JPS5775413A - Manufacture of magnetic thin film - Google Patents

Manufacture of magnetic thin film

Info

Publication number
JPS5775413A
JPS5775413A JP15064480A JP15064480A JPS5775413A JP S5775413 A JPS5775413 A JP S5775413A JP 15064480 A JP15064480 A JP 15064480A JP 15064480 A JP15064480 A JP 15064480A JP S5775413 A JPS5775413 A JP S5775413A
Authority
JP
Japan
Prior art keywords
magnetic
magnetic field
magnetic thin
substrate
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15064480A
Other languages
Japanese (ja)
Inventor
Hiroichi Goto
Shuzo Abiko
Kou Niimi
Hirotsugu Takagi
Takeshi Sawada
Hiroshi Yoneda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Canon Electronics Inc
Original Assignee
Canon Inc
Canon Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc, Canon Electronics Inc filed Critical Canon Inc
Priority to JP15064480A priority Critical patent/JPS5775413A/en
Publication of JPS5775413A publication Critical patent/JPS5775413A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To stabilize the generation of magnetic field and to form magnetic thin films uniformly and having favorable reproducibility without enlarging the device by a method wherein a current is made to flow in substrates themselves, and magnetic field is made to be generated therewith. CONSTITUTION:Supporting plates 17 are arranged in parallel on a substrate holder 16 being separated for the prescribed interval, substrate pressers 18 to be used both as electrodes are fixed on the right and left sides as to cover the supporting plates 17, and respective adjoining substrate pressers are connected with each other with lead wires 19. Namely they are arranged as to make a current i to flow in the same direction in the conductive substrates 12, 12 being pinched between respective substrate pressers 18, 18. Accordingly magnetic field can be generated in uniform and in stabilized condition, the magnetic thin film can be formed having superior reproducibility, and adhering condition and magnetic characteristic of the magnetic film can be enhanced.
JP15064480A 1980-10-29 1980-10-29 Manufacture of magnetic thin film Pending JPS5775413A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15064480A JPS5775413A (en) 1980-10-29 1980-10-29 Manufacture of magnetic thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15064480A JPS5775413A (en) 1980-10-29 1980-10-29 Manufacture of magnetic thin film

Publications (1)

Publication Number Publication Date
JPS5775413A true JPS5775413A (en) 1982-05-12

Family

ID=15501348

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15064480A Pending JPS5775413A (en) 1980-10-29 1980-10-29 Manufacture of magnetic thin film

Country Status (1)

Country Link
JP (1) JPS5775413A (en)

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