JPS5794641A - Manufacture of electric heater - Google Patents
Manufacture of electric heaterInfo
- Publication number
- JPS5794641A JPS5794641A JP17117680A JP17117680A JPS5794641A JP S5794641 A JPS5794641 A JP S5794641A JP 17117680 A JP17117680 A JP 17117680A JP 17117680 A JP17117680 A JP 17117680A JP S5794641 A JPS5794641 A JP S5794641A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- pattern
- material layer
- forming
- bridging structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 abstract 5
- 239000000463 material Substances 0.000 abstract 4
- 238000005530 etching Methods 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 238000000992 sputter etching Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
- H05B3/26—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17117680A JPS5794641A (en) | 1980-12-04 | 1980-12-04 | Manufacture of electric heater |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17117680A JPS5794641A (en) | 1980-12-04 | 1980-12-04 | Manufacture of electric heater |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5794641A true JPS5794641A (en) | 1982-06-12 |
JPS6123503B2 JPS6123503B2 (enrdf_load_stackoverflow) | 1986-06-06 |
Family
ID=15918401
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17117680A Granted JPS5794641A (en) | 1980-12-04 | 1980-12-04 | Manufacture of electric heater |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5794641A (enrdf_load_stackoverflow) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS599444U (ja) * | 1982-07-08 | 1984-01-21 | ミツミ電機株式会社 | スイツチ |
JPS599443U (ja) * | 1982-07-08 | 1984-01-21 | ミツミ電機株式会社 | レバ−スイツチ |
JPS59143946A (ja) * | 1983-02-07 | 1984-08-17 | Richo Seiki Kk | ガス検出装置 |
JPS59143945A (ja) * | 1983-02-07 | 1984-08-17 | Richo Seiki Kk | ガス検出装置 |
JPS6050419A (ja) * | 1983-08-26 | 1985-03-20 | イノバス | サ−マル質量流量計 |
JPS6060547A (ja) * | 1983-09-13 | 1985-04-08 | Richo Seiki Kk | ガス検出装置 |
JPS63145954A (ja) * | 1986-07-29 | 1988-06-18 | Sharp Corp | 感湿素子 |
US5652443A (en) * | 1994-08-10 | 1997-07-29 | Ricoh Company, Inc. | Sensor having a micro-bridge heater |
JP2010276459A (ja) * | 2009-05-28 | 2010-12-09 | Ngk Spark Plug Co Ltd | ガスセンサ |
JP2013105294A (ja) * | 2011-11-14 | 2013-05-30 | Azbil Corp | ガス警報機 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS504976A (enrdf_load_stackoverflow) * | 1973-05-16 | 1975-01-20 | ||
JPS536862A (en) * | 1976-07-08 | 1978-01-21 | Nippon Electric Co | Method of making thinnfilm resistor |
JPS55119381A (en) * | 1979-03-08 | 1980-09-13 | Mitsuteru Kimura | Electric heater |
-
1980
- 1980-12-04 JP JP17117680A patent/JPS5794641A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS504976A (enrdf_load_stackoverflow) * | 1973-05-16 | 1975-01-20 | ||
JPS536862A (en) * | 1976-07-08 | 1978-01-21 | Nippon Electric Co | Method of making thinnfilm resistor |
JPS55119381A (en) * | 1979-03-08 | 1980-09-13 | Mitsuteru Kimura | Electric heater |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS599444U (ja) * | 1982-07-08 | 1984-01-21 | ミツミ電機株式会社 | スイツチ |
JPS599443U (ja) * | 1982-07-08 | 1984-01-21 | ミツミ電機株式会社 | レバ−スイツチ |
JPS59143946A (ja) * | 1983-02-07 | 1984-08-17 | Richo Seiki Kk | ガス検出装置 |
JPS59143945A (ja) * | 1983-02-07 | 1984-08-17 | Richo Seiki Kk | ガス検出装置 |
JPS6050419A (ja) * | 1983-08-26 | 1985-03-20 | イノバス | サ−マル質量流量計 |
JPS6060547A (ja) * | 1983-09-13 | 1985-04-08 | Richo Seiki Kk | ガス検出装置 |
JPS63145954A (ja) * | 1986-07-29 | 1988-06-18 | Sharp Corp | 感湿素子 |
US5652443A (en) * | 1994-08-10 | 1997-07-29 | Ricoh Company, Inc. | Sensor having a micro-bridge heater |
JP2010276459A (ja) * | 2009-05-28 | 2010-12-09 | Ngk Spark Plug Co Ltd | ガスセンサ |
JP2013105294A (ja) * | 2011-11-14 | 2013-05-30 | Azbil Corp | ガス警報機 |
Also Published As
Publication number | Publication date |
---|---|
JPS6123503B2 (enrdf_load_stackoverflow) | 1986-06-06 |
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