JPS5723230A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5723230A
JPS5723230A JP9839180A JP9839180A JPS5723230A JP S5723230 A JPS5723230 A JP S5723230A JP 9839180 A JP9839180 A JP 9839180A JP 9839180 A JP9839180 A JP 9839180A JP S5723230 A JPS5723230 A JP S5723230A
Authority
JP
Japan
Prior art keywords
gap
substrate
conductor layer
constitution
covered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9839180A
Other languages
Japanese (ja)
Inventor
Toshio Kurahashi
Toshihiko Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9839180A priority Critical patent/JPS5723230A/en
Publication of JPS5723230A publication Critical patent/JPS5723230A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Local Oxidation Of Silicon (AREA)

Abstract

PURPOSE:To prevent generation of caves when a conductor layer and an insulating layer are to be formed covering the surface of an Si substrate mutually complementally by a method wherein a gap between the conductor layer and the insulating layer is covered by oxidation of the surface of the conductor layer. CONSTITUTION:To form an Al wiring 5' favorably at an opening part of the SiO2 film 2 on the Si substrate 1 by the lift off technique, it is necessary to form eaves part at the opening part of an etching mask for the SiO2 film. Therefore when the mask is removed, the gap is generated inevitably. The substrate being finished with patterning is boiled in water, and an Al2O3 film is made to be formed on the surface of the Al to cover the gap. When the gap is covered by this constitution, no cave is generated inside when PSG, etc., is to be laminted.
JP9839180A 1980-07-18 1980-07-18 Manufacture of semiconductor device Pending JPS5723230A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9839180A JPS5723230A (en) 1980-07-18 1980-07-18 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9839180A JPS5723230A (en) 1980-07-18 1980-07-18 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5723230A true JPS5723230A (en) 1982-02-06

Family

ID=14218538

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9839180A Pending JPS5723230A (en) 1980-07-18 1980-07-18 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5723230A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60256418A (en) * 1984-05-31 1985-12-18 三菱電機株式会社 Rice cooker

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60256418A (en) * 1984-05-31 1985-12-18 三菱電機株式会社 Rice cooker

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