US5395803A - Method of spiral resist deposition - Google Patents

Method of spiral resist deposition Download PDF

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Publication number
US5395803A
US5395803A US08118538 US11853893A US5395803A US 5395803 A US5395803 A US 5395803A US 08118538 US08118538 US 08118538 US 11853893 A US11853893 A US 11853893A US 5395803 A US5395803 A US 5395803A
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Prior art keywords
wafer
deposition
center
photoresist
resist
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Expired - Lifetime
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US08118538
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Thomas E. Adams
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AT&T Corp
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AT&T Corp
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16Coating processes; Apparatus therefor
    • G03F7/162Coating on a rotating support, e.g. using a whirler or a spinner

Abstract

A method of depositing a material upon a substrate is disclosed. A material, such as photoresist, is deposited upon a substrate such as a semiconductor wafer by spinning the substrate and commencing deposition at the edge of the wafer and moving inward in a spiral pattern. The method produces a more uniform coating than hitherto available.

Description

TECHNICAL FIELD

This invention relates to processes for the deposition of coatings upon substrates, in general, and more particularly to methods for semiconductor integrated circuit fabrication utilizing the deposition of resist-type materials upon semiconductor substrates.

BACKGROUND OF THE INVENTION

A variety of modem technologies rely upon the precise deposition of a liquid material upon a solid substrate. Although it is frequently desirable to obtain a precisely uniform coating, methods for achieving such uniformity are often elusive.

A particular example is the semiconductor industry, in which resist materials (often photoresist materials) are deposited upon semiconductor wafers. The resist materials are subsequently exposed to light through a reticle and then portions of the resist are removed so that underlying portions of the substrate may be exposed to, for example, etchant or dopant species.

Conventional methods for applying photoresist involve the placement of a semiconductor wafer upon a chuck in a chamber. An arm having a dispensing tube at its end is positioned generally over the center of the wafer. A pump connected to the arm is activated and a puddle of photoresist is dumped onto the center of the wafer while it spins at a slow speed. Then the wafer is spun at a considerably faster speed. Centrifugal force tends to force the photoresist to move outward toward the edge of the wafer while surface tension and viscosity effects control the flow over the surface and the wafer edge boundary conditions. Eventually the entire wafer is coated with photoresist.

The conventional approach presents a variety of problems. First, a considerable amount of photoresist material is wasted. It is necessary to dump more photoresist onto the center of the wafer than is ultimately desired upon the surface of the finished wafer. Considerable excess photoresist is spun off the sides during the "fast spin" cycle of the process. Furthermore, the process typically produces an uneven photoresist coating, not unlike that depicted in FIG. 1. In FIG. 1, reference numeral 11 denotes a semiconductor substrate; while reference numeral 13 denotes a deposited photoresist. In a photoresist having a nominal thickness of approximately 1 μm, the difference between the height of point 17 in the center of the wafer and point 15, at a location intermediate the center and edge of the wafers, may be 100Å to 200Å. Unevenness in photoresist layers is undesirable because it will induce variations in the size of critical features (normally placed in the same relative stack location). These variations are due to changes in the coupling of exposure light energy into the photo-active compound (PAC) in the resist. The variation in coupling is caused by the thin film standing wave effects between the top and bottom surfaces of the resist.

Furthermore, the equipment provided by many modem semiconductor manufacturers does not accurately position the dispense stream center over the center of the wafer. The resulting photoresist pattern is sometimes somewhat more complicated than that depicted by FIG. 1 because the initial deposit of photoresist is not in the center of the wafer. However, the resulting pattern has equally undesirable irregularities.

Those concerned with the development of the semiconductor arts as well as other fields in which the formation of coatings of precise thickness is desired have continued to search for methods to alleviate the above-described problems.

SUMMARY OF THE INVENTION

The above-mentioned problems are alleviated by the present invention which includes in an illustrative embodiment a method of coating a substrate which includes spinning the substrate about an axis. Then deposition of a material is commenced near the edge of the substrate and continued in a spiral pattern over the surface of the substrate.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional view of a substrate coated with liquid material;

FIGS. 2 and 4 are perspective views useful in understanding an illustrative embodiment of the present invention;

FIGS. 3 and 5 are graphs useful in understanding an illustrative embodiment of the present invention.

