JPS582602A - Optical displacement detector - Google Patents
Optical displacement detectorInfo
- Publication number
- JPS582602A JPS582602A JP10213681A JP10213681A JPS582602A JP S582602 A JPS582602 A JP S582602A JP 10213681 A JP10213681 A JP 10213681A JP 10213681 A JP10213681 A JP 10213681A JP S582602 A JPS582602 A JP S582602A
- Authority
- JP
- Japan
- Prior art keywords
- light
- detected
- prism coupler
- pressure
- displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 26
- 230000003287 optical effect Effects 0.000 title claims description 34
- 239000000835 fiber Substances 0.000 claims abstract description 13
- 230000008878 coupling Effects 0.000 claims description 5
- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 4
- 239000010409 thin film Substances 0.000 abstract description 12
- 230000005672 electromagnetic field Effects 0.000 abstract description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Arrangements For Transmission Of Measured Signals (AREA)
- Optical Transform (AREA)
Abstract
Description
【発明の詳細な説明】
この発明は、たとえば圧カ、温度等の物理量を検出する
だめの光学式変位検知器に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an optical displacement detector for detecting physical quantities such as pressure and temperature.
近年、たとえば圧力を検出するだめの圧力センサとして
は小形比、高性能ということがら純電子式のものが多く
開発され、実施されている。しかし純電子式の圧力セン
サは電磁界の誘導による影響を受けるという欠点がある
。In recent years, for example, many purely electronic pressure sensors for detecting pressure have been developed and put into practice because of their compact size and high performance. However, purely electronic pressure sensors have the disadvantage of being influenced by electromagnetic field induction.
それゆえにこの発明の目的は、電磁界の影響を受けるこ
となく、圧力等の物理量を検出し得る変位検出器を提供
するにある。Therefore, an object of the present invention is to provide a displacement detector that can detect physical quantities such as pressure without being influenced by electromagnetic fields.
この発明の光学式変位検出器は以上の目的を達成するた
めに、被検出物理量に応じて変位する変位体上に光導波
路を装着し、との光導波路上方にプリズムカップラを配
し、このプリズムカップラに送光用のファイバにより光
を入力するとともに。In order to achieve the above object, the optical displacement detector of the present invention has an optical waveguide mounted on a displacement body that displaces according to the physical quantity to be detected, and a prism coupler arranged above the optical waveguide. In addition to inputting light into the coupler through a light transmission fiber.
プリズムカップラよりの光を受光用ファイバを通じて受
光し、変位体の被検出物理量による変位を光導波路とプ
リズムカップラの結合度変化による受光量の変化として
検出し、被検出物理量を検出するようにしている。The light from the prism coupler is received through a light-receiving fiber, and the displacement of the displacement body due to the physical quantity to be detected is detected as a change in the amount of received light due to a change in the degree of coupling between the optical waveguide and the prism coupler, thereby detecting the physical quantity to be detected. .
以下２図面に示す実施例によりこの発明の詳細な説明す
る。The present invention will be explained in detail with reference to embodiments shown in the following two drawings.
第１図１はこの発明〇一実施例を示す光学式圧力センサ
の概略図である。FIG. 1 is a schematic diagram of an optical pressure sensor showing an embodiment of the present invention.
第１図において１は被検出圧力によって変位するダイヤ
フラムであり、このダイヤフラム１には薄膜光導波路（
ＺｎＯ，５ｉ０２）２及びろが形成装着されている。ま
だ４はプリズムカップラであって、光源としてのレーザ
ダイオード５を出た光が送光用ファイバ６、送光用ロッ
ドレンズ７を介して入力される。プリズムカップラ４を
出た光は受光側ロッドレンズ８．受光用ファイバ９を経
て受光素子としてのホトダイオード１０で受光される。In FIG. 1, 1 is a diaphragm that is displaced by the detected pressure, and this diaphragm 1 has a thin film optical waveguide (
ZnO, 5i02)2 and filters are formed and mounted. Reference numeral 4 denotes a prism coupler, into which light emitted from a laser diode 5 as a light source is inputted via a light transmitting fiber 6 and a light transmitting rod lens 7. The light exiting the prism coupler 4 is sent to the light receiving side rod lens 8. The light is received by a photodiode 10 as a light receiving element via a light receiving fiber 9.
プリズムカップラ４は、薄膜光導波路６と光学的に結合
しており、その結合度は、圧力の変化によるダイヤフラ
ム１の変位で薄膜光導波路３とプリズムカップラ４の距
離が変化することにより変化する。なお１１はプリズム
の高さ調整用のネ次に以上のように構成される第１１１
１実施例光学式圧カセンサの動作について説明する。The prism coupler 4 is optically coupled to the thin film optical waveguide 6, and the degree of coupling changes as the distance between the thin film optical waveguide 3 and the prism coupler 4 changes due to displacement of the diaphragm 1 due to changes in pressure. Note that 11 is the 111th screw for adjusting the height of the prism, which is constructed as described above.
The operation of the optical pressure sensor according to the first embodiment will be explained.
