JPS5782954A - X-ray window - Google Patents

X-ray window

Info

Publication number
JPS5782954A
JPS5782954A JP55158728A JP15872880A JPS5782954A JP S5782954 A JPS5782954 A JP S5782954A JP 55158728 A JP55158728 A JP 55158728A JP 15872880 A JP15872880 A JP 15872880A JP S5782954 A JPS5782954 A JP S5782954A
Authority
JP
Japan
Prior art keywords
ray window
ray
berylium
foil
window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55158728A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0335774B2 (enrdf_load_stackoverflow
Inventor
Katsumi Suzuki
Yasunao Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Nippon Telegraph and Telephone Corp
Original Assignee
NEC Corp
Nippon Telegraph and Telephone Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Telegraph and Telephone Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP55158728A priority Critical patent/JPS5782954A/ja
Publication of JPS5782954A publication Critical patent/JPS5782954A/ja
Publication of JPH0335774B2 publication Critical patent/JPH0335774B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H01J35/18—Windows
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/18—Windows, e.g. for X-ray transmission
    • H01J2235/183—Multi-layer structures

Landscapes

  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP55158728A 1980-11-11 1980-11-11 X-ray window Granted JPS5782954A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55158728A JPS5782954A (en) 1980-11-11 1980-11-11 X-ray window

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55158728A JPS5782954A (en) 1980-11-11 1980-11-11 X-ray window

Publications (2)

Publication Number Publication Date
JPS5782954A true JPS5782954A (en) 1982-05-24
JPH0335774B2 JPH0335774B2 (enrdf_load_stackoverflow) 1991-05-29

Family

ID=15678030

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55158728A Granted JPS5782954A (en) 1980-11-11 1980-11-11 X-ray window

Country Status (1)

Country Link
JP (1) JPS5782954A (enrdf_load_stackoverflow)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61163547A (ja) * 1985-01-14 1986-07-24 Nippon Telegr & Teleph Corp <Ntt> Ｘ線取り出し窓
JPS61162000U (enrdf_load_stackoverflow) * 1985-03-28 1986-10-07
JPS6391944A (ja) * 1986-10-03 1988-04-22 Nec Corp Ｘ線用ベリリウム窓
JPH0375600A (ja) * 1989-08-18 1991-03-29 Nikon Corp 多層膜反射鏡
EP0757362A1 (de) * 1995-08-02 1997-02-05 INSTITUT FÜR MIKROTECHNIK MAINZ GmbH Röntgenstrahlendurchlässiges Schichtmaterial, Verfahren zu seiner Herstellung sowie deren Verwendung
EP1547116A4 (en) * 2002-09-13 2006-05-24 Moxtek Inc RADIATION WINDOW AND METHOD OF MANUFACTURING
JP2008124495A (ja) * 2003-07-25 2008-05-29 Asml Netherlands Bv フィルタ・ウィンドウ、リソグラフ投影装置、フィルタ・ウィンドウの製造方法、デバイスの製造方法、及びそれらによって製造されたデバイス
US7382862B2 (en) 2005-09-30 2008-06-03 Moxtek, Inc. X-ray tube cathode with reduced unintended electrical field emission
US7428298B2 (en) 2005-03-31 2008-09-23 Moxtek, Inc. Magnetic head for X-ray source
US8995621B2 (en) 2010-09-24 2015-03-31 Moxtek, Inc. Compact X-ray source
US9076628B2 (en) 2011-05-16 2015-07-07 Brigham Young University Variable radius taper x-ray window support structure
WO2019073262A1 (en) * 2017-10-13 2019-04-18 Oxford Instruments X-ray Technology Inc. WINDOW ELEMENT FOR X-RAY DEVICE

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53133386A (en) * 1977-04-25 1978-11-21 Philips Nv Xxray tube

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53133386A (en) * 1977-04-25 1978-11-21 Philips Nv Xxray tube

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61163547A (ja) * 1985-01-14 1986-07-24 Nippon Telegr & Teleph Corp <Ntt> Ｘ線取り出し窓
JPS61162000U (enrdf_load_stackoverflow) * 1985-03-28 1986-10-07
JPS6391944A (ja) * 1986-10-03 1988-04-22 Nec Corp Ｘ線用ベリリウム窓
JPH0375600A (ja) * 1989-08-18 1991-03-29 Nikon Corp 多層膜反射鏡
DE19528329B4 (de) * 1995-08-02 2009-12-10 INSTITUT FüR MIKROTECHNIK MAINZ GMBH Maskenblank und Verfahren zu seiner Herstellung
EP0757362A1 (de) * 1995-08-02 1997-02-05 INSTITUT FÜR MIKROTECHNIK MAINZ GmbH Röntgenstrahlendurchlässiges Schichtmaterial, Verfahren zu seiner Herstellung sowie deren Verwendung
US5740228A (en) * 1995-08-02 1998-04-14 Institut Fur Mikrotechnik Mainz Gmbh X-ray radiolucent material, method for its manufacture, and its use
EP1547116A4 (en) * 2002-09-13 2006-05-24 Moxtek Inc RADIATION WINDOW AND METHOD OF MANUFACTURING
US7233647B2 (en) 2002-09-13 2007-06-19 Moxtek, Inc. Radiation window and method of manufacture
JP2008124495A (ja) * 2003-07-25 2008-05-29 Asml Netherlands Bv フィルタ・ウィンドウ、リソグラフ投影装置、フィルタ・ウィンドウの製造方法、デバイスの製造方法、及びそれらによって製造されたデバイス
US7428298B2 (en) 2005-03-31 2008-09-23 Moxtek, Inc. Magnetic head for X-ray source
US7382862B2 (en) 2005-09-30 2008-06-03 Moxtek, Inc. X-ray tube cathode with reduced unintended electrical field emission
US8995621B2 (en) 2010-09-24 2015-03-31 Moxtek, Inc. Compact X-ray source
US9076628B2 (en) 2011-05-16 2015-07-07 Brigham Young University Variable radius taper x-ray window support structure
WO2019073262A1 (en) * 2017-10-13 2019-04-18 Oxford Instruments X-ray Technology Inc. WINDOW ELEMENT FOR X-RAY DEVICE
US11094494B2 (en) 2017-10-13 2021-08-17 Oxford Instruments X-ray Technology Inc. Window member for an x-ray device

Also Published As

Publication number Publication date
JPH0335774B2 (enrdf_load_stackoverflow) 1991-05-29

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