JPS5758334A - Manufacture of integrated circuit - Google Patents

Manufacture of integrated circuit

Info

Publication number
JPS5758334A
JPS5758334A JP55132535A JP13253580A JPS5758334A JP S5758334 A JPS5758334 A JP S5758334A JP 55132535 A JP55132535 A JP 55132535A JP 13253580 A JP13253580 A JP 13253580A JP S5758334 A JPS5758334 A JP S5758334A
Authority
JP
Japan
Prior art keywords
wire
layer pattern
polycrystalline
hole
metallic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55132535A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0127579B2 (enrdf_load_stackoverflow
Inventor
Nobuyuki Nishiguchi
Aritoyo Kishimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP55132535A priority Critical patent/JPS5758334A/ja
Publication of JPS5758334A publication Critical patent/JPS5758334A/ja
Publication of JPH0127579B2 publication Critical patent/JPH0127579B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/90—Masterslice integrated circuits
    • H10D84/903—Masterslice integrated circuits comprising field effect technology

Landscapes

  • Design And Manufacture Of Integrated Circuits (AREA)
  • Logic Circuits (AREA)
JP55132535A 1980-09-24 1980-09-24 Manufacture of integrated circuit Granted JPS5758334A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55132535A JPS5758334A (en) 1980-09-24 1980-09-24 Manufacture of integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55132535A JPS5758334A (en) 1980-09-24 1980-09-24 Manufacture of integrated circuit

Publications (2)

Publication Number Publication Date
JPS5758334A true JPS5758334A (en) 1982-04-08
JPH0127579B2 JPH0127579B2 (enrdf_load_stackoverflow) 1989-05-30

Family

ID=15083543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55132535A Granted JPS5758334A (en) 1980-09-24 1980-09-24 Manufacture of integrated circuit

Country Status (1)

Country Link
JP (1) JPS5758334A (enrdf_load_stackoverflow)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4991587A (enrdf_load_stackoverflow) * 1972-12-29 1974-09-02
JPS51146195A (en) * 1975-06-11 1976-12-15 Fujitsu Ltd Diode device
JPS5363877A (en) * 1976-11-18 1978-06-07 Fujitsu Ltd Production of semiconductor device
JPS53147485A (en) * 1977-05-27 1978-12-22 Mitsubishi Electric Corp Semiconductor integrated circuit device
JPS5561059A (en) * 1978-10-31 1980-05-08 Nec Corp Semiconductor ic device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4991587A (enrdf_load_stackoverflow) * 1972-12-29 1974-09-02
JPS51146195A (en) * 1975-06-11 1976-12-15 Fujitsu Ltd Diode device
JPS5363877A (en) * 1976-11-18 1978-06-07 Fujitsu Ltd Production of semiconductor device
JPS53147485A (en) * 1977-05-27 1978-12-22 Mitsubishi Electric Corp Semiconductor integrated circuit device
JPS5561059A (en) * 1978-10-31 1980-05-08 Nec Corp Semiconductor ic device

Also Published As

Publication number Publication date
JPH0127579B2 (enrdf_load_stackoverflow) 1989-05-30

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