JPS5749227A - Liquid phase epitaxially growing method - Google Patents

Liquid phase epitaxially growing method

Info

Publication number
JPS5749227A
JPS5749227A JP12560980A JP12560980A JPS5749227A JP S5749227 A JPS5749227 A JP S5749227A JP 12560980 A JP12560980 A JP 12560980A JP 12560980 A JP12560980 A JP 12560980A JP S5749227 A JPS5749227 A JP S5749227A
Authority
JP
Japan
Prior art keywords
liquid
substrate
approx
grown
epitaxially growing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12560980A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6150373B2 (enrdf_load_stackoverflow
Inventor
Ryoichi Hirano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP12560980A priority Critical patent/JPS5749227A/ja
Publication of JPS5749227A publication Critical patent/JPS5749227A/ja
Publication of JPS6150373B2 publication Critical patent/JPS6150373B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02387—Group 13/15 materials
    • H01L21/02392—Phosphides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02538—Group 13/15 materials
    • H01L21/02543—Phosphides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02623—Liquid deposition
    • H01L21/02625—Liquid deposition using melted materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02623—Liquid deposition
    • H01L21/02628—Liquid deposition using solutions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Semiconductor Lasers (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP12560980A 1980-09-09 1980-09-09 Liquid phase epitaxially growing method Granted JPS5749227A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12560980A JPS5749227A (en) 1980-09-09 1980-09-09 Liquid phase epitaxially growing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12560980A JPS5749227A (en) 1980-09-09 1980-09-09 Liquid phase epitaxially growing method

Publications (2)

Publication Number Publication Date
JPS5749227A true JPS5749227A (en) 1982-03-23
JPS6150373B2 JPS6150373B2 (enrdf_load_stackoverflow) 1986-11-04

Family

ID=14914335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12560980A Granted JPS5749227A (en) 1980-09-09 1980-09-09 Liquid phase epitaxially growing method

Country Status (1)

Country Link
JP (1) JPS5749227A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6150373B2 (enrdf_load_stackoverflow) 1986-11-04

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