GB1492920A - Manufacture of synthetic transparent fused silica - Google Patents

Manufacture of synthetic transparent fused silica

Info

Publication number
GB1492920A
GB1492920A GB33667/76A GB3366776A GB1492920A GB 1492920 A GB1492920 A GB 1492920A GB 33667/76 A GB33667/76 A GB 33667/76A GB 3366776 A GB3366776 A GB 3366776A GB 1492920 A GB1492920 A GB 1492920A
Authority
GB
United Kingdom
Prior art keywords
quartz glass
free
hydrogen
synthetic quartz
plasma burner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB33667/76A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Quarzschmelze GmbH
Heraeus Schott Quarzschmelze GmbH
Original Assignee
Heraeus Quarzschmelze GmbH
Heraeus Schott Quarzschmelze GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19752536457 external-priority patent/DE2536457C3/en
Application filed by Heraeus Quarzschmelze GmbH, Heraeus Schott Quarzschmelze GmbH filed Critical Heraeus Quarzschmelze GmbH
Publication of GB1492920A publication Critical patent/GB1492920A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • C03B37/01426—Plasma deposition burners or torches
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
    • C03B37/01815—Reactant deposition burners or deposition heating means
    • C03B37/01823—Plasma deposition burners or heating means
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/07—Impurity concentration specified
    • C03B2201/075—Hydroxyl ion (OH)
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/08—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
    • C03B2201/12—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant doped with fluorine
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/06—Doped silica-based glasses
    • C03C2201/08—Doped silica-based glasses containing boron or halide
    • C03C2201/12—Doped silica-based glasses containing boron or halide containing fluorine
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2203/00—Production processes
    • C03C2203/40—Gas-phase processes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Glass Compositions (AREA)
  • Glass Melting And Manufacturing (AREA)

Abstract

The invention relates to the preparation of synthetic quartz glass which is free from OH ions and is prepared by oxidation of a hydrogen-free silicon compound in a hydrogen-free gas stream containing elemental and/or bound oxygen, and deposition of this oxidation product as a glassy material on a heat-resistant substrate. The gas stream is passed through an induction-coupled plasma burner. In order to reduce the refractive index of synthetic quartz glass, a hydrogen-free fluorine compound in vapour form which decomposes at elevated temperature, in particular dichlorodifluoromethane, is passed into the flame of the plasma burner. The plasma burner used has three offset quartz glass tubes arranged concentrically to one another. The fluorine-doped synthetic quartz glass serves as a material for the cladding of optical fibres.
GB33667/76A 1975-08-16 1976-08-12 Manufacture of synthetic transparent fused silica Expired GB1492920A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752536457 DE2536457C3 (en) 1975-08-16 Process for the production of synthetic, OH-ion-free quartz glass, device for carrying out the process and use of the synthetic quartz glass

Publications (1)

Publication Number Publication Date
GB1492920A true GB1492920A (en) 1977-11-23

Family

ID=5954072

Family Applications (1)

Application Number Title Priority Date Filing Date
GB33667/76A Expired GB1492920A (en) 1975-08-16 1976-08-12 Manufacture of synthetic transparent fused silica

Country Status (6)

Country Link
US (1) USRE30883E (en)
JP (1) JPS5224217A (en)
CH (1) CH620181A5 (en)
FR (1) FR2321459A1 (en)
GB (1) GB1492920A (en)
NL (1) NL176662C (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2432478A1 (en) * 1978-07-31 1980-02-29 Quartz & Silice
FR2540997A1 (en) * 1983-02-14 1984-08-17 Western Electric Co PROCESS FOR MANUFACTURING OPTICAL FIBERS
WO2001092175A1 (en) * 2000-05-29 2001-12-06 Heraeus Quarzglas Gmbh & Co. Kg Synthetic quartz glass optical material and optical member for f2 excimer lasers
WO2019238808A1 (en) 2018-06-15 2019-12-19 Solar Silicon Gmbh Method for producing elemental silicon