DETAILED DESCRIPTION

FIG. 2 depicts an apparatus for the deposition of photoresist. Wafer 11 is supported on chuck 19 the center of which is connected to spindle 21. Adjustable motor 23 powers spindle 21 and thereby controls the speed of rotation of wafer 11. Housing 25 encloses wafer 11 and the apparatus associated with coating it. Air stream 29 and 27 is directed downward upon the wafer from a source not depicted. The overall air stream flows across the surface of wafer 11 and down the edge of wafer 11 and, ultimately, below wafer 11. Turbulence and vortices in airflow are also present and are known to affect the coatings.

Dispensing tube 35 is connected to dispensing arm 31 which is powered by pump 33. It is often possible to move arm 31 in a radial or in an arcing motion about its pivot point 32.

FIG. 3 is a graph which depicts the wafer rotational speed together with the deposition rate used in prior practices. It will be noted that as the wafer is spun at an initially moderate speed, r'1 (approximately 800 rpm), an initial volume of resist is dumped onto the wafer between times t1 and t2 ##EQU1## In conventional practice, the full output (typically 4.5-5 ml) for a 125 mm diameter wafer of the pump 33 (typically a diaphragm pump) is ejected through the dispensing tube in a short, continuous pulse upon the wafer within the time interval t2 -t1. After the resist is dumped upon the approximate center of the wafer, the rotational speed is ramped (at approximately 8 Krpm/sec) between times t3 and t4 to a higher speed, r'2 (approximately 5.6 Krpm). After the period of time corresponding to the time interval t4 -t5 (t5 -t4 ≈15 sec) has elapsed, and the resist has been permitted to flow to the outer edges of the wafer and beyond, the speed is again abruptly dropped to zero during time interval t5 -t6). (Backside rinsing or edge bead removal steps may also be performed).

The process depicted in FIG. 3, employed in the prior art, utilizes the deposition of a puddle of photoresist at the approximate center of the wafer.

By contrast, applicant's process utilizes the commencement of deposition at the edge of the wafer, a spiral-like deposition proceeding toward the center of the wafer (and possibly then another spiral back toward the edge). For example, in FIG. 4, them is depicted a wafer 11. Deposition commences at point 51 located near the periphery of the wafer. Spiral 53 indicates the approximate position of the center of dispensing tube 35 as it moves inward radially toward center 55 of wafer 11. Of course, spiral 53 is indicative only of the approximate center of dispensing tube 35. The entire wafer surface is generally coated. After dispensing tube 35 is positioned over center 55, it is permitted to travel a bit beyond center, thereby producing tail 57. Then dispensing tube 35 is moved toward the periphery of wafer 11. During this motion the resist is dispensed according to a programmed rate (i.e., volume per unit area traversed) profile (to be discussed subsequently).

It should be noted in the scheme depicted in FIG. 4 that photoresist dispensation may not terminate when dispensing tube 35 reaches center 55 or even after it creates tail 57. It is often desirable that the photoresist flow is not terminated at either of these points because typical photoresist pumps (despite their suck-back capabilities) may produce drops which are separated from the continuous flow in the flow termination process. The extra drops seem to contribute to the ultimate unevenness of the deposited photoresist and are therefore undesirable. Retracing the spiral, or at least creating another spiral proceeding from past center to the edge of the wafer permits the last drops to fall at either the edge of the wafer (where no integrated circuits will be made) or past the edge of the wafer. The pattern is deliberately designed to move slightly past center 55 to create "tail" 57 so that coverage of the center is assured. Thus, unlike conventional procedures which utilize the deposition of a puddle of photoresist on the center of the wafer and subsequent spinning of the wafer to even out the photoresist, the present procedure utilizes a continuously controlled deposition of photoresist proceeding from the edge of the wafer toward the center, past the center, and then reversing back to the edge of the wafer.

Not only has applicant found that continuously changing the point of deposition upon the wafer produces superior results, but also he has found that changes in the rotational pattern of wafer 11 and the deposition rate are also desirable.

