JPS5783042A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5783042A
JPS5783042A JP15900380A JP15900380A JPS5783042A JP S5783042 A JPS5783042 A JP S5783042A JP 15900380 A JP15900380 A JP 15900380A JP 15900380 A JP15900380 A JP 15900380A JP S5783042 A JPS5783042 A JP S5783042A
Authority
JP
Japan
Prior art keywords
single crystal
substrate
oxide film
island
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15900380A
Other languages
English (en)
Other versions
JPS6221269B2 (ja
Inventor
Tetsuo Yoshino
Shigeharu Yamamura
Koichi Togashi
Kazuyuki Mizushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP15900380A priority Critical patent/JPS5783042A/ja
Publication of JPS5783042A publication Critical patent/JPS5783042A/ja
Publication of JPS6221269B2 publication Critical patent/JPS6221269B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76297—Dielectric isolation using EPIC techniques, i.e. epitaxial passivated integrated circuit

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
  • Weting (AREA)
JP15900380A 1980-11-12 1980-11-12 Manufacture of semiconductor device Granted JPS5783042A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15900380A JPS5783042A (en) 1980-11-12 1980-11-12 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15900380A JPS5783042A (en) 1980-11-12 1980-11-12 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5783042A true JPS5783042A (en) 1982-05-24
JPS6221269B2 JPS6221269B2 (ja) 1987-05-12

Family

ID=15684101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15900380A Granted JPS5783042A (en) 1980-11-12 1980-11-12 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5783042A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7061375B2 (en) 2003-03-12 2006-06-13 Honda Motor Co., Ltd. System for warning a failure to wear a seat belt
JP2007112158A (ja) * 2005-10-17 2007-05-10 Toyota Motor Corp 車両の制御装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5247686A (en) * 1975-10-15 1977-04-15 Toshiba Corp Semiconductor device and process for production of same
JPS5563840A (en) * 1978-11-08 1980-05-14 Hitachi Ltd Semiconductor integrated device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5247686A (en) * 1975-10-15 1977-04-15 Toshiba Corp Semiconductor device and process for production of same
JPS5563840A (en) * 1978-11-08 1980-05-14 Hitachi Ltd Semiconductor integrated device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7061375B2 (en) 2003-03-12 2006-06-13 Honda Motor Co., Ltd. System for warning a failure to wear a seat belt
JP2007112158A (ja) * 2005-10-17 2007-05-10 Toyota Motor Corp 車両の制御装置

Also Published As

Publication number Publication date
JPS6221269B2 (ja) 1987-05-12

Similar Documents

Publication Publication Date Title
JPS57176772A (en) Semiconductor device and manufacture thereof
JPS5783042A (en) Manufacture of semiconductor device
JPS5678155A (en) Semiconductor device and manufacture thereof
JPS56146247A (en) Manufacture of semiconductor device
JPS5795633A (en) Etching method
JPS568842A (en) Semiconductor integrated circuit device
JPS6457641A (en) Manufacture of semiconductor device
JPS6428962A (en) Semiconductor device and manufacture thereof
JPS5534488A (en) Semiconductor device and its manufacturing method
JPS6359531B2 (ja)
JPS54153583A (en) Semiconductor device
JPS57211747A (en) Manufacture of semiconductor device
JPS57128942A (en) Manufacture of insulation isolating substrate
JPS54117690A (en) Production of semiconductor device
JPS5693370A (en) Manufacture of mos-type semiconductor device
JPS56167346A (en) Manufacture of semiconductor device
JPS5742143A (en) Manufacture of semiconductor device
JPS55162270A (en) Semiconductor device
JPS6359532B2 (ja)
JPS5768048A (en) Semiconductor device and manufacture thereof
JPS57173956A (en) Manufacture of semiconductor device
JPH0323648A (ja) 誘電体分離基板の製造方法
JPS571243A (en) Manufacture of semiconductor device
JPS57199231A (en) Manufacture of semiconductor device
JPS5596652A (en) Method of fabricating semiconductor device