JPS5745922A - Forming method for semiconductor single crystalline layer by energy beam irradiation - Google Patents
Forming method for semiconductor single crystalline layer by energy beam irradiationInfo
- Publication number
- JPS5745922A JPS5745922A JP12156880A JP12156880A JPS5745922A JP S5745922 A JPS5745922 A JP S5745922A JP 12156880 A JP12156880 A JP 12156880A JP 12156880 A JP12156880 A JP 12156880A JP S5745922 A JPS5745922 A JP S5745922A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- insulator
- energy beam
- single crystalline
- projections
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 239000012212 insulator Substances 0.000 abstract 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000013078 crystal Substances 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 230000008018 melting Effects 0.000 abstract 1
- 238000002844 melting Methods 0.000 abstract 1
- 239000002245 particle Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Recrystallisation Techniques (AREA)
Abstract
PURPOSE:To obtain a semiconductor single crystalline layer having a flat surface by emitting energy beam, e.g., light ray or particle beam, etc. to a polycrystalline or amorphous layer formed on an insulator, melting it, and then roughing the surface of the insulator when it is converted to single crystal. CONSTITUTION:A polycrystalline or amorphous layer 2 of Si or the like is accumulated on an insulator 1, e.g., SiO2 or the like, a laser or the like is emitted thereto to melt the layer 2, the layer 2 is then solidified and is converted to single crystal. In this configuration the surface of the insulator 1 is polished or is emitted with energy beam, thereby forming rough surface of 0.15mum in height of the projections. Thus, the layer 2 to become spherical shape by the surface tension when no rough surface exists, laterally and longitudinally expands due to the presence of the projections, and becomes preferably wet for the insulator 1, thereby obtaining flat single crystalline layer 2. However, it is necessary to limit the height of the projections to the degree not to project the layer 2.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12156880A JPS5745922A (en) | 1980-09-02 | 1980-09-02 | Forming method for semiconductor single crystalline layer by energy beam irradiation |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12156880A JPS5745922A (en) | 1980-09-02 | 1980-09-02 | Forming method for semiconductor single crystalline layer by energy beam irradiation |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5745922A true JPS5745922A (en) | 1982-03-16 |
JPH0135502B2 JPH0135502B2 (en) | 1989-07-25 |
Family
ID=14814448
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12156880A Granted JPS5745922A (en) | 1980-09-02 | 1980-09-02 | Forming method for semiconductor single crystalline layer by energy beam irradiation |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5745922A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI508711B (en) * | 2010-11-01 | 2015-11-21 | Uni Charm Corp | A folding device for a composite sheet of a continuous sheet of an absorbent sheet, and a folding method |
TWI508716B (en) * | 2011-02-23 | 2015-11-21 | Uni Charm Corp | A manufacturing apparatus for an absorbent article, and a method for producing |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51111090A (en) * | 1975-03-26 | 1976-10-01 | Hitachi Ltd | Semiconductor device manufacturing process |
JPS54137486A (en) * | 1978-04-13 | 1979-10-25 | Massachusetts Inst Technology | Method of enhancing epiconfiguration and good orientation ofsolid coating |
-
1980
- 1980-09-02 JP JP12156880A patent/JPS5745922A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51111090A (en) * | 1975-03-26 | 1976-10-01 | Hitachi Ltd | Semiconductor device manufacturing process |
JPS54137486A (en) * | 1978-04-13 | 1979-10-25 | Massachusetts Inst Technology | Method of enhancing epiconfiguration and good orientation ofsolid coating |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI508711B (en) * | 2010-11-01 | 2015-11-21 | Uni Charm Corp | A folding device for a composite sheet of a continuous sheet of an absorbent sheet, and a folding method |
TWI508716B (en) * | 2011-02-23 | 2015-11-21 | Uni Charm Corp | A manufacturing apparatus for an absorbent article, and a method for producing |
Also Published As
Publication number | Publication date |
---|---|
JPH0135502B2 (en) | 1989-07-25 |
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