レーザダイオード５を出た光は、送光用ファイバ６を経
て、送光用ロッドレンズ７に導かれるがこの送光用ロッ
ドレンズ７でコリメートされ、プリズムカップラ４に入
力される。もしここでプリズムカップラ４と薄膜光導波
路乙の距離が第２図に示すように離れていると、入力さ
れた光はプリズムカップラ４の底面で全反射して、その
光の伝播経路１２は図に示す通りとなり、導入光は受光
側に伝わらない。The light emitted from the laser diode 5 passes through a light transmitting fiber 6 and is guided to a light transmitting rod lens 7, where it is collimated and input to the prism coupler 4. If the distance between the prism coupler 4 and the thin film optical waveguide A is as shown in FIG. As shown in , the introduced light is not transmitted to the light receiving side.
しかしプリズムカップラ４と薄膜光導波路６間の距離が
短かいと、第３図に示すようにプリズムカップラ４に導
入された光は、薄膜光導波路６へと光結合にて伝播し、
その光伝播経路１２は図に示す通りとなり、プリズムカ
ップラ４の右半分より、受光用ロッドレンズ８．受光用
ファイバ９を経て伝播光が導出され、この光をホトダイ
オード１０で電気信号に変換して出力する。そしてこの
電気信号が圧力を示すものとして表示処理等なされる。However, if the distance between the prism coupler 4 and the thin film optical waveguide 6 is short, the light introduced into the prism coupler 4 propagates to the thin film optical waveguide 6 through optical coupling, as shown in FIG.
The light propagation path 12 is as shown in the figure, from the right half of the prism coupler 4 to the light receiving rod lens 8. Propagating light is led out through a light receiving fiber 9, and this light is converted into an electrical signal by a photodiode 10 and output. This electrical signal is then processed for display as an indication of pressure.
以−上のようにホトダイオード１０に出力される電気信
号が、プリズムカップラ４と薄膜光導波路３の距離、す
なわちダイヤフラム１の変位によって変るので、圧力を
検出することができる。As described above, since the electrical signal output to the photodiode 10 changes depending on the distance between the prism coupler 4 and the thin film optical waveguide 3, that is, the displacement of the diaphragm 1, pressure can be detected.
なおプリズム高さ調整ネジ１１によってプリズムカップ
ラ４と薄膜光導波路６の距離が調整されると同時に、プ
リズムカップラ４が固定される。Note that while the distance between the prism coupler 4 and the thin film optical waveguide 6 is adjusted by the prism height adjustment screw 11, the prism coupler 4 is fixed at the same time.
第４図は他の実施例を示しており、第１図と同一番号は
同一のものを示している。変位体として第１図に示すダ
イヤフラムの代りに２両端を固定した板状バイメタル１
３を設けた点で相違する。FIG. 4 shows another embodiment, in which the same numbers as in FIG. 1 indicate the same parts. As a displacement body, instead of the diaphragm shown in Fig. 1, there is a plate-shaped bimetal 1 whose both ends are fixed.
The difference is that 3 is provided.
温度が変化すると、それにより板状バイメタル１３が油
かり、すなわち変位し、この変位により。When the temperature changes, the plate-shaped bimetal 13 is covered with oil, that is, it is displaced, and due to this displacement.
プリズムカップラ４と薄、膜光導波路６の距離が変り、
第１図と同様、ホトダイオード１０の出力が変るので、
温度変化を検出することができる。The distance between the prism coupler 4 and the thin film optical waveguide 6 changes,
As in Figure 1, since the output of the photodiode 10 changes,
Temperature changes can be detected.
なお上記実施例において、被検出物理量が圧力。Note that in the above embodiments, the physical quantity to be detected is pressure.
温度である場合を例にとり説明したが、この発明はこれ
に限ることなく、被検出物理量の変化に応じて変位体の
位置が変るものであれば何にでも適用できる。Although the case of temperature has been described as an example, the present invention is not limited to this, and can be applied to anything in which the position of the displacement body changes in response to a change in the physical quantity to be detected.
以上のようにこの発明の光学式変位検出器によれば、被
検出物理量に応じて変位する変位体上に光導波路を装着
し、この光導波路上方にプリズムカップラを配し、この
プリズムカップラに送光用のファイバにより光を入力す
るとともに、プリズムカップラよりの光を受光用ファイ
バを通じて受光し、変位体の変位を光導波路とプリズム
カップラの結合度変化による受光量の変化として検出す
るものであるから検出系のほとんどを光学系で構成する
ものであり、まったく周囲の電磁誘導等による影響を受
けることなく物理量を検出できる。As described above, according to the optical displacement detector of the present invention, an optical waveguide is mounted on a displacement body that displaces according to a physical quantity to be detected, a prism coupler is disposed above the optical waveguide, and a signal is sent to the prism coupler. In addition to inputting light through an optical fiber, the light from the prism coupler is received through a light-receiving fiber, and the displacement of the displacement body is detected as a change in the amount of received light due to a change in the degree of coupling between the optical waveguide and the prism coupler. Most of the detection system is composed of optical systems, and physical quantities can be detected without being affected by surrounding electromagnetic induction.
