JPS5739430U - - Google Patents

Info

Publication number
JPS5739430U
JPS5739430U JP1980114556U JP11455680U JPS5739430U JP S5739430 U JPS5739430 U JP S5739430U JP 1980114556 U JP1980114556 U JP 1980114556U JP 11455680 U JP11455680 U JP 11455680U JP S5739430 U JPS5739430 U JP S5739430U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1980114556U
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980114556U priority Critical patent/JPS5739430U/ja
Priority to US06/292,417 priority patent/US4483651A/en
Publication of JPS5739430U publication Critical patent/JPS5739430U/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
    • B65G47/54—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another at least one of which is a roller-way
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/64—Switching conveyors
    • B65G47/641—Switching conveyors by a linear displacement of the switching conveyor
    • B65G47/643—Switching conveyors by a linear displacement of the switching conveyor in a vertical plane
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Drying Of Semiconductors (AREA)
JP1980114556U 1980-08-14 1980-08-14 Pending JPS5739430U (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1980114556U JPS5739430U (ja) 1980-08-14 1980-08-14
US06/292,417 US4483651A (en) 1980-08-14 1981-08-13 Automatic apparatus for continuous treatment of leaf materials with gas plasma

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980114556U JPS5739430U (ja) 1980-08-14 1980-08-14

Publications (1)

Publication Number Publication Date
JPS5739430U true JPS5739430U (ja) 1982-03-03

Family

ID=14640753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980114556U Pending JPS5739430U (ja) 1980-08-14 1980-08-14

Country Status (2)

Country Link
US (1) US4483651A (ja)
JP (1) JPS5739430U (ja)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6010625A (ja) * 1983-06-29 1985-01-19 Tokyo Denshi Kagaku Kabushiki 多段プラズマ処理装置
JPH05144754A (ja) * 1992-03-30 1993-06-11 Semiconductor Energy Lab Co Ltd 被膜作製装置
JPH0851139A (ja) * 1990-03-30 1996-02-20 Tokyo Electron Ltd 処理装置
JPH08241917A (ja) * 1995-12-14 1996-09-17 Hitachi Ltd 基板の真空処理方法及び基板真空処理装置
JPH08250573A (ja) * 1995-12-14 1996-09-27 Hitachi Ltd 基板処理装置及び基板処理方法
JPH08255823A (ja) * 1988-02-12 1996-10-01 Tokyo Electron Ltd 処理装置
JPH08298280A (ja) * 1995-12-14 1996-11-12 Hitachi Ltd 真空処理装置
JPH08321537A (ja) * 1996-05-20 1996-12-03 Tokyo Electron Ltd 処理装置及び処理方法
CN118387389A (zh) * 2024-06-28 2024-07-26 新乡医学院 一种玻璃制品智能化转运设备及其操作工艺

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06105742B2 (ja) * 1983-11-28 1994-12-21 株式会社日立製作所 真空処理方法及び装置
DE8429732U1 (de) * 1984-10-10 1985-02-28 Rhein-Conti Kunststoff-Technik Gmbh, 6900 Heidelberg Rotationsvorrichtung
JPH0620922B2 (ja) * 1984-10-19 1994-03-23 株式会社東芝 被検物の搬送装置
US4658947A (en) * 1984-11-08 1987-04-21 Raymond Production Systems Transfer mechanism
US4759681A (en) * 1985-01-22 1988-07-26 Nissin Electric Co. Ltd. End station for an ion implantation apparatus
US4966519A (en) * 1985-10-24 1990-10-30 Texas Instruments Incorporated Integrated circuit processing system
US4842680A (en) * 1985-10-24 1989-06-27 Texas Instruments Incorporated Advanced vacuum processor
US4845843A (en) * 1985-10-28 1989-07-11 Cimm, Inc. System for configuring, automating and controlling the test and repair of printed circuit boards
US4850104A (en) * 1985-10-28 1989-07-25 Cimm, Inc. System for configuring, automating and controlling operations performed on PCBS and other products
US5308431A (en) * 1986-04-18 1994-05-03 General Signal Corporation System providing multiple processing of substrates
EP0246453A3 (en) * 1986-04-18 1989-09-06 General Signal Corporation Novel multiple-processing and contamination-free plasma etching system
US6103055A (en) * 1986-04-18 2000-08-15 Applied Materials, Inc. System for processing substrates
US4722298A (en) * 1986-05-19 1988-02-02 Machine Technology, Inc. Modular processing apparatus for processing semiconductor wafers
DE3735449A1 (de) * 1987-10-20 1989-05-03 Convac Gmbh Fertigungssystem fuer halbleitersubstrate
DE4010359A1 (de) * 1990-03-31 1991-10-02 Beltron Gmbh Vorrichtung zum transport von empfindlichen gegenstaenden unterschiedlicher groesse
US5193685A (en) * 1991-06-20 1993-03-16 Trevithick William J Gemstone sorting apparatus and methods
DE4125334C2 (de) * 1991-07-31 1999-08-19 Leybold Ag Vorrichtung für den Transport von Substraten
US6053687A (en) * 1997-09-05 2000-04-25 Applied Materials, Inc. Cost effective modular-linear wafer processing
JPH11121754A (ja) * 1997-10-14 1999-04-30 Sanyo Electric Co Ltd 薄膜トランジスタの製造装置及び製造方法
US6228773B1 (en) 1998-04-14 2001-05-08 Matrix Integrated Systems, Inc. Synchronous multiplexed near zero overhead architecture for vacuum processes
TW442891B (en) * 1998-11-17 2001-06-23 Tokyo Electron Ltd Vacuum processing system
JP2002261147A (ja) * 2001-03-02 2002-09-13 Seiko Instruments Inc 真空装置および搬送装置
US6841033B2 (en) * 2001-03-21 2005-01-11 Nordson Corporation Material handling system and method for a multi-workpiece plasma treatment system
JP2005534174A (ja) * 2002-07-19 2005-11-10 アクセリス テクノロジーズ， インコーポレイテッド フォトレジスト・アッシング装置
US8545159B2 (en) * 2003-10-01 2013-10-01 Jusung Engineering Co., Ltd. Apparatus having conveyor and method of transferring substrate using the same
US7101138B2 (en) * 2003-12-03 2006-09-05 Brooks Automation, Inc. Extractor/buffer
KR100621775B1 (ko) * 2005-04-15 2006-09-15 삼성전자주식회사 기판 세정장치
JP2008544485A (ja) * 2005-06-10 2008-12-04 アプライド マテリアルズ インコーポレイテッド 直線真空堆積システム
US7438175B2 (en) 2005-06-10 2008-10-21 Applied Materials, Inc. Linear vacuum deposition system
US7296673B2 (en) * 2005-06-10 2007-11-20 Applied Materials, Inc. Substrate conveyor system
US20070051314A1 (en) * 2005-09-08 2007-03-08 Jusung Engineering Co., Ltd. Movable transfer chamber and substrate-treating apparatus including the same
KR101287197B1 (ko) * 2005-12-29 2013-07-16 엘지디스플레이 주식회사 평판표시소자 제조 공정용 식각 장비 및 이를 이용한 제조방법
JP4865352B2 (ja) * 2006-02-17 2012-02-01 三菱重工業株式会社 プラズマ処理装置及びプラズマ処理方法
JP5449089B2 (ja) * 2010-08-19 2014-03-19 富士機械製造株式会社 シャトルコンベヤおよび対回路基板作業機
EP2445003A1 (en) * 2010-10-25 2012-04-25 Applied Materials, Inc. Apparatus for providing a rotation carrier magazine, and method of operating thereof
JP2015061049A (ja) * 2013-09-20 2015-03-30 日本電産リード株式会社 処理対象物搬送システム、及び基板検査システム
EP3514825B1 (en) 2018-01-22 2023-11-29 Meyer Burger GmbH Wafer sorting

