JPS5791719A - Adsorbing device for exhaust gas - Google Patents

Adsorbing device for exhaust gas

Info

Publication number
JPS5791719A
JPS5791719A JP55166038A JP16603880A JPS5791719A JP S5791719 A JPS5791719 A JP S5791719A JP 55166038 A JP55166038 A JP 55166038A JP 16603880 A JP16603880 A JP 16603880A JP S5791719 A JPS5791719 A JP S5791719A
Authority
JP
Japan
Prior art keywords
adsorbent
gas
regeneration
reaction chamber
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55166038A
Other languages
English (en)
Japanese (ja)
Other versions
JPS624168B2 (enrdf_load_stackoverflow
Inventor
Junichi Nishizawa
Souhee Suzuki
Tadahiro Omi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Research Foundation
Original Assignee
Semiconductor Research Foundation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Research Foundation filed Critical Semiconductor Research Foundation
Priority to JP55166038A priority Critical patent/JPS5791719A/ja
Publication of JPS5791719A publication Critical patent/JPS5791719A/ja
Publication of JPS624168B2 publication Critical patent/JPS624168B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Treating Waste Gases (AREA)
JP55166038A 1980-11-26 1980-11-26 Adsorbing device for exhaust gas Granted JPS5791719A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55166038A JPS5791719A (en) 1980-11-26 1980-11-26 Adsorbing device for exhaust gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55166038A JPS5791719A (en) 1980-11-26 1980-11-26 Adsorbing device for exhaust gas

Publications (2)

Publication Number Publication Date
JPS5791719A true JPS5791719A (en) 1982-06-08
JPS624168B2 JPS624168B2 (enrdf_load_stackoverflow) 1987-01-29

Family

ID=15823791

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55166038A Granted JPS5791719A (en) 1980-11-26 1980-11-26 Adsorbing device for exhaust gas

Country Status (1)

Country Link
JP (1) JPS5791719A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4744221A (en) * 1987-06-29 1988-05-17 Olin Corporation Zeolite based arsine storage and delivery system
JPH0494723A (ja) * 1990-08-10 1992-03-26 Central Glass Co Ltd フッ化塩素を含む排ガスの乾式処理方法
JPH0647234A (ja) * 1992-06-09 1994-02-22 Ebara Infilco Co Ltd Ｃｖｄ法排ガスの除害方法
JP2013000642A (ja) * 2011-06-15 2013-01-07 Kanken Techno Co Ltd Ｖｏｃ除害装置
CN108525481A (zh) * 2018-04-26 2018-09-14 重庆腾德机车部件有限公司 一种用于冷镦机的废气处理装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4744221A (en) * 1987-06-29 1988-05-17 Olin Corporation Zeolite based arsine storage and delivery system
JPH0494723A (ja) * 1990-08-10 1992-03-26 Central Glass Co Ltd フッ化塩素を含む排ガスの乾式処理方法
JPH0647234A (ja) * 1992-06-09 1994-02-22 Ebara Infilco Co Ltd Ｃｖｄ法排ガスの除害方法
JP2013000642A (ja) * 2011-06-15 2013-01-07 Kanken Techno Co Ltd Ｖｏｃ除害装置
CN108525481A (zh) * 2018-04-26 2018-09-14 重庆腾德机车部件有限公司 一种用于冷镦机的废气处理装置

Also Published As

Publication number Publication date
JPS624168B2 (enrdf_load_stackoverflow) 1987-01-29

Similar Documents

Publication Publication Date Title
US4425142A (en) Pressure swing adsorption cycle for natural gas pretreatment for liquefaction
US3796615A (en) Method of vacuum carburizing
ES8100097A1 (es) Un aparato de fraccionamiento de gases.(como divisional de la patente numero 485.365)
NO178365B (no) Fremgangsmåte for fjernelse av gassformige forurensninger fra luft ved en trykksvingningsprosess
AU527365B2 (en) Pressure swing adsorption process
CS251591A3 (en) Process and apparatus for cleaning an adsorbent containing carbon
JPS5791719A (en) Adsorbing device for exhaust gas
JPS5713743A (en) Plasma etching apparatus and etching method
EP0248224A3 (en) Mass for removing by chemisorption homogeneous dissolved mixtures, particularly oxygen, from gases or liquids
KR890004764A (ko) 반도체 제조 공정의 배기가스 처리방법 및 장치
SG165131A1 (en) Moisture removal in semiconductor processing
JPS644220A (en) Adsorbing and decomposing agent of ozone and usage thereof
JPS55138237A (en) Manufacture of semiconductor device
KR940007866B1 (ko) 기상성장장치
JPS57105220A (en) Oxygen-concentrating method
JPS5685826A (en) Vacuum treatment device
JPS5592120A (en) Impurity removal using natural zeolite and equipment therefor
JPS5490073A (en) Mixed gas concentrator
JPS6427614A (en) Separation and removal of co2
FR2438687A1 (fr) Procede et four industriel a atmosphere controlee destines au traitement thermique des pieces metalliques
JPS6453076A (en) High vacuum pump protecting system in high vacuum exhaust system
JPS5764922A (en) Apparatus for forming amorphous thin film
JPH08277464A (ja) プロセス装置及び表面処理方法並びにガス供給配管系
JP2504448B2 (ja) 圧力スイング吸着装置
JPS5665689A (en) Control apparatus of anaerobic digestion tank