JPS5429573A - Fine machining method of semiconductor - Google Patents
Fine machining method of semiconductorInfo
- Publication number
- JPS5429573A JPS5429573A JP9502677A JP9502677A JPS5429573A JP S5429573 A JPS5429573 A JP S5429573A JP 9502677 A JP9502677 A JP 9502677A JP 9502677 A JP9502677 A JP 9502677A JP S5429573 A JPS5429573 A JP S5429573A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- machining method
- fine machining
- burrying
- narrowing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Element Separation (AREA)
Abstract
PURPOSE: To obtain narrow oxide film separation region and to increase the density, by radiating electron rays or laser light on the semiconductor layer surface through narrowing them less than 1 μm in diameter orthogonally, and by burrying the concave several μm in depth after forming it according to the required pattern with photo etching.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9502677A JPS5429573A (en) | 1977-08-10 | 1977-08-10 | Fine machining method of semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9502677A JPS5429573A (en) | 1977-08-10 | 1977-08-10 | Fine machining method of semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5429573A true JPS5429573A (en) | 1979-03-05 |
Family
ID=14126571
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9502677A Pending JPS5429573A (en) | 1977-08-10 | 1977-08-10 | Fine machining method of semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5429573A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55139167U (en) * | 1979-03-27 | 1980-10-03 | ||
JPS56130941A (en) * | 1980-03-17 | 1981-10-14 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS56130940A (en) * | 1980-03-17 | 1981-10-14 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS58155738A (en) * | 1982-03-11 | 1983-09-16 | Mitsubishi Electric Corp | Semiconductor integrated circuit and manufacture thereof |
JPS58216437A (en) * | 1982-06-10 | 1983-12-16 | Mitsubishi Electric Corp | Preparation of semiconductor device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5023277A (en) * | 1973-06-29 | 1975-03-12 | ||
JPS5141976A (en) * | 1974-08-08 | 1976-04-08 | Siemens Ag |
-
1977
- 1977-08-10 JP JP9502677A patent/JPS5429573A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5023277A (en) * | 1973-06-29 | 1975-03-12 | ||
JPS5141976A (en) * | 1974-08-08 | 1976-04-08 | Siemens Ag |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55139167U (en) * | 1979-03-27 | 1980-10-03 | ||
JPS6214128Y2 (en) * | 1979-03-27 | 1987-04-10 | ||
JPS56130941A (en) * | 1980-03-17 | 1981-10-14 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS56130940A (en) * | 1980-03-17 | 1981-10-14 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS6310898B2 (en) * | 1980-03-17 | 1988-03-10 | Fujitsu Ltd | |
JPS58155738A (en) * | 1982-03-11 | 1983-09-16 | Mitsubishi Electric Corp | Semiconductor integrated circuit and manufacture thereof |
JPS58216437A (en) * | 1982-06-10 | 1983-12-16 | Mitsubishi Electric Corp | Preparation of semiconductor device |
JPS6312380B2 (en) * | 1982-06-10 | 1988-03-18 | Mitsubishi Electric Corp |
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