JPS574155A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS574155A JPS574155A JP7715280A JP7715280A JPS574155A JP S574155 A JPS574155 A JP S574155A JP 7715280 A JP7715280 A JP 7715280A JP 7715280 A JP7715280 A JP 7715280A JP S574155 A JPS574155 A JP S574155A
- Authority
- JP
- Japan
- Prior art keywords
- type
- contact surface
- impurities
- electric pole
- junction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 239000013078 crystal Substances 0.000 abstract 2
- 239000012535 impurity Substances 0.000 abstract 2
- 230000000694 effects Effects 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000007790 solid phase Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/45—Ohmic electrodes
- H01L29/456—Ohmic electrodes on silicon
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE:To prevent a contact resistance from being increased even if a growth of crystal is made at a contact surface by a method wherein impurities with n type or p<+> type semiconductor made of Si contained in Al electric pole are doped. CONSTITUTION:Al electric pole 11 with Si having n type or p<+> impurities is formed on a contact surface 12 of n type substrate plate 5. Thereby, either n type or p<+> type crystal growing layer 13 is formed on the contact surface 12 by a solid phase epitaxial growth. Thus, only n-n junction or p<+>-n junction showing no characteristic of rectifying current under a tunnel effect is formed, so that an increased contact resistance is not occured even if a heat treatment is performed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7715280A JPS574155A (en) | 1980-06-10 | 1980-06-10 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7715280A JPS574155A (en) | 1980-06-10 | 1980-06-10 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS574155A true JPS574155A (en) | 1982-01-09 |
Family
ID=13625809
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7715280A Pending JPS574155A (en) | 1980-06-10 | 1980-06-10 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS574155A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59194467A (en) * | 1983-04-20 | 1984-11-05 | Toshiba Corp | Wiring material of semiconductor device |
JPS60245164A (en) * | 1984-05-18 | 1985-12-04 | Fujitsu Ltd | Manufacture of diode array |
-
1980
- 1980-06-10 JP JP7715280A patent/JPS574155A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59194467A (en) * | 1983-04-20 | 1984-11-05 | Toshiba Corp | Wiring material of semiconductor device |
JPH0216590B2 (en) * | 1983-04-20 | 1990-04-17 | Tokyo Shibaura Electric Co | |
JPS60245164A (en) * | 1984-05-18 | 1985-12-04 | Fujitsu Ltd | Manufacture of diode array |
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