-12-17

Family

ID=13997531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9040081A Pending JPS57205935A (en) 1981-06-12 1981-06-12 Electron gun

Country Status (1)

Country Link
JP (1) JPS57205935A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0363055A2 (en) * 1988-10-05 1990-04-11 Fujitsu Limited Electron gun and process of producing same
JPH09213255A (en) * 1997-01-20 1997-08-15 Hitachi Ltd Defect inspection device
JPH09213256A (en) * 1997-01-20 1997-08-15 Hitachi Ltd Electric beam inspection device
JPH09219171A (en) * 1997-01-20 1997-08-19 Hitachi Ltd Electron beam inspection device
JP2005228741A (en) * 2004-02-10 2005-08-25 Nuflare Technology Inc High-luminance thermionic cathode

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5648029A (en) * 1979-09-26 1981-05-01 Toshiba Corp Electron gun

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5648029A (en) * 1979-09-26 1981-05-01 Toshiba Corp Electron gun

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0363055A2 (en) * 1988-10-05 1990-04-11 Fujitsu Limited Electron gun and process of producing same
JPH09213255A (en) * 1997-01-20 1997-08-15 Hitachi Ltd Defect inspection device
JPH09213256A (en) * 1997-01-20 1997-08-15 Hitachi Ltd Electric beam inspection device
JPH09219171A (en) * 1997-01-20 1997-08-19 Hitachi Ltd Electron beam inspection device
JP2005228741A (en) * 2004-02-10 2005-08-25 Nuflare Technology Inc High-luminance thermionic cathode

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