JPS57185405A - Production of optical waveguide - Google Patents

Production of optical waveguide

Info

Publication number
JPS57185405A
JPS57185405A JP56070215A JP7021581A JPS57185405A JP S57185405 A JPS57185405 A JP S57185405A JP 56070215 A JP56070215 A JP 56070215A JP 7021581 A JP7021581 A JP 7021581A JP S57185405 A JPS57185405 A JP S57185405A
Authority
JP
Japan
Prior art keywords
film
dopant
glass film
optical waveguide
raw material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56070215A
Other languages
Japanese (ja)
Inventor
Masao Kawachi
Noriyoshi Shibata
Akira Tomaru
Mitsuho Yasu
Takao Edahiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP56070215A priority Critical patent/JPS57185405A/en
Publication of JPS57185405A publication Critical patent/JPS57185405A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0095—Solution impregnating; Solution doping; Molecular stuffing, e.g. of porous glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

PURPOSE:To obtain a flat thick film type optical waveguide, by impregnating a solution of the dopant raw material and the photosensitive resin into a porous glass film layer of a substrate to obtain a pattern image through an exposure and then heating up the solution to leave the dopant only on the pattern image. CONSTITUTION:A porous glass film 22 is formed on a auqrtz glass substrate 21 with the vapor deposition of SiO2, and a mixture solution of the photosensitive resin and the dopant raw material (an organic compound including Ge, Ti, P and B) that varies the refractive index of the glass is impregnated to form a porous glass film 23 on the film 22. Then a prescribed area of the film 23 is exposed to light through a photomask to obtain a hardened part 23a and an unhardened part 23b. The part 23b (dopant raw material) is vaporized by a heating process carried out at about 100 deg.C under vacuum, and only a part 24 added with the dopant is left as an oxide. A transparent glass film 25 and a protecting transparent glass film 26 are formed on the part 24 Thus a flat thick film type optical waveguide is obtained.
JP56070215A 1981-05-12 1981-05-12 Production of optical waveguide Pending JPS57185405A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56070215A JPS57185405A (en) 1981-05-12 1981-05-12 Production of optical waveguide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56070215A JPS57185405A (en) 1981-05-12 1981-05-12 Production of optical waveguide

Publications (1)

Publication Number Publication Date
JPS57185405A true JPS57185405A (en) 1982-11-15

Family

ID=13425081

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56070215A Pending JPS57185405A (en) 1981-05-12 1981-05-12 Production of optical waveguide

Country Status (1)

Country Link
JP (1) JPS57185405A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61158303A (en) * 1984-12-29 1986-07-18 Furukawa Electric Co Ltd:The Formation of quartz optical waveguide
JPS63149607A (en) * 1986-12-15 1988-06-22 Fujitsu Ltd Production of light guide
JPH01219804A (en) * 1988-02-29 1989-09-01 Nippon Telegr & Teleph Corp <Ntt> Production of thin glass film having functionability
JPH03265802A (en) * 1990-03-16 1991-11-26 Nippon Telegr & Teleph Corp <Ntt> Embedded type quartz optical waveguide and production thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61158303A (en) * 1984-12-29 1986-07-18 Furukawa Electric Co Ltd:The Formation of quartz optical waveguide
JPS63149607A (en) * 1986-12-15 1988-06-22 Fujitsu Ltd Production of light guide
JPH01219804A (en) * 1988-02-29 1989-09-01 Nippon Telegr & Teleph Corp <Ntt> Production of thin glass film having functionability
JPH03265802A (en) * 1990-03-16 1991-11-26 Nippon Telegr & Teleph Corp <Ntt> Embedded type quartz optical waveguide and production thereof

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