An illustrative embodiment follows. Turning to FIG. 5, it will be noted that the wafer (having a 5" diameter) is initially spun in a speed range r1 which is approximately equal to 30-400 rpm. Between times t1 and t3 (t3 -t1 ≈5 to 10 sec), the photoresist is deposited upon the entire wafer (≈31/2 ml is deposited). At times t4, the speed is ramped to speed r3 which is 3-4 Krpm. Between times t5 and t6 (t6 -t5 ≈2 to 5 sec), the wafer is spun to even out the results of deposition, and set the nominal thickness of the photoresist. Then between times t6 and t7 the speed is reduced back to speed r2 (e.g., 800 rpm -1 Krpm). Then the wafer is spun for an additional period of time equal to approximately 30 sec. The additional spin cycle serves to remove extra solvent at a reduced rate from the photoresist and to further even out the thickness of the photoresist film. Furthermore, applicant has found that, unlike prior practice, it is undesirable to suddenly drop a large amount of photoresist upon the wafer. Consequently, the deposition rate depicted in FIG. 5 may be utilized. For example, curve 71 of FIG. 5 depicts a deposition at a small initial rate at time period t1 while the dispensing tube is positioned over point 51 on the periphery of the wafer to wet the surface and form the initial puddle (deposition commences and stops gradually, as shown by ramps 72 and 74). The deposition rate then smoothly increases to a predetermined value d1 while dispensing tube 35 is traversing relatively large radii of wafer 11. As the radii of the spiral path begin to decrease, the deposition rate may decrease ultimately arriving at a value of d2 near center 55 of wafer 11. Then the cycle is repeated, returning to a deposition rate of approximately d1 as dispensing tube 35 nears the edge of wafer 11 and gradually tapering to zero. The deposition rate depicted by curve 71 of FIG. 5 is, however, not the only one possible. Various circumstances may dictate curves of different shape. For example, it may be desirable to utilize a curve of a general shape of curve 73 to provide slightly greater deposition (corresponding to rate increases at points 76 and 73) at points on the wafer akin to point 15 of FIG. 1 to insure against the creation of insufficient resist at certain points on the wafer. Furthermore, depending upon underlying topography or underlying layers (for example, silicon, phorophosphosilicate glass, aluminum) other deposition rates may be necessary.

Thus, it is desirable that pump 33 have the ability to variably control as a function of time or equivalency (i.e., as a function of dispensing tube position 35 over wafer 11) the amount of photoresist deposited.

The present invention in addition to its other advantages by providing uniform resist, helps to insure subsequent lithographed linewidth uniformity. Thus, the wafer is precoated with resist. The contour of the initially-deposited resist is closer to the desired final contour of the resist. Thus, less resist is wasted in the coating process and additionally less violent spinning of the resist is necessary. This invention helps to alleviate problems caused by differences in resist flow over topographic features having different orientations with respect to the center of the wafer.

The invention may find applicability in the coating of other substrate such as resist coating of quartz (intended for masks or inspection wafers), or resist coating of metallized glass or quartz for flat panel displays.

Claims (7)

I claim:
1. A method of semiconductor integrated circuit fabrication comprising:
spinning a wafer at a speed r1 ;
commencing deposition of a resist material at the edge of said wafer;
continuously depositing said resist in a spiral pattern extending toward the center of said wafer; and then
continuously depositing said resist in a spiral pattern extending from the said center of said wafer to the edge of said wafer;
terminating said deposition;
spinning said wafer at a faster speed, r3, for a period of time and further including the step of reducing the spinning speed of said wafer from r3 to speed r2 where r3 >r2 >r1, and continuing to spin said wafer for a period of time.
2. The method of claim 1 in which r1 =30-400 rpm.
3. The method of claim 2 in which r3 =3-4 Krpm.
4. The method of claim 1 in which r2 =800 rpm-1 Krpm.
5. The method of claim 1 in which the deposition rate of said resist is higher near the said edge of said wafer than near the said center of said wafer.
6. The method of claim 1 in which the rate of said material deposition is variable.
7. The method of claim 1 in which said substrate is circular and has radii, and the rate of said deposition is lower at the center of the said substrate than at the central portion of said radii.
US08118538 1993-09-08 1993-09-08 Method of spiral resist deposition Expired - Lifetime US5395803A (en)

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US08118538 US5395803A (en) 1993-09-08 1993-09-08 Method of spiral resist deposition
EP19940306416 EP0643334A1 (en) 1993-09-08 1994-08-31 Resist deposition
JP21442694A JPH07169684A (en) 1993-09-08 1994-09-08 Resist deposition method
US08355757 US5532192A (en) 1993-09-08 1994-12-14 Method of spiral resist deposition

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Cited By (23)

