JPS5730921A - Pressure sensor - Google Patents

Pressure sensor

Info

Publication number
JPS5730921A
JPS5730921A JP10593980A JP10593980A JPS5730921A JP S5730921 A JPS5730921 A JP S5730921A JP 10593980 A JP10593980 A JP 10593980A JP 10593980 A JP10593980 A JP 10593980A JP S5730921 A JPS5730921 A JP S5730921A
Authority
JP
Japan
Prior art keywords
laser light
pressure receiving
pressure
optical fiber
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10593980A
Other languages
Japanese (ja)
Inventor
Nobuyuki Tsutada
Mutsumi Miyataka
Yuzo Nanun
Yoshio Shimada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP10593980A priority Critical patent/JPS5730921A/en
Publication of JPS5730921A publication Critical patent/JPS5730921A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0016—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a diaphragm
    • G01L9/0017—Optical excitation or measuring

Abstract

PURPOSE:To sense the pressure by a small device by guiding laser light to an absorbing member of a pressure receiving diaphragm, and sensing the variation in self- oscillating frequency of the pressure receiving diaphragm caused by the projection of laser light. CONSTITUTION:Light emitted from a light source passes through a sending optical fiber 4. The light is reflected by the pressure receiving diaphragm 7, received by a receiving optical fiber 4, and converted to an electrical signal by a photoelectric converting element 3, whose output is counted by a frequency counter 10. Said voltage is applied to a feedback circuit of a diaphragm self-oscillating circuit comprising a phase shifter 8, a laser light source driving circuit 9, and a laser power source 2. Driving pulse laser light generated in the laser light source 2 is guided through the laser optical fiber 4, and absorbed by a light absorbing member 6. The counted value of the frequency counter 10 expresses the pressure which is applied to the pressure receiving diaphragm 7.
JP10593980A 1980-07-31 1980-07-31 Pressure sensor Pending JPS5730921A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10593980A JPS5730921A (en) 1980-07-31 1980-07-31 Pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10593980A JPS5730921A (en) 1980-07-31 1980-07-31 Pressure sensor

Publications (1)

Publication Number Publication Date
JPS5730921A true JPS5730921A (en) 1982-02-19

Family

ID=14420811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10593980A Pending JPS5730921A (en) 1980-07-31 1980-07-31 Pressure sensor

Country Status (1)

Country Link
JP (1) JPS5730921A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4971052A (en) * 1988-07-26 1990-11-20 Racal Safety Limited Breathing apparatus
US5035239A (en) * 1988-06-25 1991-07-30 Racal Safety Limited Powered respirators
JPH04155234A (en) * 1990-10-19 1992-05-28 Gifu Kogyo Koutou Senmon Gatsukouchiyou Photothermal laser vacuum gauge
JPH0752118B2 (en) * 1985-02-27 1995-06-05 ユニバ−シテイ オブ ストラスクライド measuring device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0752118B2 (en) * 1985-02-27 1995-06-05 ユニバ−シテイ オブ ストラスクライド measuring device
US5035239A (en) * 1988-06-25 1991-07-30 Racal Safety Limited Powered respirators
US4971052A (en) * 1988-07-26 1990-11-20 Racal Safety Limited Breathing apparatus
JPH04155234A (en) * 1990-10-19 1992-05-28 Gifu Kogyo Koutou Senmon Gatsukouchiyou Photothermal laser vacuum gauge

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