JPS5796231A - Ultrasonic deflection type optical pressure sensor - Google Patents

Ultrasonic deflection type optical pressure sensor

Info

Publication number
JPS5796231A
JPS5796231A JP17406180A JP17406180A JPS5796231A JP S5796231 A JPS5796231 A JP S5796231A JP 17406180 A JP17406180 A JP 17406180A JP 17406180 A JP17406180 A JP 17406180A JP S5796231 A JPS5796231 A JP S5796231A
Authority
JP
Japan
Prior art keywords
surface wave
elastic surface
light
changed
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17406180A
Other languages
Japanese (ja)
Other versions
JPS6148853B2 (en
Inventor
Mutsumi Miyataka
Nobuyuki Kuzuta
Yoshio Shimada
Yuzo Nanun
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP17406180A priority Critical patent/JPS5796231A/en
Publication of JPS5796231A publication Critical patent/JPS5796231A/en
Publication of JPS6148853B2 publication Critical patent/JPS6148853B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To increase noise resistance and improve the S/N ratio by a constitution wherein a luminous energy corrsponding to the pressure acting on the path of propagation of an elastic surface wave is made to fall on a light-receiving element. CONSTITUTION:When a light is let to pass into a light transmission path 5 under the presence of the elastic surface wave generated by an electroacoustic transducer 3, it is diffracted and deflected by the elastic surface wave. When the strain is caused by the pressure acting on a region 6 of propagation, the elastic constant of the light transmission path 5 is changed by the strain and thus the velocity of the elastic surface wave, i.e. the wavelength thereof is changed. Corresponding to the change of pressure, the deflection angle of a diffracted light changes and thereby the luminous energy led out from a coupler 2B, a rod lens 1B and an output optical fiber 8B is changed.
JP17406180A 1980-12-08 1980-12-08 Ultrasonic deflection type optical pressure sensor Granted JPS5796231A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17406180A JPS5796231A (en) 1980-12-08 1980-12-08 Ultrasonic deflection type optical pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17406180A JPS5796231A (en) 1980-12-08 1980-12-08 Ultrasonic deflection type optical pressure sensor

Publications (2)

Publication Number Publication Date
JPS5796231A true JPS5796231A (en) 1982-06-15
JPS6148853B2 JPS6148853B2 (en) 1986-10-27

Family

ID=15971930

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17406180A Granted JPS5796231A (en) 1980-12-08 1980-12-08 Ultrasonic deflection type optical pressure sensor

Country Status (1)

Country Link
JP (1) JPS5796231A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0517324Y2 (en) * 1987-05-30 1993-05-10

Also Published As

Publication number Publication date
JPS6148853B2 (en) 1986-10-27

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