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5582782A (en) * 1978-12-18 1980-06-21 Fujitsu Ltd Dry etching method
JPS5599739A (en) * 1979-01-26 1980-07-30 Hitachi Ltd Wafer treating method and its equipment

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS503546B1 (ja) * 1966-04-30 1975-02-06
US3812947A (en) * 1969-07-29 1974-05-28 Texas Instruments Inc Automatic slice processing
US3710917A (en) * 1971-01-29 1973-01-16 Dorr Oliver Inc Conveying apparatus
US3973665A (en) * 1975-03-07 1976-08-10 Gca Corporation Article delivery and transport apparatus for evacuated processing equipment
JPS5291650A (en) * 1976-01-29 1977-08-02 Toshiba Corp Continuous gas plasma etching apparatus
JPS5378170A (en) * 1976-12-22 1978-07-11 Toshiba Corp Continuous processor for gas plasma etching
JPS5421175A (en) * 1977-07-18 1979-02-17 Tokyo Ouka Kougiyou Kk Improvement of plasma reaction processor
US4208159A (en) * 1977-07-18 1980-06-17 Tokyo Ohka Kogyo Kabushiki Kaisha Apparatus for the treatment of a wafer by plasma reaction
JPS564244A (en) * 1979-06-25 1981-01-17 Hitachi Ltd Continuous vacuum treatment device for wafer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5582782A (en) * 1978-12-18 1980-06-21 Fujitsu Ltd Dry etching method
JPS5599739A (en) * 1979-01-26 1980-07-30 Hitachi Ltd Wafer treating method and its equipment

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6010625A (ja) * 1983-06-29 1985-01-19 Tokyo Denshi Kagaku Kabushiki 多段プラズマ処理装置
JPH08255823A (ja) * 1988-02-12 1996-10-01 Tokyo Electron Ltd 処理装置
JPH0851139A (ja) * 1990-03-30 1996-02-20 Tokyo Electron Ltd 処理装置
JPH05144754A (ja) * 1992-03-30 1993-06-11 Semiconductor Energy Lab Co Ltd 被膜作製装置
JPH08241917A (ja) * 1995-12-14 1996-09-17 Hitachi Ltd 基板の真空処理方法及び基板真空処理装置
JPH08250573A (ja) * 1995-12-14 1996-09-27 Hitachi Ltd 基板処理装置及び基板処理方法
JPH08298280A (ja) * 1995-12-14 1996-11-12 Hitachi Ltd 真空処理装置
JPH08321537A (ja) * 1996-05-20 1996-12-03 Tokyo Electron Ltd 処理装置及び処理方法
CN118387389A (zh) * 2024-06-28 2024-07-26 新乡医学院 一种玻璃制品智能化转运设备及其操作工艺

Also Published As

Publication number Publication date
US4483651A (en) 1984-11-20

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