JPS5783042A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5783042A
JPS5783042A JP55159003A JP15900380A JPS5783042A JP S5783042 A JPS5783042 A JP S5783042A JP 55159003 A JP55159003 A JP 55159003A JP 15900380 A JP15900380 A JP 15900380A JP S5783042 A JPS5783042 A JP S5783042A
Authority
JP
Japan
Prior art keywords
single crystal
substrate
oxide film
island
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55159003A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6221269B2 (enExample
Inventor
Tetsuo Yoshino
Shigeharu Yamamura
Koichi Togashi
Kazuyuki Mizushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP55159003A priority Critical patent/JPS5783042A/ja
Publication of JPS5783042A publication Critical patent/JPS5783042A/ja
Publication of JPS6221269B2 publication Critical patent/JPS6221269B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01—Manufacture or treatment
    • H10W10/011—Manufacture or treatment of isolation regions comprising dielectric materials
    • H10W10/019—Manufacture or treatment of isolation regions comprising dielectric materials using epitaxial passivated integrated circuit [EPIC] processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/10—Isolation regions comprising dielectric materials

Landscapes

  • Element Separation (AREA)
  • Weting (AREA)
  • Local Oxidation Of Silicon (AREA)
JP55159003A 1980-11-12 1980-11-12 Manufacture of semiconductor device Granted JPS5783042A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55159003A JPS5783042A (en) 1980-11-12 1980-11-12 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55159003A JPS5783042A (en) 1980-11-12 1980-11-12 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5783042A true JPS5783042A (en) 1982-05-24
JPS6221269B2 JPS6221269B2 (enExample) 1987-05-12

Family

ID=15684101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55159003A Granted JPS5783042A (en) 1980-11-12 1980-11-12 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5783042A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7061375B2 (en) 2003-03-12 2006-06-13 Honda Motor Co., Ltd. System for warning a failure to wear a seat belt
JP2007112158A (ja) * 2005-10-17 2007-05-10 Toyota Motor Corp 車両の制御装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5247686A (en) * 1975-10-15 1977-04-15 Toshiba Corp Semiconductor device and process for production of same
JPS5563840A (en) * 1978-11-08 1980-05-14 Hitachi Ltd Semiconductor integrated device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5247686A (en) * 1975-10-15 1977-04-15 Toshiba Corp Semiconductor device and process for production of same
JPS5563840A (en) * 1978-11-08 1980-05-14 Hitachi Ltd Semiconductor integrated device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7061375B2 (en) 2003-03-12 2006-06-13 Honda Motor Co., Ltd. System for warning a failure to wear a seat belt
JP2007112158A (ja) * 2005-10-17 2007-05-10 Toyota Motor Corp 車両の制御装置

Also Published As

Publication number Publication date
JPS6221269B2 (enExample) 1987-05-12

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