JPS5736446A - - Google Patents

Info

Publication number
JPS5736446A
JPS5736446A JP14698580A JP14698580A JPS5736446A JP S5736446 A JPS5736446 A JP S5736446A JP 14698580 A JP14698580 A JP 14698580A JP 14698580 A JP14698580 A JP 14698580A JP S5736446 A JPS5736446 A JP S5736446A
Authority
JP
Japan
Prior art keywords
liquid
disc
rotated
substrate
application
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14698580A
Other languages
English (en)
Other versions
JPH0246366B2 (ja
Inventor
Eru Uirukinson Richaado
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Discovision Associates
Original Assignee
Discovision Associates
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=22645656&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JPS5736446(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Discovision Associates filed Critical Discovision Associates
Publication of JPS5736446A publication Critical patent/JPS5736446A/ja
Publication of JPH0246366B2 publication Critical patent/JPH0246366B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/004—Recording, reproducing or erasing methods; Read, write or erase circuits therefor
    • G11B7/0045—Recording
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Magnetic Record Carriers (AREA)
  • Surface Treatment Of Glass (AREA)
  • Holo Graphy (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Optical Recording Or Reproduction (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Color Television Image Signal Generators (AREA)
  • Glass Compositions (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Rotational Drive Of Disk (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Moulding By Coating Moulds (AREA)
JP55146985A 1980-08-11 1980-10-22 Expired - Lifetime JPH0246366B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US17674380A 1980-08-11 1980-08-11

Publications (2)

Publication Number Publication Date
JPS5736446A true JPS5736446A (ja) 1982-02-27
JPH0246366B2 JPH0246366B2 (ja) 1990-10-15

Family

ID=22645656

Family Applications (4)

Application Number Title Priority Date Filing Date
JP55146985A Expired - Lifetime JPH0246366B2 (ja) 1980-08-11 1980-10-22
JP62321152A Granted JPS63177329A (ja) 1980-08-11 1987-12-18 フォトレジスト層を塗布する方法
JP3026662A Expired - Lifetime JP2521849B2 (ja) 1980-08-11 1991-01-29 フォトレジスト層を現像する方法
JP3026661A Expired - Lifetime JPH0760534B2 (ja) 1980-08-11 1991-01-29 光線の最適ピーク輝度を選定する方法

Family Applications After (3)

Application Number Title Priority Date Filing Date
JP62321152A Granted JPS63177329A (ja) 1980-08-11 1987-12-18 フォトレジスト層を塗布する方法
JP3026662A Expired - Lifetime JP2521849B2 (ja) 1980-08-11 1991-01-29 フォトレジスト層を現像する方法
JP3026661A Expired - Lifetime JPH0760534B2 (ja) 1980-08-11 1991-01-29 光線の最適ピーク輝度を選定する方法

Country Status (12)

Country Link
EP (1) EP0072378B1 (ja)
JP (4) JPH0246366B2 (ja)
KR (1) KR850001002B1 (ja)
AT (1) ATE48200T1 (ja)
AU (1) AU539526B2 (ja)
BR (1) BR8104816A (ja)
CA (1) CA1186570A (ja)
DE (1) DE3177126D1 (ja)
ES (5) ES504536A0 (ja)
HK (1) HK26991A (ja)
MX (5) MX149813A (ja)
NO (3) NO158519C (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0110558A2 (en) * 1982-10-28 1984-06-13 Fujitsu Limited Method and apparatus for use in developing resist film
JPS60182030A (ja) * 1984-02-29 1985-09-17 Hoya Corp 情報記録用基板の製造方法
JPS63177329A (ja) * 1980-08-11 1988-07-21 デイスコビジョン　アソシエイツ フォトレジスト層を塗布する方法

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR870002142B1 (ko) * 1982-09-20 1987-12-12 디스커비소젼 어시에이츠 광학 기록 매체 및 그의 제조방법
US4514439A (en) * 1983-09-16 1985-04-30 Rohm And Haas Company Dust cover
JPS61500105A (ja) * 1983-09-23 1986-01-23 バロ−ス・コ−ポレ−ション 光学記録媒体のオ−バコ−ティングにおける改良方法
US4810527A (en) * 1986-09-19 1989-03-07 E. I. Du Pont Nemours And Company Free surface casting method
CA1265394A (en) * 1986-09-19 1990-02-06 James E. Geary, Jr. Free surface casting method
US5057685A (en) * 1989-01-04 1991-10-15 Kabushiki Kaisha Toshiba Optical rotation detector including a disk having slits with concave and convex parts and method of manufacturing
JP2545677B2 (ja) * 1992-09-30 1996-10-23 東芝イーエムアイ株式会社 フォトレジストの塗布方法
US5395803A (en) * 1993-09-08 1995-03-07 At&T Corp. Method of spiral resist deposition
US6207247B1 (en) 1998-03-27 2001-03-27 Nikon Corporation Method for manufacturing a molding tool used for sustrate molding
US6814897B2 (en) 1998-03-27 2004-11-09 Discovision Associates Method for manufacturing a molding tool used for substrate molding
CN102445862A (zh) * 2010-09-30 2012-05-09 中芯国际集成电路制造(上海)有限公司 一种改进的晶圆显影方法
CN104570609A (zh) * 2013-10-29 2015-04-29 沈阳芯源微电子设备有限公司 一种光刻胶涂布轨迹的实施方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5567742A (en) * 1978-11-16 1980-05-22 Matsushita Electric Ind Co Ltd Glass substrate recording medium

