JPS57139708A - Production of optical waveguide - Google Patents

Production of optical waveguide

Info

Publication number
JPS57139708A
JPS57139708A JP2512581A JP2512581A JPS57139708A JP S57139708 A JPS57139708 A JP S57139708A JP 2512581 A JP2512581 A JP 2512581A JP 2512581 A JP2512581 A JP 2512581A JP S57139708 A JPS57139708 A JP S57139708A
Authority
JP
Japan
Prior art keywords
photoresist
film
refractive index
waveguide
quartz glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2512581A
Other languages
Japanese (ja)
Inventor
Masao Kawachi
Takao Edahiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP2512581A priority Critical patent/JPS57139708A/en
Publication of JPS57139708A publication Critical patent/JPS57139708A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/02—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

PURPOSE:To produce a quartz glass thin film waveguide, by impregnating the photoresist into a porous glass film, selectively melting away the photoresist and impregnating a liquid phase material to change the refractive index to remove the residual photoresist and to produce the transparent glass. CONSTITUTION:An SiO2 porous glass film 22 is formed on a quartz glass substrate 21 by the hydrolysis reaction of SiCl4, etc. to obtain a film 23 impregnated with photoresist. Then the exposure is carried out via a mask to form a hardened part 23a and an unhardened part 23b with an unhardened part 23c removed. A liquid containing a dopant material is impregnated 24 into the part 23c to increase the refractive index, and the sticking is assured by the hydrolysis reaction. Thus the residual part 23a of photoresist is dissolved away. Then an SiO2 porous glass film 25 is stacked and then turned into a transparent film 26 by heating. In such way, a pattern type waveguide 27 having a large refractive index is buried into a quartz glass waveguide.
JP2512581A 1981-02-23 1981-02-23 Production of optical waveguide Pending JPS57139708A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2512581A JPS57139708A (en) 1981-02-23 1981-02-23 Production of optical waveguide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2512581A JPS57139708A (en) 1981-02-23 1981-02-23 Production of optical waveguide

Publications (1)

Publication Number Publication Date
JPS57139708A true JPS57139708A (en) 1982-08-28

Family

ID=12157219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2512581A Pending JPS57139708A (en) 1981-02-23 1981-02-23 Production of optical waveguide

Country Status (1)

Country Link
JP (1) JPS57139708A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63149607A (en) * 1986-12-15 1988-06-22 Fujitsu Ltd Production of light guide
JPH02259607A (en) * 1989-03-31 1990-10-22 Mitsubishi Gas Chem Co Inc Production of optical waveguide
JPH05232335A (en) * 1992-02-20 1993-09-10 Hitachi Cable Ltd Production of glass waveguide

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63149607A (en) * 1986-12-15 1988-06-22 Fujitsu Ltd Production of light guide
JPH02259607A (en) * 1989-03-31 1990-10-22 Mitsubishi Gas Chem Co Inc Production of optical waveguide
JPH05232335A (en) * 1992-02-20 1993-09-10 Hitachi Cable Ltd Production of glass waveguide

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