JPS5740844A - Thermoelectron emission type electron gun - Google Patents

Thermoelectron emission type electron gun

Info

Publication number
JPS5740844A
JPS5740844A JP11655580A JP11655580A JPS5740844A JP S5740844 A JPS5740844 A JP S5740844A JP 11655580 A JP11655580 A JP 11655580A JP 11655580 A JP11655580 A JP 11655580A JP S5740844 A JPS5740844 A JP S5740844A
Authority
JP
Japan
Prior art keywords
cathode
faucet
equi
corner
electron gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11655580A
Other languages
Japanese (ja)
Inventor
Kakuki Motoyama
Tadahiro Takigawa
Isao Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP11655580A priority Critical patent/JPS5740844A/en
Publication of JPS5740844A publication Critical patent/JPS5740844A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To uniformalize the emission pattern of an electron beam by working the opening section of Wehnelt electrode depending upon the faucet surface and corner which occur in a cathode consisting of single crystal substances such as LaB6 and applying an equi-electric field to the cathode. CONSTITUTION:The opening section of Wehnelt electrode 3 is worked depending upon the faucet surface and corner which occur in a cathode 1 and an equi-magnetic field is applied to the lower end of the cathode 1. A faucet occurs at the lower part of the cathode 1 by the high temperature heating in vacuum. Since the opening section 3a of the Wehnelt electrode 3 is worked depending upon this faucet surface and corner as shown in (a) to (c), almost an equi-electric field is applied to the lower part of the cathode 1 when the faucet occurs. As a result, the emission pattern of an electron beam can almost circularly be uniformalized and a thermoelectron emission type electron gun be used stably for a long time.
JP11655580A 1980-08-25 1980-08-25 Thermoelectron emission type electron gun Pending JPS5740844A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11655580A JPS5740844A (en) 1980-08-25 1980-08-25 Thermoelectron emission type electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11655580A JPS5740844A (en) 1980-08-25 1980-08-25 Thermoelectron emission type electron gun

Publications (1)

Publication Number Publication Date
JPS5740844A true JPS5740844A (en) 1982-03-06

Family

ID=14690007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11655580A Pending JPS5740844A (en) 1980-08-25 1980-08-25 Thermoelectron emission type electron gun

Country Status (1)

Country Link
JP (1) JPS5740844A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009283434A (en) * 2008-05-20 2009-12-03 Samsung Electronics Co Ltd Electron beam focusing electrode, electron gun using the same, and method for reducing diffusion phenomenon of electron beam having square section

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009283434A (en) * 2008-05-20 2009-12-03 Samsung Electronics Co Ltd Electron beam focusing electrode, electron gun using the same, and method for reducing diffusion phenomenon of electron beam having square section

Similar Documents

Publication Publication Date Title
DE3563577D1 (en) Semiconductor device for producing an electron beam
JPS5679828A (en) Electron gun
JPS53121454A (en) Electron source of thin film electric field emission type and its manufacture
JPS5340267A (en) Electron gun assembling body
GB1357198A (en) Method and devices for shaping resharpening or cleaning tips
JPS5740844A (en) Thermoelectron emission type electron gun
JPS5763744A (en) Electron gun
JPS5691363A (en) Use of electron gun and electron beam device
GB1525396A (en) Sintered cathode
GB993494A (en) Improvements relating to electron guns
JPS56132736A (en) Electron gun
JPS57205935A (en) Electron gun
JPS5693244A (en) Electron gun
GB1384243A (en) Electron guns
JPS5569941A (en) Electron source for display unit
JPS5648042A (en) X-ray tube
JPS5550558A (en) Operating method of scanning conversion type storage tube
JPS57141839A (en) Cathode made of lanthanum hexaboride single crystal
JPS54127272A (en) Hot-cathode electron source unit
JPS55113245A (en) Flat type cathode ray tube
GB1169725A (en) Improvements in or relating to an Electron Gun for Cathode-Ray Tubes
JPS553105A (en) Electron gun
JPS5291643A (en) Field emission type electron gun
GB1377544A (en) Thermionic cathode
JPS5418679A (en) Electron impact type ion source device