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3954469A (en) * 1973-10-01 1976-05-04 Mca Disco-Vision, Inc. Method of creating a replicating matrix
JPS50136333A (ja) * 1974-04-17 1975-10-29
JPS5226214A (en) * 1975-08-25 1977-02-26 Hitachi Ltd Method for coating resist
DE2554692C2 (de) * 1975-12-05 1977-11-17 Basf Ag, 6700 Ludwigshafen Vorrichtung zur Herstellung der Magnetschichten von Magnetspeicherplatten
JPS5934783B2 (ja) * 1976-09-14 1984-08-24 ソニー株式会社 デイスク原盤の製法
JPS5346004A (en) * 1976-10-08 1978-04-25 Fuji Photo Film Co Ltd Manufacture of press.master for video disk
JPS6053675B2 (ja) * 1978-09-20 1985-11-27 富士写真フイルム株式会社 スピンコ−テイング方法
JPS5927229B2 (ja) * 1979-09-19 1984-07-04 富士通株式会社 スピンナ−
JPH0246366B2 (ja) * 1980-08-11 1990-10-15 Discovision Ass
JP2516799B2 (ja) * 1988-08-05 1996-07-24 本田技研工業株式会社 流体式動力伝達装置の直結機構制御方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5567742A (en) * 1978-11-16 1980-05-22 Matsushita Electric Ind Co Ltd Glass substrate recording medium

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63177329A (ja) * 1980-08-11 1988-07-21 デイスコビジョン　アソシエイツ フォトレジスト層を塗布する方法
JPH0346895B2 (ja) * 1980-08-11 1991-07-17 Discovision Ass
EP0110558A2 (en) * 1982-10-28 1984-06-13 Fujitsu Limited Method and apparatus for use in developing resist film
EP0110558A3 (en) * 1982-10-28 1984-07-11 Fujitsu Limited Method and apparatus for use in developing resist film
JPS60182030A (ja) * 1984-02-29 1985-09-17 Hoya Corp 情報記録用基板の製造方法
JPH0370866B2 (ja) * 1984-02-29 1991-11-11 Hoya Corp

Also Published As

Publication number Publication date
NO813611L (no) 1982-02-12
CA1186570A (en) 1985-05-07
HK26991A (en) 1991-04-19
JPH05225616A (ja) 1993-09-03
AU539526B2 (en) 1984-10-04
ES8301543A1 (es) 1982-12-01
ES504532A0 (es) 1982-05-16
ATE48200T1 (de) 1989-12-15
MX151549A (es) 1984-12-13
NO158519B (no) 1988-06-13
ES504535A0 (es) 1982-12-01
DE3177126D1 (en) 1989-12-28
MX149707A (es) 1983-12-13
KR850001002B1 (ko) 1985-07-15
NO813612L (no) 1982-02-12
ES8204867A1 (es) 1982-05-16
ES8301544A1 (es) 1982-12-01
JPH05225617A (ja) 1993-09-03
JPH0246366B2 (ja) 1990-10-15
JPH0760534B2 (ja) 1995-06-28
EP0072378A1 (en) 1983-02-23
JP2521849B2 (ja) 1996-08-07
BR8104816A (pt) 1982-04-13
AU7086681A (en) 1982-02-18
JPH0346895B2 (ja) 1991-07-17
ES8301043A1 (es) 1982-11-01
ES504534A0 (es) 1982-12-01
MX151350A (es) 1984-11-12
EP0072378B1 (en) 1989-11-23
MX149813A (es) 1983-12-26
NO811797L (no) 1982-02-12
NO158519C (no) 1988-10-05
ES8301542A1 (es) 1982-12-01
ES504533A0 (es) 1982-11-01
MX150294A (es) 1984-04-10
ES504536A0 (es) 1982-12-01
JPS63177329A (ja) 1988-07-21

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