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Publication number Priority date Publication date Assignee Title
US5567660A (en) * 1995-09-13 1996-10-22 Taiwan Semiconductor Manufacturing Company Ltd Spin-on-glass planarization by a new stagnant coating method
US5670210A (en) * 1994-10-27 1997-09-23 Silicon Valley Group, Inc. Method of uniformly coating a substrate
US5773083A (en) * 1996-08-02 1998-06-30 Motorola, Inc. Method for coating a substrate with a coating solution
US5876875A (en) * 1996-12-23 1999-03-02 Taiwan Semiconductor Manufacturing Company, Ltd. Acoustic wave enhanced developer
US5985363A (en) * 1997-03-10 1999-11-16 Vanguard International Semiconductor Method of providing uniform photoresist coatings for tight control of image dimensions
US6019844A (en) * 1996-12-23 2000-02-01 Taiwan Semiconductor Manufacturing Company Acoustic wave enhanced spin coater
US6066575A (en) * 1995-04-12 2000-05-23 Semitool, Inc. Semiconductor processing spray coating apparatus
US6165552A (en) * 1997-08-19 2000-12-26 Tokyo Electron Ltd. Film forming method
US6191053B1 (en) * 1997-06-16 2001-02-20 Silicon Valley Group, Inc. High efficiency photoresist coating
US20020004100A1 (en) * 1994-10-27 2002-01-10 Emir Gurer Method of uniformly coating a substrate
US20020038629A1 (en) * 1990-05-18 2002-04-04 Reardon Timothy J. Semiconductor processing spray coating apparatus
US6375687B1 (en) 1995-02-15 2002-04-23 Yamaha Corporation Filling connection hole with wiring material by using centrifugal force
US6391800B1 (en) 1999-11-12 2002-05-21 Motorola, Inc. Method for patterning a substrate with photoresist
US6402845B1 (en) * 1997-08-12 2002-06-11 Micron Technology, Inc. Process liquid dispense method and apparatus
US6423380B1 (en) * 1995-07-27 2002-07-23 Micron Technology, Inc. Method of coating a semiconductor wafer
US20020155216A1 (en) * 2001-04-19 2002-10-24 Reitz John Bradford Spin coated media
US6528128B2 (en) * 1999-04-21 2003-03-04 Kabushiki Kaisha Toshiba Method of treating a substrate
US6715200B2 (en) 1999-02-12 2004-04-06 General Electric Company Methods for making data storage media
US7018943B2 (en) 1994-10-27 2006-03-28 Asml Holding N.V. Method of uniformly coating a substrate
US7030039B2 (en) 1994-10-27 2006-04-18 Asml Holding N.V. Method of uniformly coating a substrate
US20080003356A1 (en) * 2004-02-06 2008-01-03 Hoya Corporation Coating Method and Manufacturing Method of Photochromic Lens
US20140069817A1 (en) * 2012-09-12 2014-03-13 International Business Machines Corporation Direct injection molded solder process for forming solder bumps on wafers
US9548199B2 (en) 2014-09-09 2017-01-17 Texas Instruments Incorporated Method of forming a thin film that eliminates air bubbles

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KR100271759B1 (en) * 1997-07-25 2000-12-01 윤종용 Photoresist coating apparatus and method thereof
US6260562B1 (en) * 1997-10-20 2001-07-17 Dainippon Screen Mfg. Co., Ltd. Substrate cleaning apparatus and method
US6352747B1 (en) * 1999-03-31 2002-03-05 Ppg Industries Ohio, Inc. Spin and spray coating process for curved surfaces
US7125584B2 (en) 1999-09-27 2006-10-24 Kabushiki Kaisha Toshiba Method for forming a liquid film on a substrate
US7404681B1 (en) 2000-05-31 2008-07-29 Fsi International, Inc. Coating methods and apparatus for coating
US6884294B2 (en) * 2001-04-16 2005-04-26 Tokyo Electron Limited Coating film forming method and apparatus
US20040072450A1 (en) * 2002-10-15 2004-04-15 Collins Jimmy D. Spin-coating methods and apparatuses for spin-coating, including pressure sensor
CN102043340B (en) * 2010-10-29 2012-10-03 沈阳芯源微电子设备有限公司 Method for uniformly spraying photoresist
JP5682521B2 (en) * 2011-09-14 2015-03-11 東京エレクトロン株式会社 Periphery coating apparatus, the periphery coating method and a storage medium
JP2015223556A (en) * 2014-05-28 2015-12-14 株式会社ディスコ Coating method of protective film