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1029993A (en) * 1975-09-11 1978-04-25 Frederick D. King Optical fibre transmission line
IT1091498B (en) * 1977-11-25 1985-07-06 Cselt Centro Studi Lab Telecom PROCEDURE AND EQUIPMENT FOR THE CONTINUOUS PRODUCTION OF OPTICAL FIBERS
FR2428618A1 (en) * 1978-06-16 1980-01-11 Telecommunications Sa Optical fibre preform mfr. - by depositing glass soot on rod of same compsn. and diffusion of fluorine into the rod
JPS5537465A (en) * 1978-09-09 1980-03-15 Nippon Telegr & Teleph Corp <Ntt> Production of glass fiber base material
JPS5852935B2 (en) * 1978-11-20 1983-11-26 三菱マテリアル株式会社 Manufacturing method for optical transmission materials
FR2447890B1 (en) * 1979-02-05 1985-06-28 Lyonnaise Transmiss Optiques METHOD FOR MANUFACTURING INDEX GRADIENT OPTICAL FIBER PREFORMS, AND DEVICE FOR CARRYING OUT SAID METHOD
DE3036915A1 (en) * 1979-10-09 1981-04-23 Nippon Telegraph & Telephone Public Corp., Tokyo METHOD FOR PRODUCING BLANKS FOR LIGHT-GUIDE FIBERS
FR2476058A1 (en) * 1980-02-15 1981-08-21 Quartz Silice Sa SEMI-PRODUCT FOR THE PRODUCTION OF OPTICAL FIBERS, PROCESS FOR PREPARING THE SEMICONDUCTOR AND OPTICAL FIBERS OBTAINED FROM THE SEMICONDUCTOR
JPS57100928A (en) * 1980-12-12 1982-06-23 Nippon Telegr & Teleph Corp <Ntt> Burner for preparing base material for optical fiber
DE3206177A1 (en) * 1982-02-20 1983-08-25 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Process for the production of a preform from which optical fibres can be drawn
US4440558A (en) * 1982-06-14 1984-04-03 International Telephone And Telegraph Corporation Fabrication of optical preforms by axial chemical vapor deposition
DE3304721A1 (en) * 1983-02-11 1984-08-16 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt METHOD FOR PRODUCING A PREFORM FOR LIGHTWAVE GUIDES
JPS60260430A (en) 1984-06-04 1985-12-23 Sumitomo Electric Ind Ltd Manufacture of base material for optical fiber containing fluorine in clad part
JPS6117435A (en) * 1984-07-05 1986-01-25 Hitachi Cable Ltd Manufacture of optical fiber preform
GB2162168B (en) * 1984-07-25 1988-06-29 Stc Plc Optical fibre manufacture
US4733939A (en) * 1984-08-18 1988-03-29 Mitsubishi Metal Co., Radiation-resistant optical conductor
DE3446286A1 (en) 1984-12-19 1986-06-19 Sigri GmbH, 8901 Meitingen METHOD FOR COATING CARBON AND GRAPHITE BODIES
JP3206916B2 (en) * 1990-11-28 2001-09-10 住友電気工業株式会社 Method for reducing defect concentration, method for producing optical glass for transmitting ultraviolet light, and optical glass for transmitting ultraviolet light
FR2714371B1 (en) * 1993-12-24 1996-02-16 Cabloptic Sa Method for recharging an optical fiber preform, device for implementing this method and optical fiber by this method.
US20020005051A1 (en) * 2000-04-28 2002-01-17 Brown John T. Substantially dry, silica-containing soot, fused silica and optical fiber soot preforms, apparatus, methods and burners for manufacturing same
US7797966B2 (en) * 2000-12-29 2010-09-21 Single Crystal Technologies, Inc. Hot substrate deposition of fused silica
US20020117625A1 (en) * 2001-02-26 2002-08-29 Pandelisev Kiril A. Fiber optic enhanced scintillator detector
US20050120752A1 (en) * 2001-04-11 2005-06-09 Brown John T. Substantially dry, silica-containing soot, fused silica and optical fiber soot preforms, apparatus, methods and burners for manufacturing same
DE10125152A1 (en) * 2001-05-22 2002-12-12 Schott Glas optical fiber
JP4093553B2 (en) * 2002-08-07 2008-06-04 信越化学工業株式会社 Optical fiber preform, manufacturing method thereof, and optical fiber obtained by drawing the same
US20040187525A1 (en) * 2003-03-31 2004-09-30 Coffey Calvin T. Method and apparatus for making soot
CN111320177B (en) * 2020-04-13 2023-09-15 黄冈师范学院 Method for removing hydroxyl groups in quartz sand powder

