JPS5722546A - Element for sensing gas component and manufacture thereof - Google Patents

Element for sensing gas component and manufacture thereof

Info

Publication number
JPS5722546A
JPS5722546A JP9701380A JP9701380A JPS5722546A JP S5722546 A JPS5722546 A JP S5722546A JP 9701380 A JP9701380 A JP 9701380A JP 9701380 A JP9701380 A JP 9701380A JP S5722546 A JPS5722546 A JP S5722546A
Authority
JP
Japan
Prior art keywords
gas
small hole
diameter
metal oxide
green sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9701380A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6216376B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Akio Takami
Tsutomu Saito
Kazuhisa Tanaka
Toshibumi Sekiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Priority to JP9701380A priority Critical patent/JPS5722546A/ja
Publication of JPS5722546A publication Critical patent/JPS5722546A/ja
Publication of JPS6216376B2 publication Critical patent/JPS6216376B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP9701380A 1980-07-16 1980-07-16 Element for sensing gas component and manufacture thereof Granted JPS5722546A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9701380A JPS5722546A (en) 1980-07-16 1980-07-16 Element for sensing gas component and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9701380A JPS5722546A (en) 1980-07-16 1980-07-16 Element for sensing gas component and manufacture thereof

Publications (2)

Publication Number Publication Date
JPS5722546A true JPS5722546A (en) 1982-02-05
JPS6216376B2 JPS6216376B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-04-13

Family

ID=14180440

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9701380A Granted JPS5722546A (en) 1980-07-16 1980-07-16 Element for sensing gas component and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS5722546A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6193944A (ja) * 1984-10-13 1986-05-12 Ngk Spark Plug Co Ltd ガス検出素子
JPS6244655A (ja) * 1985-08-23 1987-02-26 Nissan Motor Co Ltd ガス成分検出素子
JP2006275950A (ja) * 2005-03-30 2006-10-12 New Cosmos Electric Corp 半導体式ガス検知素子及びその製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5582045A (en) * 1978-12-14 1980-06-20 Matsushita Electric Ind Co Ltd Detection element for oxygen concentration

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5582045A (en) * 1978-12-14 1980-06-20 Matsushita Electric Ind Co Ltd Detection element for oxygen concentration

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6193944A (ja) * 1984-10-13 1986-05-12 Ngk Spark Plug Co Ltd ガス検出素子
JPS6244655A (ja) * 1985-08-23 1987-02-26 Nissan Motor Co Ltd ガス成分検出素子
JP2006275950A (ja) * 2005-03-30 2006-10-12 New Cosmos Electric Corp 半導体式ガス検知素子及びその製造方法

Also Published As

Publication number Publication date
JPS6216376B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-04-13

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