JPS574177A - Manufacture of solar cell - Google Patents

Manufacture of solar cell

Info

Publication number
JPS574177A
JPS574177A JP7720380A JP7720380A JPS574177A JP S574177 A JPS574177 A JP S574177A JP 7720380 A JP7720380 A JP 7720380A JP 7720380 A JP7720380 A JP 7720380A JP S574177 A JPS574177 A JP S574177A
Authority
JP
Japan
Prior art keywords
substrate
insulating film
doped oxide
oxide film
round
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7720380A
Other languages
Japanese (ja)
Other versions
JPS6148795B2 (en
Inventor
Kesao Noguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP7720380A priority Critical patent/JPS574177A/en
Publication of JPS574177A publication Critical patent/JPS574177A/en
Publication of JPS6148795B2 publication Critical patent/JPS6148795B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Photovoltaic Devices (AREA)

Abstract

PURPOSE:To simplify a manufacturing process by forming an insulating film on the back of a substrate in thickness thicker than a circling-round of the surface of the substrate at an edge of the substrate before applying a diffusion source. CONSTITUTION:The semiconductor substrate 21 is chemically etched previously in order to remove a crushed layer due to slicing, etc., and the flatness of the edge section of the substrate is damaged. The insulating film 23 in SiO2, etc. is grown on the back according to a sputtering method, and circled round onto not only the back 22 and a side surface but the surface. The diffusion source is applied, and a doped oxide film 24 is formed. Accordingly, the circling-round is generated similarly at the edge section of the substrate, and the doped oxide film is made up on the SiO2 film. The solar cell is completed only by removing the doped oxide film used for diffusion and the insulating film without generating a short circuit even when the electrodes of both sides are formed. Thus, the complicated mesa-etching process is unnecessitated, and the process is largely simplified.
JP7720380A 1980-06-10 1980-06-10 Manufacture of solar cell Granted JPS574177A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7720380A JPS574177A (en) 1980-06-10 1980-06-10 Manufacture of solar cell

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7720380A JPS574177A (en) 1980-06-10 1980-06-10 Manufacture of solar cell

Publications (2)

Publication Number Publication Date
JPS574177A true JPS574177A (en) 1982-01-09
JPS6148795B2 JPS6148795B2 (en) 1986-10-25

Family

ID=13627262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7720380A Granted JPS574177A (en) 1980-06-10 1980-06-10 Manufacture of solar cell

Country Status (1)

Country Link
JP (1) JPS574177A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6718616B2 (en) 2000-05-18 2004-04-13 Mitsui High-Tec, Inc. Method of producing laminated iron cores

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6718616B2 (en) 2000-05-18 2004-04-13 Mitsui High-Tec, Inc. Method of producing laminated iron cores

Also Published As

Publication number Publication date
JPS6148795B2 (en) 1986-10-25

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