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1380371A (en) * 1963-01-29 1964-11-27 Thermal Syndicate Ltd Pure vitreous silica manufacturing process
NL128054C (en) * 1963-01-29
US3659915A (en) * 1970-05-11 1972-05-02 Corning Glass Works Fused silica optical waveguide
GB1368868A (en) * 1971-11-25 1974-10-02 Siemens Ag Optical wave guides
DE2247307C3 (en) * 1972-09-27 1982-01-21 Siemens AG, 1000 Berlin und 8000 München Process for the production of a starting rod for drawing an optical fiber consisting of a doped core and an undoped cladding
US3778132A (en) * 1972-10-06 1973-12-11 Bell Telephone Labor Inc Optical transmission line
GB1368093A (en) * 1972-10-17 1974-09-25 Post Office Silica-based vitreous material
NL182310C (en) * 1972-11-25 1988-02-16 Sumitomo Electric Industries GLASS FIBER FOR OPTICAL TRANSMISSION.
JPS5515682B2 (en) * 1972-11-25 1980-04-25
GB1450123A (en) * 1973-11-27 1976-09-22 Post Office Doped vitreous silica
FR2253723A1 (en) * 1973-12-07 1975-07-04 Passaret Michel Preform for optical waveguide mfr. - by plasma arc spraying a lower RI glass around or inside a higher RI glass
JPS50102610A (en) * 1974-01-17 1975-08-14
JPS5156641A (en) * 1974-11-13 1976-05-18 Sumitomo Electric Industries HIKARIDENSOYOFUAIBAANO SEIZOHOHO
US3981707A (en) * 1975-04-23 1976-09-21 Corning Glass Works Method of making fluorine out-diffused optical device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2432478A1 (en) * 1978-07-31 1980-02-29 Quartz & Silice
FR2540997A1 (en) * 1983-02-14 1984-08-17 Western Electric Co PROCESS FOR MANUFACTURING OPTICAL FIBERS
GB2134897A (en) * 1983-02-14 1984-08-22 Western Electric Co Manufacture of optical fibres and preforms with reduced hydroxyl content
WO2001092175A1 (en) * 2000-05-29 2001-12-06 Heraeus Quarzglas Gmbh & Co. Kg Synthetic quartz glass optical material and optical member for f2 excimer lasers
US6689705B2 (en) 2000-05-29 2004-02-10 Heraeus Quarzglas Gmbh & Co., Kg Synthetic quartz glass optical material and optical member
WO2019238808A1 (en) 2018-06-15 2019-12-19 Solar Silicon Gmbh Method for producing elemental silicon

Also Published As

Publication number Publication date
DE2536457B2 (en) 1977-06-08
FR2321459B1 (en) 1979-06-22
DE2536457A1 (en) 1977-02-17
NL176662C (en) 1985-05-17
NL176662B (en) 1984-12-17
CH620181A5 (en) 1980-11-14
JPS5224217A (en) 1977-02-23
USRE30883E (en) 1982-03-16
FR2321459A1 (en) 1977-03-18
NL7609083A (en) 1977-02-18

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19930812