JPS5731158A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5731158A JPS5731158A JP10608980A JP10608980A JPS5731158A JP S5731158 A JPS5731158 A JP S5731158A JP 10608980 A JP10608980 A JP 10608980A JP 10608980 A JP10608980 A JP 10608980A JP S5731158 A JPS5731158 A JP S5731158A
- Authority
- JP
- Japan
- Prior art keywords
- constitution
- metallic layer
- light
- resist mask
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 abstract 3
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 239000004973 liquid crystal related substance Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000001259 photo etching Methods 0.000 abstract 1
- 230000007261 regionalization Effects 0.000 abstract 1
Landscapes
- Liquid Crystal (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10608980A JPS5731158A (en) | 1980-08-01 | 1980-08-01 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10608980A JPS5731158A (en) | 1980-08-01 | 1980-08-01 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5731158A true JPS5731158A (en) | 1982-02-19 |
Family
ID=14424814
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10608980A Pending JPS5731158A (en) | 1980-08-01 | 1980-08-01 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5731158A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100329605B1 (ko) * | 1995-09-25 | 2002-11-04 | 주식회사 하이닉스반도체 | 반도체소자의금속배선제조방법 |
-
1980
- 1980-08-01 JP JP10608980A patent/JPS5731158A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100329605B1 (ko) * | 1995-09-25 | 2002-11-04 | 주식회사 하이닉스반도체 | 반도체소자의금속배선제조방법 |
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