また光学系を用いるから比較的簡単な構成で変位検出器
を実現できる。Furthermore, since an optical system is used, a displacement detector can be realized with a relatively simple configuration.
第１図はこの発明の一実施例を示す光学式圧力センサの
概略図、第２図、第３図は第１図実施例の動作を説明す
るだめの光学式圧力センサの要部の概略図、第４図はこ
の発明の他の実施例を示す光学式温度センサの概略図で
ある。
１・・・ダイヤフラム、 ２・３・・・薄膜光導波路
４・・・プリズムカップラ、 ５・・・レーザダイオ
ード６・・・送光用ファイバ、 ７・・・送光用ロ
ッドレンズ、 ８・・・受光用ロッ
ドレンズ、 ９・・・受光用ファイ
バ特許出願人 株式会社島津製作所
代理人 弁理士 中 村 茂 信
隋 １ 蘭
−２図
笥 ３ｍ２！ｌ
糊 ４ 図FIG. 1 is a schematic diagram of an optical pressure sensor showing an embodiment of the present invention, and FIGS. 2 and 3 are schematic diagrams of essential parts of the optical pressure sensor to explain the operation of the embodiment of FIG. 1. , FIG. 4 is a schematic diagram of an optical temperature sensor showing another embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Diaphragm, 2.3... Thin film optical waveguide 4... Prism coupler, 5... Laser diode 6... Light transmission fiber, 7... Light transmission rod lens, 8...・Light-receiving rod lens, 9...Light-receiving fiber Patent applicant Shimadzu Corporation Representative Patent attorney Shigeru Nakamura Shinsui 1 Orchid-2 drawing board 3m2! l Glue 4 Figure
Claims (3)
路を装着し、との光導波路上方にプリズムカップラを配
設し、このプリズムカップラに送光用ファイバにより光
を入力するとともにプリズムカップラよりの光を受光用
ファイバを通じて受光し、前記変位体の変位を前記光導
波路と前記プリズムカップラの結合度変化による受光量
の変化として検出し、被検出物理量を検出することを特
徴とする光学式変位検出器。(1) An optical waveguide is mounted on a displacement body that displaces according to the physical quantity to be ejected, a prism coupler is arranged above the optical waveguide, and light is input to this prism coupler through a light transmission fiber, and the prism coupler The optical system is characterized in that a physical quantity to be detected is detected by detecting the displacement of the displacement body as a change in the amount of received light due to a change in the degree of coupling between the optical waveguide and the prism coupler. displacement detector.
であることを特徴とする特許請求の範囲第１項紀載り光
学式変位検出器。(2) The optical displacement detector according to claim 1, wherein the displacement body is a diaphragm that is displaced in response to pressure.
あることを特徴とする特許請求の範囲第１項記載の光学
式変位検出器。(3) The optical displacement detector according to claim 1, wherein the displacement body is a bimetal that is displaced according to temperature.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10213681A JPS582602A (en) | 1981-06-29 | 1981-06-29 | Optical displacement detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10213681A JPS582602A (en) | 1981-06-29 | 1981-06-29 | Optical displacement detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS582602A true JPS582602A (en) | 1983-01-08 |
Family
ID=14319345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10213681A Pending JPS582602A (en) | 1981-06-29 | 1981-06-29 | Optical displacement detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS582602A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4681451A (en) * | 1986-02-28 | 1987-07-21 | Polaroid Corporation | Optical proximity imaging method and apparatus |
| WO1990002924A1 (en) * | 1988-09-01 | 1990-03-22 | BODENSEEWERK GERäTETECHNIK GMBH | Motion sensor |
| BE1003831A3 (en) * | 1990-10-16 | 1992-06-23 | Joris Michel | Process for detecting pressure variations in a gas or liquid and pressurevariation detector designed for this process |
| US5554939A (en) * | 1992-12-22 | 1996-09-10 | Dainippon Screen Manufacturing Co., Ltd. | Non-destructive measuring sensor for semiconductor wafer and method of manufacturing the same |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5653432A (en) * | 1979-09-17 | 1981-05-13 | Siemens Ag | Optical device for measuring fine differential pressure |
-
1981
- 1981-06-29 JP JP10213681A patent/JPS582602A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5653432A (en) * | 1979-09-17 | 1981-05-13 | Siemens Ag | Optical device for measuring fine differential pressure |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4681451A (en) * | 1986-02-28 | 1987-07-21 | Polaroid Corporation | Optical proximity imaging method and apparatus |
| WO1990002924A1 (en) * | 1988-09-01 | 1990-03-22 | BODENSEEWERK GERäTETECHNIK GMBH | Motion sensor |
| BE1003831A3 (en) * | 1990-10-16 | 1992-06-23 | Joris Michel | Process for detecting pressure variations in a gas or liquid and pressurevariation detector designed for this process |
| US5554939A (en) * | 1992-12-22 | 1996-09-10 | Dainippon Screen Manufacturing Co., Ltd. | Non-destructive measuring sensor for semiconductor wafer and method of manufacturing the same |
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