JPS54139097A - Preparation of humidity sensor - Google Patents

Preparation of humidity sensor

Info

Publication number
JPS54139097A
JPS54139097A JP4701278A JP4701278A JPS54139097A JP S54139097 A JPS54139097 A JP S54139097A JP 4701278 A JP4701278 A JP 4701278A JP 4701278 A JP4701278 A JP 4701278A JP S54139097 A JPS54139097 A JP S54139097A
Authority
JP
Japan
Prior art keywords
base
rough
coat
oxides
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4701278A
Other languages
Japanese (ja)
Inventor
Tsuneo Mitsuyu
Takao Toda
Kenzo Ochi
Fumio Hosomi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4701278A priority Critical patent/JPS54139097A/en
Priority to GB7913421A priority patent/GB2022837B/en
Publication of JPS54139097A publication Critical patent/JPS54139097A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Non-Adjustable Resistors (AREA)

Abstract

PURPOSE: To enhance the sensitivity of the humidity sensor by making the surface of element rough.
CONSTITUTION: The surface 23 of sensor 21 is made rough, the desired roughness ranges from 0.1 to 5 μm. The coat 52 or 52' of said sensor is put on a smooth insulated base 51 or a rough surface base 51', the thickness of coat 52' is determined depending on the roughness of the surface of base 51'. A desirable coat is composed of simple substance oxides such as Al, Zr, Ti, Cr, Fe, Mo, W, Zn, Sn, Ni and V oxides, spinel metal oxides such as MgCr2O4, and perovskite metal complex oxide such as BaTiO3, it is sticked on the base by means of the spattering evaporation and its surface is made rough by the plasma- or spatter-etching process.
COPYRIGHT: (C)1979,JPO&Japio
JP4701278A 1978-04-19 1978-04-19 Preparation of humidity sensor Pending JPS54139097A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP4701278A JPS54139097A (en) 1978-04-19 1978-04-19 Preparation of humidity sensor
GB7913421A GB2022837B (en) 1978-04-19 1979-04-18 Moisture sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4701278A JPS54139097A (en) 1978-04-19 1978-04-19 Preparation of humidity sensor

Publications (1)

Publication Number Publication Date
JPS54139097A true JPS54139097A (en) 1979-10-29

Family

ID=12763249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4701278A Pending JPS54139097A (en) 1978-04-19 1978-04-19 Preparation of humidity sensor

Country Status (2)

Country Link
JP (1) JPS54139097A (en)
GB (1) GB2022837B (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5742943U (en) * 1980-08-23 1982-03-09
US4761710A (en) * 1987-06-23 1988-08-02 Industrial Technology Research Institute Polyimide capacitive humidity sensing element
JPH04294268A (en) * 1991-03-25 1992-10-19 Matsushita Electric Ind Co Ltd Gas sensor and preparation thereof
US5206615A (en) * 1988-03-31 1993-04-27 W. L. Gore & Associates, Inc. Sensor for measuring solute concentration in an aqueous solution
JP2008209373A (en) * 2007-02-28 2008-09-11 Adixen Sensistor Ab Modified hydrogen gas detecting semiconductor sensor
CN104165904A (en) * 2014-08-19 2014-11-26 山东理工大学 Method for detecting concentration of high-temperature gas phase moisture online
WO2017064784A1 (en) * 2015-10-15 2017-04-20 株式会社日立製作所 Moisture detection element, gas detection device, and breath inspection system
JP2018179757A (en) * 2017-04-13 2018-11-15 株式会社日立製作所 Humidity detection element and hygrometer
CN112098478A (en) * 2020-09-17 2020-12-18 昆明理工大学 All-inorganic lead-free double perovskite humidity sensor and preparation method thereof

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57109319A (en) * 1980-12-16 1982-07-07 Yoshio Imai Capacity type moisture sensor and method of producing same
BE1010571A3 (en) * 1996-08-19 1998-10-06 Haan Andre Method of manufacturing an element form of semiconductor (s).
ES2445459B1 (en) * 2012-07-31 2014-12-10 Universidad Autónoma de Madrid CONDENSATION SENSOR, AND MANUFACTURING PROCEDURE OF SUCH SENSOR
CN113340948A (en) * 2021-06-09 2021-09-03 重庆大学 Preparation method of high-response humidity sensor based on halogenated perovskite microcrystal and product thereof

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5742943U (en) * 1980-08-23 1982-03-09
JPS6142120Y2 (en) * 1980-08-23 1986-11-29
US4761710A (en) * 1987-06-23 1988-08-02 Industrial Technology Research Institute Polyimide capacitive humidity sensing element
US5206615A (en) * 1988-03-31 1993-04-27 W. L. Gore & Associates, Inc. Sensor for measuring solute concentration in an aqueous solution
JPH04294268A (en) * 1991-03-25 1992-10-19 Matsushita Electric Ind Co Ltd Gas sensor and preparation thereof
JP2008209373A (en) * 2007-02-28 2008-09-11 Adixen Sensistor Ab Modified hydrogen gas detecting semiconductor sensor
CN104165904A (en) * 2014-08-19 2014-11-26 山东理工大学 Method for detecting concentration of high-temperature gas phase moisture online
WO2017064784A1 (en) * 2015-10-15 2017-04-20 株式会社日立製作所 Moisture detection element, gas detection device, and breath inspection system
JPWO2017064784A1 (en) * 2015-10-15 2018-04-12 株式会社日立製作所 Moisture detection element, gas detection device and breath test system
US10883949B2 (en) 2015-10-15 2021-01-05 Hitachi, Ltd. Moisture detection element, gas detection device, and breath inspection system
JP2018179757A (en) * 2017-04-13 2018-11-15 株式会社日立製作所 Humidity detection element and hygrometer
CN112098478A (en) * 2020-09-17 2020-12-18 昆明理工大学 All-inorganic lead-free double perovskite humidity sensor and preparation method thereof
CN112098478B (en) * 2020-09-17 2021-07-20 昆明理工大学 All-inorganic lead-free double perovskite humidity sensor and preparation method thereof

Also Published As

Publication number Publication date
GB2022837B (en) 1982-08-11
GB2022837A (en) 1979-12-19

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