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Cited By (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020038629A1 (en) * 1990-05-18 2002-04-04 Reardon Timothy J. Semiconductor processing spray coating apparatus
US20020004100A1 (en) * 1994-10-27 2002-01-10 Emir Gurer Method of uniformly coating a substrate
US5670210A (en) * 1994-10-27 1997-09-23 Silicon Valley Group, Inc. Method of uniformly coating a substrate
US6977098B2 (en) 1994-10-27 2005-12-20 Asml Holding N.V. Method of uniformly coating a substrate
US7030039B2 (en) 1994-10-27 2006-04-18 Asml Holding N.V. Method of uniformly coating a substrate
US7018943B2 (en) 1994-10-27 2006-03-28 Asml Holding N.V. Method of uniformly coating a substrate
US6375687B1 (en) 1995-02-15 2002-04-23 Yamaha Corporation Filling connection hole with wiring material by using centrifugal force
US6066575A (en) * 1995-04-12 2000-05-23 Semitool, Inc. Semiconductor processing spray coating apparatus
US6423380B1 (en) * 1995-07-27 2002-07-23 Micron Technology, Inc. Method of coating a semiconductor wafer
US20060257561A1 (en) * 1995-07-27 2006-11-16 Micron Technology, Inc. Method and apparatus for coating a wafer
US20040052956A1 (en) * 1995-07-27 2004-03-18 Courtenay Robert William Method and apparatus for coating a wafer
US6666917B2 (en) 1995-07-27 2003-12-23 Micron Technology, Inc. Apparatus for coating of a semiconductor wafer
US5567660A (en) * 1995-09-13 1996-10-22 Taiwan Semiconductor Manufacturing Company Ltd Spin-on-glass planarization by a new stagnant coating method
US5773083A (en) * 1996-08-02 1998-06-30 Motorola, Inc. Method for coating a substrate with a coating solution
US5876875A (en) * 1996-12-23 1999-03-02 Taiwan Semiconductor Manufacturing Company, Ltd. Acoustic wave enhanced developer
US6019844A (en) * 1996-12-23 2000-02-01 Taiwan Semiconductor Manufacturing Company Acoustic wave enhanced spin coater
US6010255A (en) * 1996-12-23 2000-01-04 Taiwan Semiconductor Manufacturing Company Acoustic wave enhanced developer
US5985363A (en) * 1997-03-10 1999-11-16 Vanguard International Semiconductor Method of providing uniform photoresist coatings for tight control of image dimensions
US6191053B1 (en) * 1997-06-16 2001-02-20 Silicon Valley Group, Inc. High efficiency photoresist coating
US6402845B1 (en) * 1997-08-12 2002-06-11 Micron Technology, Inc. Process liquid dispense method and apparatus
US6548110B1 (en) 1997-08-12 2003-04-15 Micron Technology, Inc. Process liquid dispense method and apparatus
US6165552A (en) * 1997-08-19 2000-12-26 Tokyo Electron Ltd. Film forming method
US6752952B2 (en) 1999-02-12 2004-06-22 General Electric Company Embossing methods
US20040143958A1 (en) * 1999-02-12 2004-07-29 Feist Thomas P. Methods for making data storage media and the resultant media
US20050233151A1 (en) * 1999-02-12 2005-10-20 Feist Thomas P Data storage media
US7299535B2 (en) 1999-02-12 2007-11-27 General Electric Company Methods for making data storage media and the resultant media
US6715200B2 (en) 1999-02-12 2004-04-06 General Electric Company Methods for making data storage media
US6528128B2 (en) * 1999-04-21 2003-03-04 Kabushiki Kaisha Toshiba Method of treating a substrate
US6391800B1 (en) 1999-11-12 2002-05-21 Motorola, Inc. Method for patterning a substrate with photoresist
US20020155216A1 (en) * 2001-04-19 2002-10-24 Reitz John Bradford Spin coated media
US20080003356A1 (en) * 2004-02-06 2008-01-03 Hoya Corporation Coating Method and Manufacturing Method of Photochromic Lens
US8168255B2 (en) * 2004-02-06 2012-05-01 Hoya Corporation Coating method and manufacturing method of photochromic lens
US20140069817A1 (en) * 2012-09-12 2014-03-13 International Business Machines Corporation Direct injection molded solder process for forming solder bumps on wafers
US9273408B2 (en) * 2012-09-12 2016-03-01 Globalfoundries Inc. Direct injection molded solder process for forming solder bumps on wafers
US9548199B2 (en) 2014-09-09 2017-01-17 Texas Instruments Incorporated Method of forming a thin film that eliminates air bubbles
US9960034B2 (en) 2014-09-09 2018-05-01 Texas Instruments Incorporated Method of forming a thin film that eliminates air bubbles

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US5532192A (en) 1996-07-02 grant
EP0643334A1 (en) 1995-03-15 application
JPH07169684A (en) 1995-07-04 application

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