JPS5598708A - Production of light plane circuit - Google Patents

Production of light plane circuit

Info

Publication number
JPS5598708A
JPS5598708A JP487679A JP487679A JPS5598708A JP S5598708 A JPS5598708 A JP S5598708A JP 487679 A JP487679 A JP 487679A JP 487679 A JP487679 A JP 487679A JP S5598708 A JPS5598708 A JP S5598708A
Authority
JP
Japan
Prior art keywords
layer
core part
quartz glass
intermediate layer
glass material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP487679A
Other languages
Japanese (ja)
Inventor
Ichiro Saito
Yasuaki Tamura
Tadashi Tokimoto
Junji Izawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumco Techxiv Corp
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Komatsu Electronic Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd, Komatsu Electronic Metals Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP487679A priority Critical patent/JPS5598708A/en
Publication of JPS5598708A publication Critical patent/JPS5598708A/en
Pending legal-status Critical Current

Links

Landscapes

  • Optical Integrated Circuits (AREA)
  • Waveguides (AREA)

Abstract

PURPOSE:To produce the light plane circuit having three-dimensional waveguides of superior characteristics by growing the intermediate layer of low refractive index glass material on glass substrate surface by a CVD method then growing a core part layer of high refractive index glass material. CONSTITUTION:A layer (intermediate layer) 2 of quartz glass containing F or B2O3 is deposited to a desired thickness by a CVD method on a quartz glass substrate 1, after which the layer (core part layer) 3 of quartz glass material containing any of P2O5, GeO2, TiO2, Al2O3 is deposited to a desired thickness. The intermediate layer 2 and core part layer 3 are so worked that their refractive indices are respectively decreased and increased by desired quantities from the quartz glass. This is heated to be converted to transparent glass. The intermediate layer 2 and core part layer 3 are then etched to the specified patterns. In this way, the various light circuit elements which realize the diversification of multimode transmission systems may be realized with good productivity and reliability.
JP487679A 1979-01-22 1979-01-22 Production of light plane circuit Pending JPS5598708A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP487679A JPS5598708A (en) 1979-01-22 1979-01-22 Production of light plane circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP487679A JPS5598708A (en) 1979-01-22 1979-01-22 Production of light plane circuit

Publications (1)

Publication Number Publication Date
JPS5598708A true JPS5598708A (en) 1980-07-28

Family

ID=11595862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP487679A Pending JPS5598708A (en) 1979-01-22 1979-01-22 Production of light plane circuit

Country Status (1)

Country Link
JP (1) JPS5598708A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6172206A (en) * 1984-09-17 1986-04-14 Fujikura Ltd Substrate type waveguide and its production
JPH01169406A (en) * 1987-12-25 1989-07-04 Hitachi Ltd Waveguide type optical device
US8048533B2 (en) 2006-12-28 2011-11-01 Yupo Corporation Paper seal, sealing method, and sealed article

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6172206A (en) * 1984-09-17 1986-04-14 Fujikura Ltd Substrate type waveguide and its production
JPH01169406A (en) * 1987-12-25 1989-07-04 Hitachi Ltd Waveguide type optical device
US8048533B2 (en) 2006-12-28 2011-11-01 Yupo Corporation Paper seal, sealing method, and sealed article

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