JPS576305A - Method and apparatus for plane part inspection of circular member - Google Patents

Method and apparatus for plane part inspection of circular member

Info

Publication number
JPS576305A
JPS576305A JP7983380A JP7983380A JPS576305A JP S576305 A JPS576305 A JP S576305A JP 7983380 A JP7983380 A JP 7983380A JP 7983380 A JP7983380 A JP 7983380A JP S576305 A JPS576305 A JP S576305A
Authority
JP
Japan
Prior art keywords
plane
circular member
slit
electric signal
reflected light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7983380A
Other languages
English (en)
Japanese (ja)
Other versions
JPS637323B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Ito
Mitsuru Ezaki
Hiroshi Kuno
Kanji Kitou
Morihiro Matsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Central R&D Labs Inc
Original Assignee
Toyota Central R&D Labs Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Central R&D Labs Inc filed Critical Toyota Central R&D Labs Inc
Priority to JP7983380A priority Critical patent/JPS576305A/ja
Publication of JPS576305A publication Critical patent/JPS576305A/ja
Publication of JPS637323B2 publication Critical patent/JPS637323B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP7983380A 1980-06-13 1980-06-13 Method and apparatus for plane part inspection of circular member Granted JPS576305A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7983380A JPS576305A (en) 1980-06-13 1980-06-13 Method and apparatus for plane part inspection of circular member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7983380A JPS576305A (en) 1980-06-13 1980-06-13 Method and apparatus for plane part inspection of circular member

Publications (2)

Publication Number Publication Date
JPS576305A true JPS576305A (en) 1982-01-13
JPS637323B2 JPS637323B2 (enrdf_load_stackoverflow) 1988-02-16

Family

ID=13701204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7983380A Granted JPS576305A (en) 1980-06-13 1980-06-13 Method and apparatus for plane part inspection of circular member

Country Status (1)

Country Link
JP (1) JPS576305A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0450711A (ja) * 1990-06-18 1992-02-19 Kaiyo Kagaku Gijutsu Center 水中懸濁物形状測定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0450711A (ja) * 1990-06-18 1992-02-19 Kaiyo Kagaku Gijutsu Center 水中懸濁物形状測定装置

Also Published As

Publication number Publication date
JPS637323B2 (enrdf_load_stackoverflow) 1988-02-16

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