JPS5781213A - Production of thin film for optical waveguide - Google Patents

Production of thin film for optical waveguide

Info

Publication number
JPS5781213A
JPS5781213A JP55157563A JP15756380A JPS5781213A JP S5781213 A JPS5781213 A JP S5781213A JP 55157563 A JP55157563 A JP 55157563A JP 15756380 A JP15756380 A JP 15756380A JP S5781213 A JPS5781213 A JP S5781213A
Authority
JP
Japan
Prior art keywords
glass
deposited
fine particles
substrate
optical waveguides
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55157563A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6248806B2 (enrdf_load_stackoverflow
Inventor
Takao Edahiro
Masao Kawachi
Noriyoshi Shibata
Mitsuho Yasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP55157563A priority Critical patent/JPS5781213A/ja
Publication of JPS5781213A publication Critical patent/JPS5781213A/ja
Publication of JPS6248806B2 publication Critical patent/JPS6248806B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Surface Treatment Of Glass (AREA)
JP55157563A 1980-11-11 1980-11-11 Production of thin film for optical waveguide Granted JPS5781213A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55157563A JPS5781213A (en) 1980-11-11 1980-11-11 Production of thin film for optical waveguide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55157563A JPS5781213A (en) 1980-11-11 1980-11-11 Production of thin film for optical waveguide

Publications (2)

Publication Number Publication Date
JPS5781213A true JPS5781213A (en) 1982-05-21
JPS6248806B2 JPS6248806B2 (enrdf_load_stackoverflow) 1987-10-15

Family

ID=15652408

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55157563A Granted JPS5781213A (en) 1980-11-11 1980-11-11 Production of thin film for optical waveguide

Country Status (1)

Country Link
JP (1) JPS5781213A (enrdf_load_stackoverflow)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58501707A (ja) * 1981-10-15 1983-10-13 インタ−ナシヨナル　オストミイ　プロダクツ　アンパ−トセルスカブ 入口肛門袋用通気装置
FR2534034A1 (fr) * 1982-10-05 1984-04-06 Lyonnaise Transmiss Optiques Guide d'ondes lumineuses, et procedes de fabrication de celui-ci
JPS6027676A (ja) * 1983-07-19 1985-02-12 Toshiba Ceramics Co Ltd ＧａＡｓ単結晶製造用石英ガラスボ−ト
US4619680A (en) * 1984-06-11 1986-10-28 The General Electric Co. P.L.C. Manufacture of integrated optical waveguides
JPS62288802A (ja) * 1986-06-09 1987-12-15 Nippon Telegr & Teleph Corp <Ntt> 石英系光導波路の製造方法
EP0607884A1 (en) * 1993-01-14 1994-07-27 Sumitomo Electric Industries, Ltd. Optical waveguide and method of fabricating the same
US5385594A (en) * 1991-12-06 1995-01-31 Sumitomo Electric Industries, Ltd. Method for fabricating an optical waveguide
JP2651509B2 (ja) * 1990-06-29 1997-09-10 フォトニック インテグレイション リサーチ，インコーポレイテッド 金属化基板に光導波路を有する光電装置及びその光導波路の形成方法
US6678453B2 (en) * 1999-11-04 2004-01-13 Corning Incorporated High aspect ratio patterning of glass film

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02106403A (ja) * 1988-10-15 1990-04-18 Katsuji Okino 路面吸い寄せタイヤ

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58501707A (ja) * 1981-10-15 1983-10-13 インタ−ナシヨナル　オストミイ　プロダクツ　アンパ−トセルスカブ 入口肛門袋用通気装置
US4676820A (en) * 1982-10-05 1987-06-30 Compagnie Lyonnaise De Transmissions Optical waveguide fabrication method
WO1984001366A1 (fr) * 1982-10-05 1984-04-12 Lyonnaise Transmiss Optiques Procede de fabrication de guides d'ondes lumineuses
EP0106752A1 (fr) * 1982-10-05 1984-04-25 COMPAGNIE LYONNAISE DE TRANSMISSIONS OPTIQUES Société anonyme dite: Procédé de fabrication de guides d'ondes lumineuses
FR2534034A1 (fr) * 1982-10-05 1984-04-06 Lyonnaise Transmiss Optiques Guide d'ondes lumineuses, et procedes de fabrication de celui-ci
JPS6027676A (ja) * 1983-07-19 1985-02-12 Toshiba Ceramics Co Ltd ＧａＡｓ単結晶製造用石英ガラスボ−ト
US4619680A (en) * 1984-06-11 1986-10-28 The General Electric Co. P.L.C. Manufacture of integrated optical waveguides
JPS62288802A (ja) * 1986-06-09 1987-12-15 Nippon Telegr & Teleph Corp <Ntt> 石英系光導波路の製造方法
JP2651509B2 (ja) * 1990-06-29 1997-09-10 フォトニック インテグレイション リサーチ，インコーポレイテッド 金属化基板に光導波路を有する光電装置及びその光導波路の形成方法
US5385594A (en) * 1991-12-06 1995-01-31 Sumitomo Electric Industries, Ltd. Method for fabricating an optical waveguide
US5556442A (en) * 1991-12-06 1996-09-17 Sumitomo Electric Industries, Ltd. Method for fabricating an optical waveguide
EP0607884A1 (en) * 1993-01-14 1994-07-27 Sumitomo Electric Industries, Ltd. Optical waveguide and method of fabricating the same
US6678453B2 (en) * 1999-11-04 2004-01-13 Corning Incorporated High aspect ratio patterning of glass film

Also Published As

Publication number Publication date
JPS6248806B2 (enrdf_load_stackoverflow) 1987-10-15

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